P-753.1CD
LISA high dynamics piezo nanopositioning system, 15 µm, direct position measuring, capacitive sensor, D-sub connector
P-753 LISA Linear Actuator and Stage
Dynamic and Stable in Position
- Guided stage and actuator at the same time
- Travel range to 38 µm
- Resolution 0.1 nm
- Nonmagnetic versions available
- Particularly fast response behavior due to direct drive
- Highest linearity due to capacitive sensors
P-753 LISA linear actuator and stage
P-753.1, dimensions in mm. Max. torque at the M2.5 threads: 0.3 Nm.
P-753.2, dimensions in mm. Max. torque at the M2.5 threads: 0.3 Nm.
P-753.3, dimensions in mm. Max. torque at the M2.5 threads: 0.3 Nm.
P-753 LISA Linear Actuator and Stage
Product Description
Specifications
Downloads
Quote / Order
Application fields
- Scanning microscopy
- Measuring technology
- Test procedures and quality assurance
- Photonics
- Fiber positioning
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
Suitable for sophisticated vacuum applications
All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.
Higher stiffness and dynamics due to PICMA® direct drive
Piezo nanopositioners with PICMA® direct drive have no mechanical translation. This allows fast response speeds as well as the highest possible stiffness and dynamics in the piezo drive range.
Specifications
Specifications
P-753.1CD | P-753.2CD | P-753.3CD | Unit | Tolerance | |
|---|---|---|---|---|---|
Active axes | X | X | X | ||
Motion and positioning | |||||
Integrated sensor | Capacitive | Capacitive | Capacitive | ||
Travel range, closed loop | 15 | 30 | 38 | µm | |
Resolution, closed loop | 0.1 | 0.2 | 0.25 | nm | typ. |
Linearity error, closed loop | 0.03 | 0.03 | 0.03 | % | typ. |
Repeatability | ±1 | ±2 | ±3 | nm | typ. |
Pitch / yaw | ±5 | ±7 | ±10 | µrad | typ. |
Mechanical properties | |||||
Stiffness in motion direction | 45 | 24 | 16 | N/µm | ±20 % |
Resonant frequency, no load | 5.6 | 3.7 | 2.9 | kHz | ±20 % |
Resonant frequency, under load, 200 g | 2.5 | 1.7 | 1.4 | kHz | ±20 % |
Push / pull force capacity in motion direction | 100 / 20 | 100 / 20 | 100 / 20 | N | max. |
Drive properties | |||||
Ceramic type | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | ||
Electrical capacitance | 1.5 | 3.1 | 4.6 | µF | ±20 % |
Miscellaneous | |||||
Operating temperature range | -20 to 80 | -20 to 80 | -20 to 80 | °C | |
Material | Steel | Steel | Steel | ||
Dimensions | 44 mm × 30 mm × 15 mm | 62 mm × 30 mm × 15 mm | 80 mm × 30 mm × 15 mm | ||
Mass | 0.16 | 0.215 | 0.26 | kg | ±5 % |
Cable length | 1.5 | 1.5 | 1.5 | m | ±10 mm |
Sensor / voltage connection | D-sub 7W2 (m) | D-sub 7W2 (m) | D-sub 7W2 (m) | ||
Recommended electronics | E-625, E-754 | E-625, E-754 | E-625, E-754 |
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
Versions with LEMO connector available as P-753.x1C.
Vacuum versions to 10-9 hPa available as P-753.xUD.
Nonmagnetic versions available as P-753.xND.
All specifications based on room temperature (22 °C ±3 °C).
Downloads
Product Note
Product Note
Product Change Notification Piezo Actuator Driven Products
Version / Date
2021-04-19
pdf - 377 KB
English
Datasheet
Documentation
Documentation
User Manual PZ254
P-753 LISA High-Dynamics Piezo Nanopositioning Systems
Version / Date
1.1.0 2022-05-11
pdf - 1 MB
Version / Date
1.1.0 2022-05-11
pdf - 1 MB
3-D Models
3-D Models
P-753 3-D model
zip - 415 KB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
Versions with D-sub connector (m)
P-753.2CD
LISA high dynamics piezo nanopositioning system, 30 µm, direct position measuring, capacitive sensor, D-sub connector
P-753.3CD
LISA high dynamics piezo nanopositioning system, 38 µm, direct position measuring, capacitive sensor, D-sub connector
Versions with LEMO connector
P-753.11C
LISA high dynamics piezo nanopositioning system, 15 µm, direct position measuring, capacitive sensor, LEMO connectors
P-753.21C
LISA high dynamics piezo nanopositioning system, 30 µm, direct position measuring, capacitive sensor, LEMO connectors
P-753.31C
LISA high dynamics piezo nanopositioning system, 38 µm, direct position measuring, capacitive sensor, LEMO connectors
Linear positioners, vacuum compatible to 10-9 hPa
P-753.1UD
LISA high dynamics piezo nanopositioning system, 15 µm, direct position measuring, capacitive sensor, D-sub connector, vacuum compatible to 10-9 hPa
P-753.2UD
LISA high dynamics piezo nanopositioning system, 30 µm, direct position measuring, capacitive sensor, D-sub connector, vacuum compatible to 10-9 hPa
P-753.3UD
LISA high dynamics piezo nanopositioning system, 38 µm, direct position measuring, capacitive sensor, D-sub connector, vacuum compatible to 10-9 hPa
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Compatible Electronics
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Technology
PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.
Vacuum
Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.
Capacitive Sensors
Capacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.