V-522 • V-524 • V-528 High-Dynamics PIMag® Linear Stage

Voice Coil Direct Drive with Direct Position Measurement

Fast scanning and positioning
Travel ranges 5 mm, 10 mm, 20 mm
Scanning frequencies of more than 10 Hz
Max. velocity 250 mm/s
Crossed roller bearings for the highest precision

Reference-class linear stage

Linear positioning stages with magnetic direct drives largely dispense with mechanical components in the drivetrain and the drive force acts directly on the motion platform. Together with precision bearings, a high travel accuracy and longer lifetime is achieved. The linear positioning stages are particularly suitable for scanning applications.

PIMag® voice coil

Voice coil drives consist of 2 essential components: A permanent magnet and a coil, which is located in the air gap of the magnetic field. When current flows through the coil, it moves in the magnetic field of the permanent magnet. The direction of motion depends on the polarity. Thanks to their low weight and friction-free drive principle, voice coil drives are particularly suitable for applications, which require high dynamics and high velocities at limited travel ranges. High scan frequencies and precision positioning are also possible with these drives, because they are free of the effects of hysteresis.

Crossed roller bearings

With crossed roller bearings, the point contact of the balls in ball bearings is replaced by a line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller bearings are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent linear guide creeping.

Direct position measurement with incremental encoder

Noncontact optical encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring.

Fields of application

Industry and research. Metrology, photonics and precision scanning in semiconductor or flat panel display manufacturing

Specifications

pdf
pdf
pdf

Datasheet V-522 • V-524 • V-528

2017-09-20
2017-09-20
2017-09-20
pdf - 2 MB
pdf - 2 MB
pdf - 2 MB

Downloads

Datasheet

pdf
pdf
pdf

Datasheet V-522 • V-524 • V-528

2017-09-20
2017-09-20
2017-09-20
pdf - 2 MB
pdf - 2 MB
pdf - 2 MB

Documentation

pdf

Short Instructions MP163EK

V-408 / V-508 / V-52x / V-551 Stages with PIMag® Drives
2.0.0 December 2017
English
pdf - 619 KB
pdf

User Manual V522T0002

V-522 / V-524 / V-528 PIMag® Voice Coil Linear Stages for 5 mm / 10 mm / 20 mm Travel Range
2017-10-09
English
pdf - 1 MB

3-D Models

zip

V-52x STEP

zip - 3 MB