H-824.V vacuum-compatible 6-axis hexapod

Compact and Precise

H-824.V Vacuum-Compatible 6-Axis Hexapod

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Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction. suitable for vacuum environments to 10^-6 hPa.

The simulation software simulates the limits of the workspace and load capacity of a hexapod. Therefore, even before making a purchase, you can check whether a particular hexapod model can handle the loads, forces, and torques occurring in an application. For this purpose, the simulation tool takes into account the position and motion of the hexapod as well as the pivot point and several reference coordinate systems.

Research and industry. For micromanipulation, biotechnology, semiconductor manufacturing

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Separate connection cable required for power supply and data transmission.
Connecting cables are not in the scope of delivery, although this may be stated otherwise in the manual. The manual is currently being revised

Datasheet

Datasheet H-824.V

Version / Date

2020-12-10

Version / Date

2020-12-10

Document language

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pdf - 768 KB

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pdf - 755 KB

Motion and positioning	H-824.G2V	H-824.D2V	Unit	Tolerance
	for higher resolution and load	for higher velocity
Active axes	X, Y, Z, θ_X, θ_Y, θ_Z	X, Y, Z, θ_X, θ_Y, θ_Z
Travel range* X, Y	±22.5	±22.5	mm
Travel range* Z	±12.5	±12.5	mm
Travel range* θ_X, θ_Y	±7.5	±7.5	°
Travel range* θ_Z	±12.5	±12.5	°
Minimum incremental motion X, Y, Z	0.3	2; 2; 1	µm	Typ.
Minimum incremental motion θ_X, θ_Y, θ_Z	3.5	12; 12; 14	µrad	Typ.
Backlash X, Y	5	3	µm	Typ.
Backlash Z	1.5	1.5	µm	Typ.
Backlash θ_X, θ_Y	30	20	µrad	Typ.
Backlash θ_Z	45	60	µrad	Typ.
Repeatability X, Y	±0.4	±0.5	µm	Typ.
Repeatability Z	±0.1	±0.15	µm	Typ.
Repeatability θ_X, θ_Y	±2	±3	µrad	Typ.
Repeatability θ_Z	±3	±2.5	µrad	Typ.
Max. velocity X, Y, Z	0.5	12.5	mm/s
Max. velocity θ_X, θ_Y, θ_Z	5.5	135	mrad/s
Typ. Velocity X, Y, Z	0.2	5	mm/s
Typ. Velocity θ_X, θ_Y, θ_Z	2.3	28	mrad/s

Mechanical properties	H-824.G2V	H-824.D2V	Unit	Tolerance
Stiffness X, Y	1.7	1.7	N/µm
Stiffness Z	7	7	N/µm
Load capacity, horizontal base plate	5	2.5	kg	Max.
Load capacity, base plate in any orientation	2.5	1.25	kg	Max.
Holding force, power off, horizontal base plate	50	15	N	Max.
Holding force, power off, base plate in any orientation	25	5	N	Max.
Motor type	DC gear motor	DC motor

Miscellaneous	H-824.G2V	H-824.D2V	Unit	Tolerance
Operating temperature range	-10 to 50	-10 to 50	°C
Material	Aluminum	Aluminum
Mass	8	8	kg	±5 %
Cable length	2 (vacuum)	2 (vacuum)	m	±10 mm
Recommended controller	C-887.5x	C-887.5x

Technical data specified at 22±3 °C.

* The travel ranges of the individual coordinates (X, Y, Z, θ_X, θ_Y, θ_Z) are interdependent. The data for each axis in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.

For continuous operation in a vacuum, restrictions on operating parameters may be necessary due to heat generation.

Air side connecting cables are not included in the scope of delivery and must be ordered separately.

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Product Note

Product Change Notification Hexapod Cables

Version / Date

2021-01-15

Document language English

Download

pdf - 186 KB

Datasheet

Datasheet H-824.V

Version / Date

2020-12-10

Version / Date

2020-12-10

Document language

Download

pdf - 768 KB

Download

pdf - 755 KB

Documentation

User Manual C887T0017

C-887.5Bxx Drag-chain capable cable sets for connecting H-206 and most H-8xx hexapod standard models to C-887.5xx controller models

Version / Date

2020-04-09

Document language English

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Documentation

Short Instructions MS247EK

Hexapod Systems: H-xxx Hexapod with C-887.5xx Controller

Version / Date

2.0.0 06/2020

Version / Date

2.0.0 06/2020

Document language

Download

pdf - 2 MB

Download

pdf - 2 MB

Documentation

User Manual MS200

H-824 Compact Microrobot

Version / Date

2.3.0 2019-12-04

Version / Date

2.3.0 2019-12-04

Document language

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3-D Models

H-824.x2x 3-D model

Version / Date

2020-11-24

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Software Files

Hexapod Simulation Tool

Version / Date

2020-02-10

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Go to quote / order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

H-824.G2V

Compact hexapod microrobot, gearhead, 0.5 mm/s, 5 kg load, vacuum compatible to 10^-6 hPa, D-sub connector, cable set 2 m vacuum side, feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.

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H-824.D2V

Compact hexapod microrobot, direct drive, 12.5 mm/s, 2.5 kg load, vacuum compatible to 10^-6 hPa, D-sub connector, cable set 2 m vacuum side, feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.

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C-815.82D03

Data transmission cable for hexapods, drag-chain compatible, HD D-sub 78 m/f, 3 m

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C-815.82P03E

Power supply cable for hexapods, drag-chain compatible, M12 m/f straight, 3 m

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C-815.82D02

Data transmission cable for hexapods, drag-chain compatible, HD D-sub 78 m/f, 2 m

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C-815.82D05

Data transmission cable for hexapods, drag-chain compatible, HD D-sub 78 m/f, 5 m