A-62x PIglide RM Rotation Stage with Air Bearings

Friction-Free, Ideal for Indexing, Positioning, Scanning, Measuring Technology

Cleanroom compatible
Motion platform diameter from 50 mm to 300 mm
Load capacity to 4170 N
Eccentricity and flatness < 200 nm
Can be mounted vertically or horizontally

Product Overview

The PIglide RM series of motorized rotation stages are designed for accuracy, precision, high stiffness, and ease of use, and can be mounted in any orientation.

Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning.

The RM stages offer superior travel accuracy, flatness, and wobble performance. Because they are friction free and require no maintenance or lubrication, they are ideal for use in cleanrooms.

3-phase torque motor

  • Brushless
  • Slotless
  • Low cogging torque

Absolute encoder (optional)

Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

Accessories and options

  • Encoder
  • Optional tip/tilt platform
  • Custom mounting flanges
  • Vacuum feedthrough
  • Slip rings
  • PIglide filter and air preparation kit
  • Single or multi-axis motion controllers and servo drives
  • Base plates made of granite and systems for reducing vibration

Application fields

Optical alignment, metrology, inspection systems, calibration, scanning.

Specifications

pdf
pdf
pdf

Datasheet A-62x

2017-12-20
2017-12-20
2017-10-23
pdf - 970 KB
pdf - 976 KB
pdf - 1,015 KB

Images /Drawings

A-672.075xx Drawing
A-624.050xx Drawing
A-623.XXX Drawing
A-621.025xx Drawing

50 mm motion platform diameter

A-621.025A1
PIglide RM rotation stage, air bearing, 50 mm motion platform diameter, 25 mm bearing journal length, angle measuring system with sin/cos signal transmission, 8192 lines/revolution, brushless 3-phasetorque motor
Add to cart Add to cart
In cart Remove from cart
A-621.025B1
PIglide RM rotation stage, air bearing, 50 mm motion platform diameter, 25 mm bearing journal length, absolute-measuring angle measuring system, 0.0015 µrad sensor resolution, Brushless 3-Phase torque motor
Add to cart Add to cart
In cart Remove from cart
A-621.025C1
PIglide RM rotation stage, air bearing, 50 mm motion platform diameter, 25 mm bearing journal length, angle measuring system with A/B quadrature signal transmission, 1.94 µrad sensor resolution, brushless 3-phase torque motor
Add to cart Add to cart
In cart Remove from cart

100 mm motion platform diameter

A-623.025A1
PIglide RM rotation stage, air bearing, 100 mm motion platform diameter, 25 mm bearing journal length, angle measuring system with sin/cos signal transmission, 15744 lines/revolution, brushless 3-phase torque motor
Add to cart Add to cart
In cart Remove from cart
A-623.025B1
PIglide RM rotation stage, air bearing, 100 mm motion platform diameter, 25 mm bearing journal length, absolute-measuring angle measuring system, 0.0015 µrad sensor resolution, Brushless 3-Phase torque motor
Add to cart Add to cart
In cart Remove from cart
A-623.025C1
PIglide RM rotation stage, air bearing, 100 mm motion platform diameter, 25 mm bearing journal length, angle measuring system with A/B quadrature signal transmission, 1.02 µrad sensor resolution, brushless 3-phase torque motor
Add to cart Add to cart
In cart Remove from cart
A-623.050A1
PIglide RM rotation stage, air bearing, 100 mm motion platform diameter, 50 mm bearing journal length, angle measuring system with sin/cos signal transmission, 15744 lines/revolution, brushless 3-phase torque motor
Add to cart Add to cart
In cart Remove from cart
A-623.050B1
PIglide RM rotation stage, air bearing, 100 mm motion platform diameter, 50 mm bearing journal length, absolute-measuring angle measuring system, 0.0015 µrad sensor resolution, Brushless 3-Phase torque motor
Add to cart Add to cart
In cart Remove from cart
A-623.050C1
PIglide RM rotation stage, air bearing, 100 mm motion platform diameter, 50 mm bearing journal length, angle measuring system with A/B quadrature signal transmission, 1.02 µrad sensor resolution, brushless 3-phase torque motor
Add to cart Add to cart
In cart Remove from cart

150 mm motion platform diameter

A-624.050A1
PIglide RM rotation stage, air bearing, 150 mm motion platform diameter, 50 mm bearing journal length, angle measuring system with sin/cos signal transmission, 23600 lines/revolution, brushless 3-phase torque motor
Add to cart Add to cart
In cart Remove from cart
A-624.050B1
PIglide RM rotation stage, air bearing, 150 mm motion platform diameter, 50 mm bearing journal length, absolute-measuring angle measuring system, 0.0015 µrad sensor resolution, Brushless 3-Phase torque motor
Add to cart Add to cart
In cart Remove from cart
A-624.050C1
PIglide RM rotation stage, air bearing, 150 mm motion platform diameter, 50 mm bearing journal length, angle measuring system with A/B quadrature signal transmission, 0.68 µrad sensor resolution, brushless 3-phase torque motor
Add to cart Add to cart
In cart Remove from cart

300 mm motion platform diameter

A-627.075A1
PIglide RM rotation stage, air bearing, 300 mm motion platform diameter, 75 mm bearing journal length, angle measuring system with sin/cos signal transmission, 47200 lines/revolution, brushless 3-phase torque motor
Add to cart Add to cart
In cart Remove from cart
A-627.075B1
PIglide RM rotation stage, air bearing, 300 mm motion platform diameter, 75 mm bearing journal length, absolute-measuring angle measuring system, 0.0015 µrad sensor resolution, Brushless 3-Phase torque motor
Add to cart Add to cart
In cart Remove from cart
A-627.075C1
PIglide RM rotation stage, air bearing, 300 mm motion platform diameter, 75 mm bearing journal length, angle measuring system with A/B quadrature signal transmission, 0.33 µrad sensor resolution, brushless 3-phase torque motor
Add to cart Add to cart
In cart Remove from cart

Downloads

Datasheet

pdf
pdf
pdf

Datasheet A-62x

2017-12-20
2017-12-20
2017-10-23
pdf - 970 KB
pdf - 976 KB
pdf - 1,015 KB

Documentation

pdf

User Manual A-62x

User Manual A-62x
2017-05-20
English
pdf - 1 MB

3-D Models

zip

A-62x STEP

2017-03-13
zip - 5 MB

Others

pdf

Whitepaper: Air Bearings: When to Use and When to Avoid in Your Motion Application

All Positioning Stages are not Created Equal. Author: Matt Reck, PI
WP4003 2015-09
English
pdf - 3 MB