L-509 V6 • V7 • V9 Precision Linear Stage Suitable for Vacuum

Compact Design, for Loads to 10 kg

  • Suitable for vacuum up to 10-9 hPa
  • Travel ranges from 26 to 102 mm (1" to 4")
  • Repeatability to 0.1 µm
  • DC gear motor, stepper motor
  • Direction-sensing reference switch
  • Multi-axis setups possible
L-509 V6 • V7 • V9 Precision Linear Stage Suitable for Vacuum
Product Description Specifications Downloads Quote / Order

Product overview

High travel accuracy and load capacity due to crossed roller guides with anti-creep system. Precision ball screw with 1 mm pitch. Compact design. Stress-relieved aluminum base for highest stability. Limit switches. Noncontact optical reference switch with direction sensing in the middle of the travel range.

Reduced outgassing especially for use in vacuum environments

Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. Therefore, a bakeout temperature of up to 80 °C can be reached. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6 hPa.

Higher quality for high vacuum applications

In this case, special components suitable for high vacuum are used, such as motor, measuring system, and limit switches. In addition, the surface is made of uncoated aluminum, the drive screw and guides are made of stainless steel. With this, the PI V7 vacuum class is reached, which means up to 10-7 hPa.

The highest quality for special requirements in ultrahigh vacuum

In this vacuum class, the product is optimized in all details and thanks to components suitable for ultrahigh vacuum, in order to reach PI V9 vacuum class up to 10-9 hPa. Among other things, only selected types of plastic are used for this purpose and bakeout temperatures of 120 °C with measuring system, respectively 150 °C without measuring system are applied.

Motor types available

  • DC motor with gearhead for high torques and resolution at low motor power, to 10-6 hPa
  • 2-phase stepper motor for low velocity and high resolution, to 10-9 hPa

Types of position measuring

  • Without encoder (open loop)
  • Integrated rotary encoder on the motor shaft

Application fields

Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.

Specifications

Datasheet

Datasheet L-509-V

Version / Date
2021-03-24
pdf - 9 MB
Version / Date
2021-03-24
pdf - 9 MB
Version / Date
2021-01-18
pdf - 1 MB

Downloads

Datasheet

Datasheet

Datasheet L-509-V

Version / Date
2021-03-24
pdf - 9 MB
Version / Date
2021-03-24
pdf - 9 MB
Version / Date
2021-01-18
pdf - 1 MB

Documentation

Documentation

Short Instructions MP146EK

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date
2.0.0 01/2020
pdf - 736 KB
Version / Date
2.0.0 01/2020
pdf - 749 KB
Documentation

User Manual MP186

This document describes the following precision linear positioner, vacuum-compatible 1 E-7 hPa: L-509.0x1300V7; L-509.0x1311V7

Version / Date
1.2 2020-06-29
pdf - 2 MB
English
Documentation

User Manual L509T0018

L-509 Vacuum-Compatible Precision Linear Positioner (1E-9 hPa)

Version / Date
2020-06-29
pdf - 3 MB
English
Documentation

User Manual MP174

L-509 Vacuum-Compatible Precision Linear Stage (1 E-6 hPa)

Version / Date
1.2 2020-06-30
pdf - 3 MB
Version / Date
1.2 2020-06-30
pdf - 3 MB

3-D Models

3-D Models

3-D model L-509.054132V6

Version / Date
2019-12-06
zip - 3 MB
3-D Models

3-D model L-509.051600V9

Version / Date
2019-12-06
zip - 4 MB
3-D Models

3-D model L-509.051100V6

Version / Date
2019-12-06
zip - 3 MB
3-D Models

3-D model L-509.034132V6

Version / Date
2019-12-06
zip - 3 MB
3-D Models

3-D model L-509.031600V9

Version / Date
2019-12-06
zip - 4 MB
3-D Models

3-D model L-509.031300V7

Version / Date
2019-12-06
zip - 3 MB
3-D Models

3-D model L-509.031100V6

Version / Date
2019-12-06
zip - 3 MB
3-D Models

3-D model L-509.024132V6

Version / Date
2019-12-06
zip - 3 MB
3-D Models

3-D model L-509.021600V9

Version / Date
2019-12-06
zip - 3 MB
3-D Models

3-D model L-509.021300V7

Version / Date
2019-12-06
zip - 3 MB
3-D Models

3-D model L-509.0513xxV7

Version / Date
2019-12-09
zip - 5 MB
3-D Models

3-D model L-509.0211xxV6

Version / Date
2019-12-09
zip - 7 MB
Separate connection cable required for motor and sensor connection respectively.

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