P-612.2 XY Piezo Nanopositioning System

Compact, with Aperture

Compact: Surface 60 mm × 60 mm
100 µm × 100 µm closed-loop travel range (130 µm × 130 µm, open loop)
For cost-critical applications
Clear aperture 20 mm × 20 mm
Parallel kinematics for faster response times and higher multi-axis accuracy
Outstanding lifetime due to PICMA® piezo actuators
Also available as compact version

P-612.2, dimensions in mm

Scanning microscopy
High-throughput microscopy
Super-resolution microscopy
Mask/wafer positioning
Interferometry
Measuring technology
Biotechnology
Micromanipulation

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

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Datasheet

Version / Date

2018-04-16

pdf - 638 KB

Version / Date

2018-04-16

pdf - 970 KB

Version / Date

2018-06-13

pdf - 720 KB

Version / Date

2018-07-11

pdf - 801 KB

Download

	P-612.2SL	P-612.20L	Unit	Tolerance
Active axes	X, Y	X, Y
Motion and positioning
Integrated sensor	SGS	-
Travel range at -20 to +120 V, open loop	130	130	µm	+20 % / -0 %
Travel range, closed loop	100	-	µm
Resolution, open loop	0.8	0.8	nm	typ.
Resolution, closed loop	5	-	nm	typ.
Linearity error	0.4	-	%	typ.
Repeatability	<10	-	nm	typ.
Pitch	±10	±10	µrad	typ.
Yaw in X / Y	±10 / ±50	±10 / ±50	µrad	typ.
Mechanical properties
Stiffness	0.15	0.15	N/µm	±20 %
Resonant frequency, no load	400	400	Hz	±20 %
Resonant frequency, under load, 100 g	200	200	Hz	±20 %
Push/pull force capacity in motion direction	15 / 5	15 / 5	N	max.
Load capacity	15	15	N	max.
Drive properties
Ceramic type	PICMA® P-885	PICMA® P-885
Electrical capacitance	1.5	1.5	µF	±20 %
Miscellaneous
Operating temperature range	-20 to 80	-20 to 80	°C
Material	Aluminum, steel	Aluminum, steel
Mass	105	105	g	±5 %
Cable length	1.5	1.5	m	±10 mm
Voltage connection	LEMO	LEMO
Sensor connection	LEMO	-
Recommended electronics	E-503, E-505, E-621	E-503, E-505, E-621

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

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Product Note

Version / Date

2021-04-19

pdf - 377 KB

English

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Datasheet

Version / Date

2018-04-16

pdf - 638 KB

Version / Date

2018-04-16

pdf - 970 KB

Version / Date

2018-06-13

pdf - 720 KB

Version / Date

2018-07-11

pdf - 801 KB

Download

Documentation

P-612 XY Nanopositioning Systems and Vertical Nanopositioning Stages

Version / Date

1.0.0 2017-04-27

pdf - 2 MB

Version / Date

1.0.0 2017-04-27

pdf - 2 MB

Documentation

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date

6.1.0 10/2019

pdf - 1 MB

Version / Date

6.1.0 10/2019

pdf - 1 MB

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3-D Models

zip - 179 KB

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P-612.20L

XY nanopositioning system, 130 µm × 130 µm, aperture 20 mm × 20 mm, open loop

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P-612.2SL

XY nanopositioning system, 100 µm × 100 µm, aperture 20 mm × 20 mm, strain gauge sensors

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