P-915KLVS Vacuum Compatible XYZ Piezo Scanner

Large Clear Aperture, High-Dynamics, High-Load Nanopositioner

P-915KLVS Vacuum Compatible XYZ Piezo Scanner
Product Description Specifications Downloads Quote / Order
  • Vacuum-compatible to 10-6 hPa
  • Direct metrology with capacitive sensors
  • Excellent straightness: <0.1 µrad runout
  • Frictionless, high-precision flexure guiding system

Specifications

Datasheet P-915KLVS

Document language
pdf - 639 KB
pdf - 642 KB

Downloads

Datasheet

Datasheet P-915KLVS

Document language
pdf - 639 KB
pdf - 642 KB

Quote / Order

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P-915KLVS
XYZ Nanopositioning System with Large Clear Aperture, 100 µm × 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, Vacuum-Compatible to 10-6 hPa