UPL-120 Precision Vertical Linear Stage for High Loads

Excellent Accuracy for High Loads

UPL-120 Precision Z Stage

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UPL-120, stepper motor, dimensions in mm

Direction of the axes and torques for Z stages

Travel range 13 mm (1/2")
Unidirectional repeatability to 0.05 µm
Load capacity to 20 kg
Integrated optical limit switches
Available with direct-measuring encoder

Extremely accurate and reliable positioning. Crossed roller guides for smooth feed at high loads. Stress-relieved aluminum base for highest stability. Drive variants with DC motor and 2-phase stepper motor. Noncontact limit switches.

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Industry and research, e.g., semiconductor inspection, fiber alignment.

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Datasheet

Datasheet UPL-120

Version / Date

2020-09-22

Version / Date

2020-09-22

Version / Date

2021-01-19

Document language

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pdf - 3 MB

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pdf - 3 MB

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pdf - 648 KB

	6635911030 / 6635911130	6635921030 / 6635921130-0001	Unit	Tolerance
Active axes	Z	Z
Travel range	13	13	mm
Pitch	±100	±100	µrad	typ.
Yaw	±100	±100	µrad	typ.
Straightness	±3.0	±3.0	µm	typ.
Flatness	±3.0	±3.0	µm	typ.
Velocity	6	3	mm/s	max.

Motion and positioning	6635911030	6635911130	6635921030	6635921130-0001	Unit	Tolerance
Integrated sensor	Rotary encoder	Linear encoder Rotary encoder	–	Linear encoder
Sensor signal rotary encoder	A/B quadrature, RS-422	A/B quadrature, RS-422	–	–
Sensor signal linear encoder	–	A/B quadrature, RS-422	–	Sin/cos, 1 V peak-peak, 20 µm signal period
Design resolution	0.013	0.05	1.34	0.005	µm
Sensor resolution rotary encoder	20000	20000	–	–	Cts./rev.
Sensor resolution linear encoder	–	0.05	–	–	µm
Minimum incremental motion	0.1	0.1	0.1	0.05	µm	typ.
Unidirectional repeatability	0.25	0.25	0.2	0.15	µm	typ.
Bidirectional repeatability	±2	±1	±1.5	±0.5	µm	typ.
Reference switch repeatability	<1	<1	<1	<1	µm	typ.

Mechanical properties	6635911030 / 6635911130	6635921030 / 6635921130-0001	Unit	Tolerance
Guide type	Crossed roller guide with anti-creep system	Crossed roller guide with anti-creep system
Drive screw type	Ball screw	Ball screw
Drive screw pitch	1	1	mm
Gear ratio	2911:780	2911:780
Push/pull force, power on	200	200	N	max.
Holding force, power off	40	80	N	typ.
Load capacity	200	200	N	max.
Permissible lateral force F_y in Y	150	150	N	max.
Permissible torque M_xin θ_x	130	130	N·m	max.
Permissible torque M_yin θ_y	38	38	N·m	max.
Permissible torque M_z in θ_Z	150	150	N·m	max.

Drive properties	6635911030 / 6635911130	6635921030 / 6635921130-0001	Unit	Tolerance
Motor type	DC motor	2-phase stepper motor
Step resolution	–	200	Full steps/rev.
Operating voltage, nominal	24	24	V	nom.
Operating voltage, max.	48	48	V	max.
Limit switches	Optical	Optical

Miscellaneous	6635911030 / 6635911130	6635921030 / 6635921130-0001	Unit	Tolerance
Operating temperature range	5 to 40	5 to 40	°C
Mass	2.4	2.3	kg	±5 %
Moved mass	1.3	1.3	kg	±5 %
Material	Aluminum, black anodized	Aluminum, black anodized
Connector	6635911030: HD D-sub 15 (m) 6635911130: Motor: HD D-sub 15 (m), sensor: D-sub 9 (m)	6635921030: HD D-sub 15 (m) 6635921130-0001: Motor: HD D-sub 15 (m), sensor: D-sub 9 (m)
Recommended controllers/drivers	C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller	C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

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Separate connection cable required for motor and sensor connection respectively.

Product Note

Product Change Notification Motor Driven Products

Version / Date

2021-04-19

Document language English

Download

pdf - 917 KB

Datasheet

Datasheet UPL-120

Version / Date

2020-09-22

Version / Date

2020-09-22

Version / Date

2021-01-19

Document language

Download

pdf - 3 MB

Download

pdf - 3 MB

Download

pdf - 648 KB

Documentation

Short Instructions MP146EK

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date

2.0.0 01/2020

Version / Date

2.0.0 01/2020

Document language

Download

pdf - 736 KB

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pdf - 749 KB

Documentation

User Manual UPL-120

UPL-120 High-Precision Z Stage

Version / Date

00.001 2017-05-05

Version / Date

00.001 2017-05-05

Document language

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3-D Models

UPL-120 3-D model

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6635911030

UPL-120 Precision Z stage, 120 mm width, DC motor, 13 mm travel range, 15 kg load capacity, optical limit switches

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6635921030

UPL-120 Precision Z stage, 120 mm width, stepper motor, 13 mm travel range, 20 kg load capacity, optical limit switches

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6635911130

UPL-120 Precision Z stage, 120 mm width, DC motor, 13 mm travel range, 15 kg load capacity, linear encoder with A/B quadrature signal transmission, optical limit switches

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6635921130-0001

UPL-120 Precision Z stage, 120 mm width, stepper motor, 13 mm travel range, 20 kg load capacity, linear encoder with sin/cos signal transmission, optical limit switches

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