P-620.1 – P-629.1 PIHera Piezo Linear Precision Positioner

Variable Travel Ranges and Axis Configuration

Travel ranges 50 to 1800 µm
Resolution to 0.1 nm
linearity error 0.02 %
X, XY, Z versions; XYZ combination possible
Vacuum-compatible versions to 10-9 hPa

Fields of application

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test applications
  • Semiconductor technology
  • Photonics
  • Fiber positioning

 

Specifications

pdf
pdf

Datasheet P-620.1 – P-629.1

2018-02-19
2018-02-19
pdf - 985 KB
pdf - 989 KB

Drawings / Images

PI P-62x.1 Drawing

Versions with Sub-D connector (m)

P-620.1CD
PIHera precision linear nanopositioning system, 50 µm, direct metrology, capacitive sensor, Sub-D connector
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P-621.1CD
PIHera precision linear nanopositioning system, 100 µm, direct metrology, capacitive sensor, Sub-D connector
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P-622.1CD
PIHera precision linear nanopositioning system, 250 µm, direct metrology, capacitive sensor, Sub-D connector
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P-625.1CD
PIHera precision linear nanopositioning system, 500 µm, direct metrology, capacitive sensor, Sub-D connector
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P-628.1CD
PIHera precision linear nanopositioning system, 800 µm, direct metrology, capacitive sensor, Sub-D connector
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P-629.1CD
PIHera precision linear nanopositioning system, 1500 µm, direct metrology, capacitive sensor, Sub-D connector
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Versions with LEMO connector

P-620.1CL
PIHera precision linear nanopositioning system, 50 µm, direct metrology, capacitive sensor, LEMO connector(s)
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P-621.1CL
PIHera precision linear nanopositioning system, 100 µm, direct metrology, capacitive sensor, LEMO connector(s)
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P-622.1CL
PIHera precision linear nanopositioning system, 250 µm, direct metrology, capacitive sensor, LEMO connector(s)
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P-625.1CL
PIHera precision linear nanopositioning system, 500 µm, direct metrology, capacitive sensor, LEMO connector(s)
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P-628.1CL
PIHera precision linear nanopositioning system, 800 µm, direct metrology, capacitive sensor, LEMO connector(s)
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P-629.1CL
PIHera precision linear nanopositioning system, 1500 µm, direct metrology, capacitive sensor, LEMO connector(s)
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Linear positioner without position sensor

P-620.10L
PIHera precision linear nanopositioning system, 60 µm, without sensor, LEMO connector(s)
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P-621.10L
PIHera precision linear nanopositioning system, 120 µm, without sensor, LEMO connector(s)
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P-622.10L
PIHera precision linear nanopositioning system, 300 µm, without sensor, LEMO connector(s)
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P-625.10L
PIHera precision linear nanopositioning system, 600 µm, without sensor, LEMO connector(s)
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P-628.10L
PIHera precision linear nanopositioning system, 950 µm, without sensor, LEMO connector(s)
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P-629.10L
PIHera precision linear nanopositioning system, 1800 µm, without sensor, LEMO connector(s)
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Linear positioner, vacuum compatible to 10-9 hPa

P-620.1UD
PIHera precision linear nanopositioning system, 50 µm, direct metrology, capacitive sensor, Sub-D connector, vacuum compatible to 10-9 hPa
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P-621.1UD
PIHera precision linear nanopositioning system, 100 µm, direct metrology, capacitive sensor, Sub-D connector, vacuum compatible to 10-9 hPa
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P-622.1UD
PIHera precision linear nanopositioning system, 250 µm, direct metrology, capacitive sensor, Sub-D connector, vacuum compatible to 10-9 hPa
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P-625.1UD
PIHera precision linear nanopositioning system, 500 µm, direct metrology,capacitive sensor, Sub-D connector, vacuum compatible to 10-9 hPa
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P-628.1UD
PIHera precision linear nanopositioning system, 800 µm, direct metrology, capacitive sensor, Sub-D connector, vacuum compatible to 10-9 hPa
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P-629.1UD
PIHera precision linear nanopositioning system, 1500 µm, direct metrology, capacitive sensor, Sub-D connector, vacuum compatible to 10-9 hPa
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Downloads

Datasheet

pdf
pdf

Datasheet P-620.1 – P-629.1

2018-02-19
2018-02-19
pdf - 985 KB
pdf - 989 KB

Documentation

pdf
pdf

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
2014-07-15
2014-07-15
pdf - 1,015 KB
pdf - 1 MB
pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
4.0.0 2017-02-06
pdf - 635 KB

3-D Models

zip

P-62x.1 STEP

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English
zip - 954 KB

Others

pdf
pdf

Success Story: Optical 3D Surface Measuring Technology

Accurate Profile Reproduction of the Finest Structures Thanks to Piezo Technology and Confocal Technology. Author: Gernot Hamann
SUCESS STORY pi1135
SUCESS STORY pi1135
pdf - 709 KB
pdf - 709 KB