S-310 • S-316 Piezo Z and Tip/Tilt Scanner

High Dynamics System with Aperture

S-310 • S-316 Piezo Z and Tip/Tilt Scanner
Product Description Specifications Downloads Quote / Order
  • Clear aperture 10 mm
  • Tripod piezo drive
  • Linear travel ranges to 12 µm (phase shifter)
  • Sub-ms response time
  • Sub-µrad resolution
  • Closed-loop versions for increased precision

Fields of application

  • Image processing / stabilization
  • Laser scanning / beam steering
  • Laser tuning
  • Optical filters / switches
  • Beam stabilization
  • Interferometry

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High dynamics multi-axis operation due to parallel kinematics

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

Specifications

Datasheet S-310 – S-316

Version / Date
2018-04-16
Version / Date
2018-04-16
Document language
pdf - 1 MB
pdf - 1 MB

Downloads

Datasheet

Datasheet S-310 – S-316

Version / Date
2018-04-16
Version / Date
2018-04-16
Document language
pdf - 1 MB
pdf - 1 MB

Documentation

Short Instructions PZ277EK

S-3xx Piezo Tip/Tilt Platforms
Version / Date
1.0.0 November 2017
pdf - 1 MB

User Manual S310T0001

S-310, S-311, S-314, S-315, S-316 Piezo Z / Tip / Tilt Scanner
Version / Date
2018-01-23
Document language English
pdf - 833 KB

3-D Models

S-316 STEP

Quote / Order

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