P-915KPPS XY-Theta-Z Piezo Stage

3 Degrees of Freedom in the XY Plane

P-915KPPS XY-Theta-Z Piezo Stage
Product Description Specifications Downloads

Specifications

Datasheet P-915KPPS

Document language
pdf - 645 KB
pdf - 645 KB

Downloads

Datasheet

Datasheet P-915KPPS

Document language
pdf - 645 KB
pdf - 645 KB
  • Travel ranges 250 µm × 250 µm, 16 mrad
  • Frictionless, high-precision flexure guiding system
  • High stiffness over 1 N/µm
  • Outstanding lifetime due to PICMA® piezo actuators

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