P-734 XY Piezo Scanner

Highly Dynamic, Highest Travel Accuracy, with Aperture

  • Flatness 5 nm, ideal for surface analysis and scanning microscopy
  • Parallel kinematics for faster response times and higher multi-axis accuracy
  • Travel range 100 µm × 100 µm
  • Clear aperture 56 mm × 56 mm
  • Resolution of 0.3 nm due to capacitive position sensors
P-734 XY Piezo Scanner
Product Description Specifications Downloads Quote / Order

Application fields

  • Scanning microscopy
  • Confocal microscopy
  • Mask/wafer positioning
  • Surface measuring technology
  • Nanoimprinting
  • Micromanipulation
  • Image processing / stabilization
  • Nanopositioning with high flatness and straightness of motion

Outstanding lifetime thanks to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

High dynamics multi-axis operation due to parallel kinematics

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

Specifications

Datasheet

Datasheet P-734

Version / Date
2023-12-11
pdf - 644 KB
Version / Date
2023-12-11
pdf - 651 KB

Downloads

Product Note

Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date
2021-04-19
pdf - 377 KB
English

Datasheet

Datasheet

Datasheet P-734

Version / Date
2023-12-11
pdf - 644 KB
Version / Date
2023-12-11
pdf - 651 KB

Documentation

Documentation

User Manual PZ103

P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors

Version / Date
1.1.0 2020-10-26
pdf - 2 MB
Version / Date
1.1.0 2020-10-26
pdf - 2 MB

3-D Models

3-D Models

P-734 3-D model

zip - 1 MB

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