M-511.DD1
Microtranslation stage, 102 mm travel range, ActiveDrive DC motor, linear encoder
M-511 • M-521 • M-531 High-Precision Linear Stage
High Travel Accuracy, Long Travel Ranges, Many Motor Variants
- Travel ranges 102, 204, and 306 mm (4”, 8”, 12”)
- Max. velocity to 100 mm/s
- Encoder resolution 50 nm
- Load capacity to 100 kg
- Zero-play ball screw
- XY and XYZ combinations
M-511
M-511 • M-521 • M-531 High-Precision Linear Stage
Product Description
Specifications
Downloads
Quote / Order
Reference-class linear stage
High travel accuracy and load capacity due to precision linear guides with preloaded recirculating ball bearings. Backlash-compensated ball screw with 2 mm pitch. Stress-relieved aluminum base for highest stability.
XY and XYZ combinations possible with M-501 precision Z stages.
Drive types and position measurement
- M-5x1.DD1: DC motor with integrated ActiveDrive amplifiers for high velocity combined with direct-measuring linear encoder for high resolution and repeatability. M-5x1.DD2 also with integrated holding brake.
- M-5x1.DG1: DC gear motor with direct control and rotary encoder.
- M-5x1.PG1: DC gear motor with integrated ActiveDrive amplifier and rotary encoder.
- M-5x1.PD1: DC motor with integrated amplifier and rotary encoder.
- M-5x1.EC: Brushless DC motor with integrated block commutation and rotary encoder.
Noncontact limit switches. Noncontact reference switch in the middle of the travel range.
Application fields
Industry and research. Laser materials processing, surface inspection.
Specifications
Specifications
Motion and positioning | M-5x1.DD1 M-5x1.DD2 | M-5x1.EC M-5x1.PD1 | M-5x1.DG1 M-5x1.PG1 | Unit | Tolerance |
|---|---|---|---|---|---|
Travel range | M-511: 102 (4‘‘) M-521: 204 (8‘‘) M-531: 306 (12‘‘) | M-511: 102 (4‘‘) M-521: 204 (8‘‘) M-531: 306 (12‘‘) | M-511: 102 (4‘‘) M-521: 204 (8‘‘) M-531: 306 (12‘‘) | mm | |
Integrated sensor | Linear encoder | Rotary encoder | Rotary encoder | ||
Sensor resolution linear encoder | 0.05 | µm | |||
Sensor resolution rotary encoder | – | 4096 | 2048 | Cts./rev. | |
Design resolution | 0.05 | 0.488 | 0.033 | µm | Typ. |
Minimum incremental motion | 0.1 | 0.5 | 0.4 | µm | Typ. |
Unidirectional repeatability | 0.1 | 0.5 | 0.4 | µm | Typ. |
Bidirectional repeatability | ±0.2 | – | – | µm | Typ. |
Backlash | – | 1 | 1 | µm | Typ. |
Pitch / yaw per 100 mm | ±35 | ±35 | ±35 | µrad | Typ. |
Straightness / flatness per 100 mm | 1 | 1 | 1 | µm | |
Velocity | 50 | 100 | 6 | mm/s | Max. |
Drive properties | M-5x1.DD1 M-5x1.DD2 | M-5x1.EC M-5x1.PD1 | M-5x1.DG1 M-5x1.PG1 | Unit | Tolerance |
|---|---|---|---|---|---|
Motor type | DC motor with PWM control | DC motor with PWM control* | DC gear motor |
| |
Motor resolution | – | – | – | Steps/rev. | |
Guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | ||
Operating voltage | 24 | 24 | M-5x1.DG1: 0 to ±12 M-5x1.PG1: 24 | V |
|
Motor power | 30 | 60 | 3 | W | Nom. |
Torque | 80 | 70 | 5 | mNm | Nom. |
Reference and limit switches | Hall effect | Hall effect | Hall effect |
|
|
Miscellaneous | M-5x1.DD1 M-5x1.DD2 | M-5x1.EC M-5x1.PD1 | M-5x1.DG1 M-5x1.PG1 | Unit | Tolerance |
|---|---|---|---|---|---|
Operating temperature range | 10 to 50 | -20 to 65 | -20 to 65 | °C | |
Material | Aluminum, black anodized | ||||
Mass | M-511: 5 M-521: 6.1 M-531: 7.2 | M-511: 5 M-521: 6.1 M-531: 7.2 | M-511: 5 M-521: 6.1 M-531: 7.2 | kg | ±5 % |
Connector | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | ||
Recommended controllers | C-863 C-884 | C-863 C-884 | C-863 C-884 |
* M-5xx.EC: Brushless DC motor with integrated block commutation (PWM control).
