PiezoMike linear actuator, 7 mm, M10×1 thread, vacuum compatible to 10-6 hPa
N-470.V PiezoMike Linear Actuator
Minimum Dimensions, High Forces, Stable Positioning, Vacuum to 10-6 hPa
- Holding force 100 N
- Step size 20 nm
- Travel range 7 mm to 13 mm
- Compact design
- Feed force 22 N
- Lifetime >50,000,000 steps
Linear actuator with piezo motors
Linear screw-type actuator with piezo inertia drive for high-resolution and stable positioning. Open-loop operation in full-step mode.
Piezo motors
Compact, inexpensive inertia drive principle (stick-slip). The drive is self-locking at rest, requires no current, and does not generate any heat. It holds the position with maximum force.
Alignment of mechanical and optomechanical components
Stable adjustment in optical paths. Long-term positioning: High stability at target position, reliable startup even after longer downtimes. High holding force and resolution by combining piezo actuators with mechanical thread translation. Vacuum-compatible to 10-6 hPa.
Specifications
This content is only available on tablets or desktop devices.Specifications
Motion | N-470.11V | N-470.11VY | N-470.12V | N-470.12VY | N-470.21V | N-470.21VY | N-470.22V | N-470.22VY | Tolerance |
---|---|---|---|---|---|---|---|---|---|
Active axes | X | X | X | X | X | X | X | X | |
Travel range in X | 7 mm | 7 mm | 7 mm | 7 mm | 13 mm | 13 mm | 13 mm | 13 mm | |
Maximum velocity in X, unloaded | 2.4 mm/min | 2.4 mm/min | 2.4 mm/min | 2.4 mm/min | 2.4 mm/min | 2.4 mm/min | 2.4 mm/min | 2.4 mm/min | |
Typical velocity in X, unloaded | 0.5 mm/min | 0.5 mm/min | 0.5 mm/min | 0.5 mm/min | 0.5 mm/min | 0.5 mm/min | 0.5 mm/min | 0.5 mm/min | |
Typical step frequency | 400 Hz | 400 Hz | 400 Hz | 400 Hz | 400 Hz | 400 Hz | 400 Hz | 400 Hz | |
Maximum step frequency | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | |
Step size in full step mode | 0.05 µm | 0.05 µm | 0.05 µm | 0.05 µm | 0.05 µm | 0.05 µm | 0.05 µm | 0.05 µm | |
Operating frequency in full step mode | 2 kHz | 2 kHz | 2 kHz | 2 kHz | 2 kHz | 2 kHz | 2 kHz | 2 kHz | |
Incremental motion in partial-step mode | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | |
Positioning | N-470.11V | N-470.11VY | N-470.12V | N-470.12VY | N-470.21V | N-470.21VY | N-470.22V | N-470.22VY | Tolerance |
Drive Properties | N-470.11V | N-470.11VY | N-470.12V | N-470.12VY | N-470.21V | N-470.21VY | N-470.22V | N-470.22VY | Tolerance |
Drive type | Piezoelectric inertia drive | Piezoelectric inertia drive | Piezoelectric inertia drive | Piezoelectric inertia drive | Piezoelectric inertia drive | Piezoelectric inertia drive | Piezoelectric inertia drive | Piezoelectric inertia drive | |
Operating voltage | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | |
Nominal voltage | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | |
Drive force in positive direction of motion in X | 22 N | 22 N | 22 N | 22 N | 22 N | 22 N | 22 N | 22 N | max. |
Step size in full step mode | 0.05 µm | 0.05 µm | 0.05 µm | 0.05 µm | 0.05 µm | 0.05 µm | 0.05 µm | 0.05 µm | |
Operating frequency in full step mode | 2 kHz | 2 kHz | 2 kHz | 2 kHz | 2 kHz | 2 kHz | 2 kHz | 2 kHz | |
Incremental motion in partial-step mode | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | |
Maximale Betriebsfrequenz im Dauerbetrieb | 200 Hz | 200 Hz | 200 Hz | 200 Hz | 200 Hz | 200 Hz | 200 Hz | 200 Hz | |
Operating frequency | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | |
Mechanical Properties | N-470.11V | N-470.11VY | N-470.12V | N-470.12VY | N-470.21V | N-470.21VY | N-470.22V | N-470.22VY | Tolerance |
Stiffness in X | 15 N/µm | 15 N/µm | 15 N/µm | 15 N/µm | 15 N/µm | 15 N/µm | 15 N/µm | 15 N/µm | ±10 % |
Holding force in X, passive | > 100 N | > 100 N | > 100 N | > 100 N | > 100 N | > 100 N | > 100 N | > 100 N | min. |
Mechanical interface | M10×1 mounting thread | M10×1 mounting thread | 9.5 mm clamping shank | 9.5 mm clamping shank | M10×1 mounting thread | M10×1 mounting thread | 9.5 mm clamping shank | 9.5 mm clamping shank | |
Permissible push force in Y | 1 N | 1 N | 1 N | 1 N | 1 N | 1 N | 1 N | 1 N | max. |
Overall mass | 80 g | 80 g | 80 g | 80 g | 85 g | 85 g | 85 g | 85 g | |
Material | Screw: Stainless steel. Housing: Stainless steel. | Screw: Stainless steel. Housing: Stainless steel. | Screw: Stainless steel. Housing: Stainless steel. | Screw: Stainless steel. Housing: Stainless steel. | Screw: Stainless steel. Housing: Stainless steel. | Screw: Stainless steel. Housing: Stainless steel. | Screw: Stainless steel. Housing: Stainless steel. | Screw: Stainless steel. Housing: Stainless steel. | |
N-470.11V | N-470.11VY | N-470.12V | N-470.12VY | N-470.21V | N-470.21VY | N-470.22V | N-470.22VY | Tolerance | |
Connector | Bare stranded wires | Bare stranded wires | Bare stranded wires | Bare stranded wires | Bare stranded wires | Bare stranded wires | Bare stranded wires | Bare stranded wires | |
Vacuum class | 10E-6 hPa | 10E-6 hPa | 10E-6 hPa | 10E-6 hPa | 10E-6 hPa | 10E-6 hPa | 10E-6 hPa | 10E-6 hPa | |
Recommended controllers / drivers | E-872.401 | E-872.401 | E-872.401 | E-872.401 | E-872.401 | E-872.401 | E-872.401 | E-872.401 | |
Cable length | 1 m | 1 m | 1 m | 1 m | 1 m | 1 m | 1 m | 1 m | |
Operating temperature range | 10 to 40 °C | 10 to 40 °C | 10 to 40 °C | 10 to 40 °C | 10 to 40 °C | 10 to 40 °C | 10 to 40 °C | 10 to 40 °C |
Max. velocity and max. step frequency not suitable for continuous operation (refer to the user manual).
Cable length / connector: 1 m in the vacuum, stranded wires; 2 m outside the vacuum, stranded wires to LEMO 3-pole.
Ask about customized versions.
Downloads
Product Note
Product Change Notification N-47x.xxx
Documentation
User Manual MP125
N-470 PiezoMike Linear Actuator
3-D Models
3-D model N-470.12VY
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