M-511 • M-521 • M-531 High-Precision Linear Stage
High Travel Accuracy, Long Travel Ranges, Many Motor Variants
- Travel ranges 102, 204, and 306 mm (4”, 8”, 12”)
- Max. velocity to 100 mm/s
- Encoder resolution 50 nm
- Load capacity to 100 kg
- Zero-play ball screw
- XY and XYZ combinations
Reference-class linear stage
High travel accuracy and load capacity due to precision linear guides with preloaded recirculating ball bearings. Backlash-compensated ball screw with 2 mm pitch. Stress-relieved aluminum base for highest stability.
XY and XYZ combinations possible with M-501 precision Z stages.
Drive types and position measurement
- M-5x1.DD1: DC motor with integrated ActiveDrive amplifiers for high velocity combined with direct-measuring linear encoder for high resolution and repeatability. M-5x1.DD2 also with integrated holding brake.
- M-5x1.DG1: DC gear motor with direct control and rotary encoder.
- M-5x1.PG1: DC gear motor with integrated ActiveDrive amplifier and rotary encoder.
- M-5x1.PD1: DC motor with integrated amplifier and rotary encoder.
- M-5x1.EC: Brushless DC motor with integrated block commutation and rotary encoder.
Noncontact limit switches. Noncontact reference switch in the middle of the travel range.
Application fields
Industry and research. Laser materials processing, surface inspection.
Specifications
Specifications
Motion and positioning | M-5x1.DD1 M-5x1.DD2 | M-5x1.EC M-5x1.PD1 | M-5x1.DG1 M-5x1.PG1 | Unit | Tolerance |
---|---|---|---|---|---|
Travel range | M-511: 102 (4‘‘) M-521: 204 (8‘‘) M-531: 306 (12‘‘) | M-511: 102 (4‘‘) M-521: 204 (8‘‘) M-531: 306 (12‘‘) | M-511: 102 (4‘‘) M-521: 204 (8‘‘) M-531: 306 (12‘‘) | mm | |
Integrated sensor | Linear encoder | Rotary encoder | Rotary encoder | ||
Sensor resolution linear encoder | 0.05 | µm | |||
Sensor resolution rotary encoder | – | 4096 | 2048 | Cts./rev. | |
Design resolution | 0.05 | 0.488 | 0.033 | µm | Typ. |
Minimum incremental motion | 0.1 | 0.5 | 0.4 | µm | Typ. |
Unidirectional repeatability | 0.1 | 0.5 | 0.4 | µm | Typ. |
Bidirectional repeatability | ±0.2 | – | – | µm | Typ. |
Backlash | – | 1 | 1 | µm | Typ. |
Pitch / yaw per 100 mm | ±35 | ±35 | ±35 | µrad | Typ. |
Straightness / flatness per 100 mm | 1 | 1 | 1 | µm | |
Velocity | 50 | 100 | 6 | mm/s | Max. |
Drive properties | M-5x1.DD1 M-5x1.DD2 | M-5x1.EC M-5x1.PD1 | M-5x1.DG1 M-5x1.PG1 | Unit | Tolerance |
---|---|---|---|---|---|
Motor type | DC motor with PWM control | DC motor with PWM control* | DC gear motor |
| |
Motor resolution | – | – | – | Steps/rev. | |
Guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | ||
Operating voltage | 24 | 24 | M-5x1.DG1: 0 to ±12 M-5x1.PG1: 24 | V |
|
Motor power | 30 | 60 | 3 | W | Nom. |
Torque | 80 | 70 | 5 | mNm | Nom. |
Reference and limit switches | Hall effect | Hall effect | Hall effect |
|
|
Miscellaneous | M-5x1.DD1 M-5x1.DD2 | M-5x1.EC M-5x1.PD1 | M-5x1.DG1 M-5x1.PG1 | Unit | Tolerance |
---|---|---|---|---|---|
Operating temperature range | 10 to 50 | -20 to 65 | -20 to 65 | °C | |
Material | Aluminum, black anodized | ||||
Mass | M-511: 5 M-521: 6.1 M-531: 7.2 | M-511: 5 M-521: 6.1 M-531: 7.2 | M-511: 5 M-521: 6.1 M-531: 7.2 | kg | ±5 % |
Connector | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | ||
Recommended controllers | C-863 C-884 | C-863 C-884 | C-863 C-884 |
Downloads
Product Note
Product Change Notification M-Portfolio-Streamlining Part-3
M-313.80, M-331.1MS, M-332.5MS, M-333.1MS, M-333.2MS, M-403.1VG, M-403.1VP, M-403.2VG, M-403.2VP, M-403.4VG, M-403.4VP, M-403.6VG, M-403.6VP, M-403.8VG, M-403.8VP, M-413.1VG, M-413.1VP, M-413.2VG, M-413.2VP, M-413.3VG, M-413.3VP, M-414.1VG, M-414.1VP, M-414.2VG, M-414.2VP, M-414.3VG, M-414.3VP, M-414.500, M-451.01, M-451.12S, M-451.1DG, M-451.1PD, M-500.18V, M-500.90, M-505.4DG, M-511.2S1, M-521.2S1, M-531.2S1, M-605.11, M-619.00, M-620.00, M-621.00, M-622.00, M-623.00, M-624.10, M-642.00, M-653.00, M-655.00
Datasheet
Documentation
User Manual MP113
M-511, M-521, M-531 Micropositioning Stages
3-D Models
M-511 3-D model
M-521 3-D model
M-531 3-D model
Quote / Order
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