P-612.2 XY Piezo Nanopositioning System
Compact, with Aperture
- Compact: Surface 60 mm × 60 mm
- 100 µm × 100 µm closed-loop travel range (130 µm × 130 µm, open loop)
- For cost-critical applications
- Clear aperture 20 mm × 20 mm
- Parallel kinematics for faster response times and higher multi-axis accuracy
- Outstanding lifetime due to PICMA® piezo actuators
- Also available as compact version
Application fields
- Scanning microscopy
- High-throughput microscopy
- Super-resolution microscopy
- Mask/wafer positioning
- Interferometry
- Measuring technology
- Biotechnology
- Micromanipulation
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Specifications
Specifications
P-612.2SL | P-612.20L | Unit | Tolerance | |
---|---|---|---|---|
Active axes | X, Y | X, Y | ||
Motion and positioning | ||||
Integrated sensor | SGS | - | ||
Travel range at -20 to +120 V, open loop | 130 | 130 | µm | +20 % / -0 % |
Travel range, closed loop | 100 | - | µm | |
Resolution, open loop | 0.8 | 0.8 | nm | typ. |
Resolution, closed loop | 5 | - | nm | typ. |
Linearity error | 0.4 | - | % | typ. |
Repeatability | <10 | - | nm | typ. |
Pitch | ±10 | ±10 | µrad | typ. |
Yaw in X / Y | ±10 / ±50 | ±10 / ±50 | µrad | typ. |
Mechanical properties | ||||
Stiffness | 0.15 | 0.15 | N/µm | ±20 % |
Resonant frequency, no load | 400 | 400 | Hz | ±20 % |
Resonant frequency, under load, 100 g | 200 | 200 | Hz | ±20 % |
Push/pull force capacity in motion direction | 15 / 5 | 15 / 5 | N | max. |
Load capacity | 15 | 15 | N | max. |
Drive properties | ||||
Ceramic type | PICMA® P-885 | PICMA® P-885 | ||
Electrical capacitance | 1.5 | 1.5 | µF | ±20 % |
Miscellaneous | ||||
Operating temperature range | -20 to 80 | -20 to 80 | °C | |
Material | Aluminum, steel | Aluminum, steel | ||
Mass | 105 | 105 | g | ±5 % |
Cable length | 1.5 | 1.5 | m | ±10 mm |
Voltage connection | LEMO | LEMO | ||
Sensor connection | LEMO | - | ||
Recommended electronics | E-503, E-505, E-621 | E-503, E-505, E-621 |
Downloads
Product Note
Product Change Notification Piezo Actuator Driven Products
Datasheet
Documentation
User Manual PZ280
P-612 XY Nanopositioning Systems and Vertical Nanopositioning Stages
3-D Models
3-D-model P-612.xxL
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.