N-510KAWP High-Force NEXLINE® Z / Tip / Tilt Platform

Nanometer Precision for Semiconductor Industry, Wafer Alignment

N-510KAWP High-Force NEXLINE® Z / Tip / Tilt Platform
Product Description Specifications Downloads Quote / Order
  • Self-locking, no heat generation at rest
  • Vacuum-compatible and non-magnetic designs feasible
  • Parallel kinematics for enhanced dynamics and better multi-axis accuracy
  • NEXLINE® piezo walking drive free from wear and tear
  • Load capacity to 200 N
  • High precision with integrated 5 nm incremental sensors + picometer resolution dithering mode

Specifications

Datasheet N-510KAWP

Document language
pdf - 668 KB
pdf - 668 KB

Downloads

Datasheet

Datasheet N-510KAWP

Document language
pdf - 668 KB
pdf - 668 KB

Quote / Order

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N-510KAWP

NEXLINE® Z / Tip / Tilt Platform