P-620.Z – P-622.Z PIHera Precision Z-Stage

Variable Travel Ranges and Axis Configuration

PI P-62x.Z
Travel ranges 50 µm to 250 µm (400 µm open-loop)
Resolution to 0.1 nm
Positioning accuracy 0.02 %
Direct metrology with capacitive sensors
X, XY, Z, XYZ versions

Specifications

pdf
pdf

Datasheet P-620.Z – P-622.Z

2016-06-28
2016-06-28
pdf - 920 KB
pdf - 910 KB

Drawings / Images

PI P-62x.Z Drawing

Downloads

Datasheet

pdf
pdf

Datasheet P-620.Z – P-622.Z

2016-06-28
2016-06-28
pdf - 920 KB
pdf - 910 KB

Documentation

pdf
pdf

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
2014-07-15
2014-07-15
pdf - 1,015 KB
pdf - 1 MB
pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
4.0.0 2017-02-06
pdf - 635 KB

3-D Models

zip

P-62x.Z STEP

English
zip - 327 KB