Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction. suitable for vacuum environments to 10-6 hPa.
The simulation software simulates the limits of the workspace and load capacity of a hexapod. Therefore, even before making a purchase, you can check whether a particular hexapod model can handle the loads, forces, and torques occurring in an application. For this purpose, the simulation tool takes into account the position and motion of the hexapod as well as the pivot point and several reference coordinate systems.
Research and industry. For micromanipulation, biotechnology, semiconductor manufacturing
| Motion | H-824.D2V | H-824.G2V | Tolerance |
|---|---|---|---|
| Active axes | X Y Z θX θY θZ | X Y Z θX θY θZ | |
| Travel range in X | ± 22.5 mm | ± 22.5 mm | |
| Travel range in Y | ± 22.5 mm | ± 22.5 mm | |
| Travel range in Z | ± 12.5 mm | ± 12.5 mm | |
| Rotation range in θX | ± 7.5 ° | ± 7.5 ° | |
| Rotation range in θY | ± 7.5 ° | ± 7.5 ° | |
| Rotation range in θZ | ± 12.5 ° | ± 12.5 ° | |
| Maximum velocity in X, unloaded | 12.5 mm/s | 0.5 mm/s | |
| Maximum velocity in Y, unloaded | 12.5 mm/s | 0.5 mm/s | |
| Maximum velocity in Z, unloaded | 12.5 mm/s | 0.5 mm/s | |
| Maximum angular velocity in θX, unloaded | 135 mrad/s | 5.5 mrad/s | |
| Maximum angular velocity in θY, unloaded | 135 mrad/s | 5.5 mrad/s | |
| Maximum angular velocity in θZ, unloaded | 135 mrad/s | 5.5 mrad/s | |
| Typical velocity in X, unloaded | 5 mm/s | 0.2 mm/s | |
| Typical velocity in Y, unloaded | 5 mm/s | 0.2 mm/s | |
| Typical velocity in Z, unloaded | 5 mm/s | 0.2 mm/s | |
| Typical angular velocity in θX, unloaded | 28 mrad/s | 2.3 mrad/s | |
| Typical angular velocity in θY, unloaded | 28 mrad/s | 2.3 mrad/s | |
| Typical angular velocity in θZ, unloaded | 28 mrad/s | 2.3 mrad/s | |
| Positioning | H-824.D2V | H-824.G2V | Tolerance |
| Unidirectional repeatability in X | ± 0.5 µm | ± 0.4 µm | typ. |
| Unidirectional repeatability in Y | ± 0.5 µm | ± 0.4 µm | typ. |
| Unidirectional repeatability in Z | ± 0.15 µm | ± 0.1 µm | typ. |
| Unidirectional repeatability in θX | ± 3 µrad | ± 2 µrad | typ. |
| Unidirectional repeatability in θY | ± 3 µrad | ± 2 µrad | typ. |
| Unidirectional repeatability in θZ | ± 2.5 µrad | ± 3 µrad | typ. |
| Minimum incremental motion in X | 2 µm | 0.3 µm | typ. |
| Minimum incremental motion in Y | 2 µm | 0.3 µm | typ. |
| Minimum incremental motion in Z | 1 µm | 0.3 µm | typ. |
| Minimum incremental motion in θX | 12 µrad | 3.5 µrad | typ. |
| Minimum incremental motion in θY | 12 µrad | 3.5 µrad | typ. |
| Minimum incremental motion in θZ | 14 µrad | 3.5 µrad | typ. |
| Backlash in X | 3 µm | 5 µm | typ. |
| Backlash in Y | 3 µm | 5 µm | typ. |
| Backlash in Z | 1.5 µm | 1.5 µm | typ. |
| Backlash in θX | 20 µrad | 30 µrad | typ. |
| Backlash in θY | 20 µrad | 30 µrad | typ. |
| Backlash in θZ | 60 µrad | 45 µrad | typ. |
| Drive Properties | H-824.D2V | H-824.G2V | Tolerance |
| Drive type | DC motor | DC gear motor | |
| Nominal voltage | 24 V | 24 V | |
| Mechanical Properties | H-824.D2V | H-824.G2V | Tolerance |
| Stiffness in X | 1.7 N/µm | 1.7 N/µm | |
| Stiffness in Y | 1.7 N/µm | 1.7 N/µm | |
| Stiffness in Z | 7 N/µm | 7 N/µm | |
| Maximum holding force, base plate in any orientation | 5 N | 25 N | |
| Maximum holding force, base plate horizontal | 15 N | 50 N | |
| Maximum load capacity, base plate in any orientation | 1.25 kg | 2.5 kg | |
| Maximum load capacity, base plate horizontal | 2.5 kg | 5 kg | |
| Overall mass | 8 kg | 8 kg | |
| Material | Aluminum | Aluminum | |
| Miscellaneous | H-824.D2V | H-824.G2V | Tolerance |
| Connector for supply voltage | LEMO | LEMO | |
| Vacuum class | 10E-6 hPa | 10E-6 hPa | |
| Recommended controllers / drivers | C-887.5x | C-887.5x | |
| Cable length | 2 m | 2 m | |
| Operating temperature range | -10 to 50 °C | -10 to 50 °C | |
| Maximum bake out temperature | 80 °C | 80 °C | |
| Connector for data transmission | HD D-sub 78-pin (m) | HD D-sub 78-pin (m) |
Technical data specified at 22±3 °C.
The maximum travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The listed data specifies the maximum travel range
of an individual axis when all other axes and the pivot point are located at the reference position.
For continuous operation in a vacuum, restrictions on operating parameters may be necessary due to heat generation.
Air side connecting cables are not included in the scope of delivery and must be ordered separately.
Ask about customized versions.
H-824 Compact Microrobot
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
Compact hexapod microrobot, direct drive, 12.5 mm/s, 2.5 kg load, vacuum compatible to 10-6 hPa, D-sub connector, cable set 2 m vacuum side, feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.
Compact hexapod microrobot, gearhead, 0.5 mm/s, 5 kg load, vacuum compatible to 10-6 hPa, D-sub connector, cable set 2 m vacuum side, feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.
Quickly receive an answer to your question by email or phone from a local PI sales engineer.
PI offers high-precision drives for use as EtherCAT slave, or integrates with ACS Motion Controllers as Master, or 2nd Master in an existing architecture.
Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
Hexapod platforms are used for precision positioning and alignment of loads in all six degrees of freedom, three linear axes, and three rotational axes.
At Diamond Light Source, UK, beamline I07 is a high-resolution X-ray diffraction beamline dedicated to investigate the structure of surfaces and interfaces.
Sample Manipulators in High-Vacuum
At DESY in Hamburg, the P05 Imaging Beamline is operated by the HZG.
