Nanopositioner Z and tip/tilt stage with large aperture, 150 µm / 1.2 mrad, without sensor
- Low profile for easy integration: 16.5 mm
- Clear aperture 80 mm × 80 mm
- Travel range to 150 µm
- Tip/tilt angle to 1.2 mrad
- Parallel kinematics for faster response times and higher multi-axis accuracy
- Sensor technology: Inexpensive strain gauge sensors or capacitive sensors for higher performance
- Outstanding lifetime due to PICMA® piezo actuators
- Combination with microscope stages possible for long travel ranges
- Scanning microscopy
- Super-resolution microscopy
- Mask/wafer positioning
- Sample positioning
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
Datasheet P-541.Z - P-541.T
Datasheet P-541.Z - P-541.T
Short Instructions PZ240
Piezo Positioning Systems: P-5xx / P-6xx / P-7xx
User Manual PZ244
P-541.Z 3-D model
Microscope Stage Configurator
Sample Stages and Holders for Inverted Microscopes
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Nanopositioner Z and tip/tilt stage with large aperture, 100 µm / 0.8 mrad, direct position measuring, capacitive sensors
Nanopositioner Z and tip/tilt stage with large aperture, 100 µm / 0.8 mrad, strain gauge sensors
Vertical nanopositioning stage with large aperture, 150 µm, without sensor
Vertical nanopositioning stage with large aperture, 100 µm, direct position measuring, capacitive sensors