Q-521 Q‑Motion® Miniature Linear Stage

Smallest Linear Stage with Position Control, High Resolution and Affordable Price

Only 21 mm in width and 10 mm in height
Direct position measurement with integrated incremental encoder
Encoder resolution up to 1 nm
Minimum incremental motion up to 2 nm
Multi-axis system setups with adapter plate or bracket (available as an option)

Q-521.1xx, Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Q-521.2xx, Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Q-521.3xx, Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 6 mm/s.

The linear stages are equipped with a noncontact measuring optical linear encoder and a reference switch. Resolution 4 nm or 1 nm, depending on the version.

Microassembly. Photonics. Optical alignment. Microscopy. Beamline instrumentation. Semiconductor technology. Testing.

Download datasheet specifications

Datasheet

Version / Date

2020-06-24

pdf - 508 KB

Version / Date

2020-06-24

pdf - 507 KB

Version / Date

2021-01-14

pdf - 621 KB

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Motion and positioning	Q-521.130 / Q-521.140	Q-521.230 / Q-521.240	Q-521.330 / Q-521.340	Unit
Active axis	X	X	X
Travel range	12	22	32	mm
Maximum velocity, closed loop*	6	6	6	mm/s
Minimum incremental motion	Q-521.130: 8 Q-521.140: 2	Q-521.230: 8 Q-521.240: 2	Q-521.330: 8 Q-521.340: 2	nm
Pitch	300	300	300	µrad
Yaw	100	300	400	µrad
Linearity	3.5	3.5	3.5	µm
Integrated sensor	Linear encoder	Linear encoder	Linear encoder
Sensor resolution	Q-521.130: 4 Q-521.140: 1	Q-521.230: 4 Q-521.240: 1	Q-521.330: 4 Q-521.340: 1	nm
Reference switch	Optical	Optical	Optical
Bidirectional repeatability	Q-521.130: 150 Q-521.140: 80	Q-521.230: 150 Q-521.240: 80	Q-521.330: 150 Q-521.340: 80	nm

Mechanical properties	Q-521	Unit
Max. load capacity, horizontal	0.3	kg
Max. load capacity, any	0.06	kg
Guide type	Crossed roller bearings

Drive properties	Q-521	Unit
Drive force	0.6	N
Holding force	1.3	N
Motor type	Piezoelectric inertia drive

Miscellaneous	Q-521.1xx	Q-521.2xx	Q-521.3xx	Unit
Operating temperature	0 to 40	0 to 40	0 to 40	°C
Cable length	1	1	1	m
Motor / sensor connector	D-sub 15 (m)	D-sub 15 (m)	D-sub 15 (m)
Mass without cable and connector	24	34	48	g
Mass incl. cable and connector	110	126	135	g
Material	Stainless steel	Stainless steel	Stainless steel
Dimensions	30 mm × 21 mm × 10 mm	31.6 mm × 21 mm × 10 mm	42.2 mm × 21 mm × 10 mm
Recommended electronics	E-873.1AT, E-873.10C885	E-873.1AT, E-873.10C885	E-873.1AT, E-873.10C885

* Typical velocity at a control frequency of 20 kHz

Specifications tested with E-873.1AT

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Product Note

Version / Date

2019-03-26

pdf - 435 KB

English

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Datasheet

Version / Date

2020-06-24

pdf - 508 KB

Version / Date

2020-06-24

pdf - 507 KB

Version / Date

2021-01-14

pdf - 621 KB

Download

Documentation

Q-Motion® Positioners: Q-5xx, Q-6xx

Version / Date

4.2.0 12/2019

pdf - 1 MB

Version / Date

4.2.0 12/2019

pdf - 1 MB

Download

Documentation

Q-521 Q-Motion Miniature Linear Positioning Stage, Piezoelectric Inertia Drive

Version / Date

1.1.2 2020-07-29

pdf - 2 MB

Version / Date

1.1.2 2020-07-29

pdf - 2 MB

3-D Models

zip - 2 MB

quote / order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Q-521.130

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel range, linear encoder, 4 nm resolution, 0.6 N push/pull force, dimensions 21 × 30 × 10 mm (W × L × H)

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Q-521.140

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel range, linear encoder, 1 nm resolution, 0.6 N push/pull force, dimensions 21 × 30 × 10 mm (W × L × H)

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Q-521.230

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel range, linear encoder, 4 nm resolution, 0.6 N push/pull force, dimensions 21 × 32 × 10 mm (W × L × H)

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Q-521.240

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel range, linear encoder, 1 nm resolution, 0.6 N push/pull force, dimensions 21 × 32 × 10 mm (W × L × H)

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Q-521.330

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel range, linear encoder, 4 nm resolution, 0.6 N push/pull force, dimensions 21 × 42 × 10 mm (W × L × H)

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Q-521.340

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel range, linear encoder, 1 nm resolution, 0.6 N push/pull force, dimensions 21 × 42 × 10 mm (W × L × H)

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