N-565 Linear Positioner with the Highest Precision

NEXACT® Piezo Stepping Drive with Subnanometer Encoder Resolution

PI N-565
Ultraprecision: 2 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution
Long travel ranges: 13 mm, 26 mm or 52 mm
Self-locking when switched off: Saves energy and reduces generation of heat
Long lifetime and high reliability due to PiezoWalk® technology
Compact design: 65 mm width, 20 mm height

NEXACT® reference-class linear positioner

Linear positioner with NEXACT® PiezoWalk® drives allow high-precision positioning in the nanometer range over long travel ranges. They are equipped with direct-measuring linear encoders and crossed roller bearings for the highest accuracy.

PiezoWalk® technology: High resolution and low wear

The PiezoWalk® technology combines the technological advantages of piezo actuators with those of piezomotors. PiezoWalk® walking drives offer not only subnanometer resolution, high forces, and high stiffness but allow theoretically unlimited travel ranges. In contrast to other piezo-motorized drive principles, PiezoWalk® walking drives are not subject to sliding friction effects. They are based on stiction contacts of several piezo actuators that step along a runner. At rest, PiezoWalk® walking drives are self-locking, consume no energy, and do not generate heat.

Direct position measuring with PIOne linear encoder

The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured value, allows a position resolution of much less than one nanometer. In addition, due to the short signal period and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal.

Valid patents

In the technological field of piezo stepping drives (NEXACT®, NEXLINE®), PI has the following patents and patent applications:

DE10148267B4, EP1267478B1, EP2209202B1, EP2209203B1, US6800984B2

Fields of application

Sample manipulation, sample positioning, optics or mechanical components with high precision and stability, precision mechanics in the semiconductor industry, micromanipulation, microscopy, automation, applications in confined spaces, applications in a vacuum or nonmagnetic environments.

Specifications

pdf
pdf
pdf

Datasheet N-565

2017-09-01
2017-09-01
2017-11-06
pdf - 517 KB
pdf - 514 KB
pdf - 848 KB

Drawings / Images

PI N-565 Drawing

Downloads

Datasheet

pdf
pdf
pdf

Datasheet N-565

2017-09-01
2017-09-01
2017-11-06
pdf - 517 KB
pdf - 514 KB
pdf - 848 KB

Documentation

pdf
pdf

User Manual MP148E110

N-565 NEXACT® Stage
2016-06-01
2016-06-01
pdf - 1 MB
pdf - 2 MB
pdf

Short Instructions MP137EK

N-524, N-565, N-765 NEXACT® Stages
2015-10-09
pdf - 803 KB

3-D Models

zip

N-565 STEP

English
zip - 8 MB