UPL-120 Precision Z Stage

Z stage with DC motor and rotary encoder

Z stage with stepper motor

Z stage with DC motor, linear and rotary encoder

Z stage with stepper motor and linear encoder

Active axes

Z

Z

Z

Z

Travel range

13

13

13

13

mm

Integrated sensor

Rotary encoder

–

Linear encoder

Rotary encoder

Linear encoder

Sensor signal rotary encoder

A/B quadrature, RS-422

–

A/B quadrature, RS-422

–

Sensor signal linear encoder

–

–

A/B quadrature, RS-422

Sin/cos, 1 V peak-peak,

20 µm signal period

Design resolution

0.013

1.34

0.05

0.005

µm

Sensor resolution rotary encoder

20000

–

20000

–

Cts./rev.

Sensor resolution linear encoder

–

–

0.05

–

µm

Minimum incremental motion

0.1

0.1

0.1

0.05

µm

typ.

Unidirectional repeatability

0.1

0.1

0.1

0.05

µm

typ.

Bidirectional repeatability

±2

±2

±0.1

±0.05

µm

typ.

Pitch

±100

±100

±100

±100

µrad

typ.

Yaw

±100

±100

±100

±100

µrad

typ.

Straightness

±3.0

±3.0

±3.0

±3.0

µm

typ.

Flatness

±3.0

±3.0

±3.0

±3.0

µm

typ.

Velocity

6

3

6

3

mm/s

max.

Reference point switch repeatability

<1

<1

<1

<1

µm

typ.

Guide type

Crossed roller guide with anti-creep system

Crossed roller guide with anti-creep system

Crossed roller guide with anti-creep system

Crossed roller guide with anti-creep system

Drive screw type

Ball screw

Ball screw

Ball screw

Ball screw

Drive screw pitch

1

1

1

1

mm

Gear ratio

2911:780

2911:780

2911:780

2911:780

Push/pull force, power on

200

200

200

200

N

max.

Holding force, power off

40

80

40

80

N

typ.

Load capacity

200

200

200

200

N

max.

Permissible lateral force F_y in Y

150

150

150

150

N

max.

Permissible torque M_xin θ_x

130

130

130

130

N·m

max.

Permissible torque M_yin θ_y

38

38

38

38

N·m

max.

Permissible torque M_z in θ_Z

150

150

150

150

N·m

max.

Motor Type

DC motor

2-phase stepper motor

DC motor

2-phase stepper motor

Step resolution

–

200

–

200

Full steps/rev.

Operating voltage, nominal

24

24

24

24

V

nom.

Operating voltage, max.

48

48

48

48

V

max.

Limit switches

Optical

Optical

Optical

Optical

Operating temperature range

5 to 40

5 to 40

5 to 40

5 to 40

°C

Mass

2.4

2.3

2.4

2.4

kg

±5 %

Moved mass

1.3

1.3

1.3

1.3

kg

±5 %

Material

Aluminum, black anodized

Aluminum, black anodized

Aluminum, black anodized

Aluminum, black anodized

Connection

HD Sub-D 15 (m)

HD Sub-D 15 (m)

Motor: HD Sub-D 15 (m)

Sensor: Sub-D 9 (m)

Motor: HD Sub-D 15 (m)

Sensor: Sub-D 9 (m)

Recommended controllers/drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller