This product has been replaced by the following new product: V-551 PIMag® Precision Linear Stage

UPS-150 Ultra Precision Stage

UPS-150 Ultra Precision Stage
Product Description Specifications Downloads Quote / Order

The Ultra Precision Stage UPS-150 was specifically designed for sub-surface wafer inspection, fiber alignment, high precision robotics and for all tasks where a maximum of positioning accuracy and reliability is absolutely mandatory.

All ultra precision stages UPS-150 are equipped with a linear scale which is centrally installed between the guides. Two limit switches protect against accidental over-travel. Due to high-quality cross-roller bearings a maximum of load capacity and smooth motion is guaranteed. Special, stress-relieved, tempered aluminum-alloy guarantees a homogeneous non-warping stage structure. The structural series 150 is driven by iron-less linear motors and provides high acceleration and high travel speed. System accuracy below 1µm/100mm travel and a bi-directional repeatability of less than 0.025 µm is guaranteed. The ultra precision stages are supplied with certificate of performance (flatness, straightness, pitch, yaw & position). The measurement is made with the stage mounted and unloaded on granite with a flatness <1µm.

Specifications

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Downloads

Quote / Order

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68409111

UPS-150 Ultra Precision Stage, Iron-Less Linear Motor-015, 52 mm (2"), Linear Steel Scale-011

68409112

UPS-150 Ultra Precision Stage, Iron-Less Linear Motor-015, 52 mm (2"), Linear Glass Scale-020

68409121

UPS-150 Ultra Precision Stage, Iron-Less Linear Motor-015, 102 mm (4"), Linear Steel Scale-011

68409122

UPS-150 Ultra Precision Stage, Iron-Less Linear Motor-015, 102 mm (4"), Linear Glass Scale-011

68409131

UPS-150 Ultra Precision Stage, Iron-Less Linear Motor-015, 155 mm (6"), Linear Steel Scale-011

68409132

UPS-150 Ultra Precision Stage, Iron-Less Linear Motor-015, 155 mm (6"), Linear Glass Scale-020

68409141

UPS-150 Ultra Precision Stage, Iron-Less Linear Motor-015, 205 mm (8"), Linear Steel Scale-011

68409142

UPS-150 Ultra Precision Stage, Iron-Less Linear Motor-015, 205 mm (8"), Linear Glass Scale-020

68409151

UPS-150 Ultra Precision Stage, Iron-Less Linear Motor-015, 305 mm (12"), Linear Steel Scale-011

68409152

UPS-150 Ultra Precision Stage, Iron-Less Linear Motor-015, 305 mm (12"), Linear Glass Scale-020

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