- Position control for piezo positioning systems with SGS, and capacitive sensors
- Improves Linearity error
- Eliminates drift and hysteresis
- Notch filter for higher bandwidth
- Increases piezo stiffness
- Excellent linearity thanks to integrated linearization function (ILS)
Position control module with sensor evaluation electronics
The E-509 is a position control module with sensor evaluation electronics for nanopositioning systems with integrated position sensors. It automatically eliminates drift or hysteresis occurring during voltage-controlled piezo operation, and compensates changes in the position of the piezo actuator position when the piezo voltage is adjusted immediately after a change of load.
Nanometer-precision piezo positioning
Proportional-integral position control of the E-509 servo controller module is optimized for piezo operation. The proportional and integral term as well as the control bandwidth can be adjusted individually. The integrated notch filters (can be set for each axis) improve the stability and allow wider -bandwidth operation closer to the mechanical resonant frequency of the piezo system. Depending on the piezo mechanics and the sensor type, positioning accuracy and repeatability is therefore possible in the nanometer range.
The E-509.E03 model for signal evaluation and E-509.E3 model as servo controller module are available for the high-resolution capacitive single-plate sensors in the PISeca series.
User Manual PZ62
E-500 / E-501 Series Modular Piezo Controller: Chassis with power supply, amplifier modules (E-503, E-504, E-505, E-506, E-508), sensor and servo-control module (E-509), display and interface modules (E-515, E-517).
User Manual PZ77
E-509 Sensor / Piezo Servo-Control Module
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