P-915KWEF Piezo Hexapod

Fine Adjustment and Active, Dynamic Error Correction

P-915KWEF Piezo Hexapod
Product Description Specifications Downloads Quote / Order
  • Load capacity up to 1500 g
  • Min. incremental motion 1 nm / 0.07 µrad
  • Travel ranges to 70 µm
  • Capacitive sensors for dynamic scanning and precision positioning

Highly dynamic reference-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction.

Piezo actuator direct drives with high stiffness and resonant frequency for dynamic positioning.

A powerful real-time digital controller controls the drive axes

 

Capacitive position sensors

Direct, absolute position measurement with subnanometer accuracy and a high bandwidth and stability

 

Applications

Dynamic optimization of axial runout, eccentricity and evenness of rotation stages. Vibration insulation, fine adjustment

Specifications

Datasheet P-915KWEF

Version / Date
2015-03-30
Version / Date
2015-03-30
Document language
pdf - 702 KB
pdf - 698 KB

Downloads

Datasheet

Datasheet P-915KWEF

Version / Date
2015-03-30
Version / Date
2015-03-30
Document language
pdf - 702 KB
pdf - 698 KB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

P-915KWEF

Piezo Hexapod for Active and Dynamic Correction of Angular Errors of Rotation Stages