Q-521 Q‑Motion® Miniature Linear Stage
Smallest Linear Stage with Position Control, High Resolution and Affordable Price
- Only 21 mm in width and 10 mm in height
- Direct position measurement with integrated incremental encoder
- Encoder resolution up to 1 nm
- Minimum incremental motion up to 2 nm
- Multi-axis system setups with adapter plate or bracket (available as an option)
Piezoelectric inertia drive
Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 6 mm/s.
Direct-measuring principle
The linear stages are equipped with a noncontact measuring optical linear encoder and a reference switch. Resolution 4 nm or 1 nm, depending on the version.
Application fields
Microassembly. Photonics. Optical alignment. Microscopy. Beamline instrumentation. Semiconductor technology. Testing.
Specifications
Specifications
Motion and positioning | Q-521.130 / Q-521.140 | Q-521.230 / Q-521.240 | Q-521.330 / Q-521.340 | Unit |
---|---|---|---|---|
Active axis | X | X | X | |
Travel range | 12 | 22 | 32 | mm |
Maximum velocity, closed loop* | 6 | 6 | 6 | mm/s |
Minimum incremental motion | Q-521.130: 8 Q-521.140: 2 | Q-521.230: 8 Q-521.240: 2 | Q-521.330: 8 Q-521.340: 2 | nm |
Pitch | 300 | 300 | 300 | µrad |
Yaw | 100 | 300 | 400 | µrad |
Linearity | 3.5 | 3.5 | 3.5 | µm |
Integrated sensor | Linear encoder | Linear encoder | Linear encoder | |
Sensor resolution | Q-521.130: 4 Q-521.140: 1 | Q-521.230: 4 Q-521.240: 1 | Q-521.330: 4 Q-521.340: 1 | nm |
Reference switch | Optical | Optical | Optical | |
Bidirectional repeatability | Q-521.130: 150 Q-521.140: 80 | Q-521.230: 150 Q-521.240: 80 | Q-521.330: 150 Q-521.340: 80 | nm |
Miscellaneous | Q-521.1xx | Q-521.2xx | Q-521.3xx | Unit |
---|---|---|---|---|
Operating temperature | 0 to 40 | 0 to 40 | 0 to 40 | °C |
Cable length | 1 | 1 | 1 | m |
Motor / sensor connector | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | |
Mass without cable and connector | 24 | 34 | 48 | g |
Mass incl. cable and connector | 110 | 126 | 135 | g |
Material | Stainless steel | Stainless steel | Stainless steel | |
Dimensions | 30 mm × 21 mm × 10 mm | 31.6 mm × 21 mm × 10 mm | 42.2 mm × 21 mm × 10 mm | |
Recommended electronics | E-873.1AT, E-873.10C885 | E-873.1AT, E-873.10C885 | E-873.1AT, E-873.10C885 |
Downloads
Product Note
Product Change Notification Q-xxx; N-765
Datasheet
Documentation
User Manual MP145
Q-521 Q-Motion Miniature Linear Positioning Stage, Piezoelectric Inertia Drive
3-D Models
Q-521 3-D model
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