L-611 Precision Rotation Stage

Active axes

θ_Z

Rotation range

>360

°

Wobble

±15

µrad

Flatness

±1

µm

Eccentricity

±2.5

µm

Angular velocity

L-611.xxSD: 50

L-611.xxAD: 200

L-611.99xxxx: 200

°/s

max.

Integrated sensor

Incremental angle measuring system

Incremental angle measuring system

Rotary encoder

–

Sensor signal

Sin/cos, 1 V peak-peak,

A/B quadrature, TTL

A/B quadrature, TTL

–

Sensor resolution rotary encoder

–

–

20000

–

Cts./rev.

Sensor resolution angle measuring system

9000

9000

–

–

Lines/revolution

Design resolution

0.174

3.49

3.49

349

µrad

Minimum incremental motion

L-611.9ASD: 0.87

L-611.993261: 3.5

17.45

35

8.72

µrad

typ.

Unidirectional repeatability

L-611.9ASD: 0.87

L-611.993261: 3.5

17.45

35

20

µrad

typ.

Bidirectional repeatability

±3.5

±17.45

±175

±175

µrad

typ.

Reference point switch

Hall effect

Hall effect

Hall effect

Hall effect

Reference point switch repeatability

<2

<2

<2

<2

µm

typ.

Bearing

Ball bearings

Worm gear ratio

90:1

Load capacity / axial force

100

N

max.

Permissible lateral force

50

N

max.

Permissible torque M_x in θ_X, θ_Y

40

N·m

max.

Permissible torque M_z in θ_z

3

N·m

max.

Moment of inertia

770

kg·mm²

±20 %

Motor type

2-phase stepper motor

DC motor with PWM control

DC motor

BLDC motor

Operating voltage, nominal

24

24

24

24

V

nom.

Operating voltage, max.

48

24

48

48

V

max.

Motor resolution

200

–

–

–

Full steps/rev.

Operating temperature range

5 to 40

5 to 40

5 to 40

5 to 40

°C

Material

Aluminum, black anodized, stainless steel, red bronze

Aluminum, black anodized, stainless steel, red bronze

Aluminum, black anodized, stainless steel, red bronze

Aluminum, black anodized, stainless steel, red bronze

Mass

2.6

2.6

2.6

2.6

kg

±5 %

Moved mass

1.1

1.1

1.1

1.1

kg

±5 %

Connection

HD Sub-D 26 (m)

L-611.9ASD additional Sub-D 9 (m) (sensor)

Sub-D 15 (m)

HD Sub-D 26 (m)

L-611.993261 additional Sub-D 9 (m) (sensor)

HD Sub-D 26 (m)

Recommended controllers/drivers

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

ACS modular controller

C-891 (single axis)

C-885 with C-891.10C885 (up to 20 axes)

ACS modular controller