P-587 6-Axis Precision Piezo Stage

Long Scanning Range, Direct Position Measurement

For scanning and positioning in X, Y, Z, θX, θY, θZ
800 µm × 800 µm × 200 µm linear range
Up to 1 mrad rotational angle
Parallel kinematics for faster response times and higher multi-axis accuracy
Direct metrology with capacitive sensors for highest linearity
Outstanding lifetime due to PICMA® piezo actuators
Zero-play, high-precision flexure guide system
Active compensation in all 6 degrees of freedom

Fields of application

  • Interferometry
  • Metrology
  • Nanoimprinting
  • Semiconductor tests
  • Semiconductor manufacturing

 

Specifications

pdf
pdf

Datasheet P-587

2018-02-19
2018-02-19
pdf - 780 KB
pdf - 784 KB

Drawings / Images

Downloads

Datasheet

pdf
pdf

Datasheet P-587

2018-02-19
2018-02-19
pdf - 780 KB
pdf - 784 KB

Documentation

pdf
pdf

User Manual PZ251

P-587.6CD 6-Axis Nanopositioning System with Capacitive Sensors
2014-03-27
2014-03-27
pdf - 720 KB
pdf - 740 KB