N-310 NEXACT® OEM Miniature Linear Motor / Actuator

Compact, Fast, with Long Travel Range, PiezoWalk® Principle

N-310 NEXACT® OEM Miniature Linear Motor / Actuator
Product Description Specifications Downloads Quote / Order
  • Travel range 10 to 125 mm, variable runner lengths
  • Compact design, inexpensive design
  • Resolution to 0.03 nm
  • Force generation to 10 N

Fields of application

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI are principally vacuum-compatible and suitable for operation in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

Specifications

Datasheet N-310

Version / Date
2018-04-17
Version / Date
2018-04-17
Version / Date
2017-11-16
Document language
pdf - 666 KB
pdf - 678 KB
pdf - 748 KB

Downloads

Datasheet

Datasheet N-310

Version / Date
2018-04-17
Version / Date
2018-04-17
Version / Date
2017-11-16
Document language
pdf - 666 KB
pdf - 678 KB
pdf - 748 KB

Documentation

User Manual N310T0012

N-310 NEXACT® OEM Miniature Linear Drive
Version / Date
2017-04-28
Document language English
pdf - 325 KB

3-D Models

N-310 3-D model

Quote / Order

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