P-363 PicoCube XY(Z) Piezo Scanner

High Dynamics Nanopositioning System for Scanning Probe Microscopy

P-363 PicoCube XY(Z) Piezo Scanner
Product Description Specifications Downloads Quote / Order
  • Ultra-high-performance closed-loop scanner for AFM / SPM
  • Compact manipulation tool for bio- / nanotechnology
  • Resonant frequency 9.8 kHz
  • Capacitive sensors for highest accuracy
  • Parallel measuring technology for automated compensation of guiding errors
  • Resolution 50 picometers
  • Travel range 5 µm × 5 µm × 5 µm
  • Vacuum-compatible versions

Fields of application

  • Scanning probe microscopy
  • Atomic force microscopy
  • Scanning and screening

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk of motion to another axis can be actively compensated in real time (depending on the bandwidth) (active guiding). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

Specifications

Datasheet P-363

Version / Date
2018-05-08
Version / Date
2018-05-08
Document language
pdf - 840 KB
pdf - 850 KB

Downloads

Datasheet

Datasheet P-363

Version / Date
2018-05-08
Version / Date
2018-05-08
Document language
pdf - 840 KB
pdf - 850 KB

3-D Models

P-363 STEP

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.