Connecting cables are not in the scope of delivery and must be ordered separately.
Downloads
Product Note
Product Note
Product Change Notification M-Portfolio-Streamlining Part-3
M-313.80, M-331.1MS, M-332.5MS, M-333.1MS, M-333.2MS, M-403.1VG, M-403.1VP, M-403.2VG, M-403.2VP, M-403.4VG, M-403.4VP, M-403.6VG, M-403.6VP, M-403.8VG, M-403.8VP, M-413.1VG, M-413.1VP, M-413.2VG, M-413.2VP, M-413.3VG, M-413.3VP, M-414.1VG, M-414.1VP, M-414.2VG, M-414.2VP, M-414.3VG, M-414.3VP, M-414.500, M-451.01, M-451.12S, M-451.1DG, M-451.1PD, M-500.18V, M-500.90, M-505.4DG, M-511.2S1, M-521.2S1, M-531.2S1, M-605.11, M-619.00, M-620.00, M-621.00, M-622.00, M-623.00, M-624.10, M-642.00, M-653.00, M-655.00
Version / Date
2019-08-13
pdf - 381 KB
English
Datasheet
Documentation
Documentation
User Manual MP113
M-511, M-521, M-531 Micropositioning Stages
Version / Date
1.2 2021-10-04
pdf - 2 MB
Version / Date
1.2 2021-10-04
pdf - 2 MB
3-D Models
3-D Models
M-511 3-D model
zip - 4 MB
3-D Models
M-521 3-D model
zip - 3 MB
3-D Models
M-531 3-D model
zip - 4 MB
Separate connection cable required for motor and sensor connection respectively.
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
Stages with 102 mm travel range
M-511.DD2
Microtranslation stage, 102 mm travel range, ActiveDrive DC motor, linear encoder, motor brake
M-511.PD1
Microtranslation stage, 102 mm travel range, ActiveDrive DC motor, rotary encoder
M-511.EC
Microtranslation stage, 102 mm travel range, brushless DC motor, rotary encoder
M-511.DG1
Microtranslation stage, 102 mm travel range, DC gear motor, rotary encoder
M-511.PG1
Microtranslation stage, 102 mm travel range, ActiveDrive DC gear motor, rotary encoder
Stages with 204 mm travel range
M-521.DD1
Microtranslation stage, 204 mm travel range, ActiveDrive DC motor, linear encoder
M-521.DD2
Microtranslation stage, 204 mm travel range, ActiveDrive DC motor, linear encoder, motor brake
M-521.PD1
Microtranslation stage, 204 mm travel range, ActiveDrive DC motor, rotary encoder
M-521.EC
Microtranslation stage, 204 mm travel range, brushless DC motor, rotary encoder
M-521.DG1
Microtranslation stage, 204 mm travel range, DC gear motor, rotary encoder
M-521.PG1
Microtranslation stage, 204 mm travel range, ActiveDrive DC gear motor, rotary encoder
Stages with 306 mm travel range
M-531.DD1
Microtranslation stage, 306 mm travel range, ActiveDrive DC motor, linear encoder
M-531.DD2
Microtranslation stage, 306 mm travel range, ActiveDrive DC motor, linear encoder, motor brake
M-531.PD1
Microtranslation stage, 306 mm travel range, ActiveDrive DC motor, rotary encoder
M-531.EC
Microtranslation stage, 306 mm travel range, brushless DC motor, rotary encoder
M-531.DG1
Microtranslation stage, 306 mm travel range, DC gear motor, rotary encoder
M-531.PG1
Microtranslation stage, 306 mm travel range, ActiveDrive DC gear motor, rotary encoder
