P-750 Piezo Nanopositioning System

High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology

P-750 Piezo Nanopositioning System
Product Description Specifications Downloads Quote / Order
  • 1 nm lateral guiding accuracy
  • Frictionless, high-precision flexure guiding system
  • Load capacity to 10 kg
  • Resolution <1 nm
  • Direct metrology with capacitive sensors for highest precision
  • Direct drive for Fast response
  • Travel range 75 µm
  • Outstanding lifetime due to PICMA® piezo actuators

Specifications

Datasheet P-750

Version / Date
2015-01-28
Version / Date
2015-01-28
Document language
pdf - 731 KB
pdf - 726 KB

Downloads

Datasheet

Datasheet P-750

Version / Date
2015-01-28
Version / Date
2015-01-28
Document language
pdf - 731 KB
pdf - 726 KB

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