UPL-120 Precision Z Stage
Excellent Accuracy for High Loads
- Travel range 13 mm (1/2")
- Unidirectional repeatability to 0.05 µm
- Load capacity to 20 kg
- Integrated optical limit switches
- Available with direct-measuring encoder
Reference-class Z stage
Extremely accurate and reliable positioning. Crossed roller guides for smooth feed at high loads. Stress-relieved aluminum base for highest stability. Drive variants with DC motor and 2-phase stepper motor. Noncontact limit switches.
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.
Application fields
Industry and research, e.g., semiconductor inspection, fiber alignment.
Specifications
Specifications
Motion and positioning | 6635911030 | 6635911130 | 6635921030 | 6635921130-0001 | Unit | Tolerance |
---|---|---|---|---|---|---|
Integrated sensor | Rotary encoder | Linear encoder Rotary encoder | – | Linear encoder | ||
Sensor signal rotary encoder | A/B quadrature, RS-422 | A/B quadrature, RS-422 | – | – | ||
Sensor signal linear encoder | – | A/B quadrature, RS-422 | – | Sin/cos, 1 V peak-peak, 20 µm signal period | ||
Design resolution | 0.013 | 0.05 | 1.34 | 0.005 | µm | |
Sensor resolution rotary encoder | 20000 | 20000 | – | – | Cts./rev. | |
Sensor resolution linear encoder | – | 0.05 | – | – | µm | |
Minimum incremental motion | 0.1 | 0.1 | 0.1 | 0.05 | µm | typ. |
Unidirectional repeatability | 0.25 | 0.25 | 0.2 | 0.15 | µm | typ. |
Bidirectional repeatability | ±2 | ±1 | ±1.5 | ±0.5 | µm | typ. |
Reference switch repeatability | <1 | <1 | <1 | <1 | µm | typ. |
Mechanical properties | 6635911030 / 6635911130 | 6635921030 / 6635921130-0001 | Unit | Tolerance |
---|---|---|---|---|
Guide type | Crossed roller guide with anti-creep system | Crossed roller guide with anti-creep system | ||
Drive screw type | Ball screw | Ball screw | ||
Drive screw pitch | 1 | 1 | mm | |
Gear ratio | 2911:780 | 2911:780 | ||
Push/pull force, power on | 200 | 150 | N | max. |
Holding force, power off | 40 | 80 | N | typ. |
Load capacity | 200 | 150 | N | max. |
Permissible lateral force Fy in Y | 150 | 150 | N | max. |
Permissible torque Mxin θx | 130 | 130 | N·m | max. |
Permissible torque Myin θy | 38 | 38 | N·m | max. |
Permissible torque Mz in θZ | 150 | 150 | N·m | max. |
Miscellaneous | 6635911030 / 6635911130 | 6635921030 / 6635921130-0001 | Unit | Tolerance |
---|---|---|---|---|
Operating temperature range | 5 to 40 | 5 to 40 | °C | |
Mass | 2.4 | 2.3 | kg | ±5 % |
Moved mass | 1.3 | 1.3 | kg | ±5 % |
Material | Aluminum, black anodized | Aluminum, black anodized | ||
Connector | 6635911030: HD D-sub 15 (m) 6635911130: Motor: HD D-sub 15 (m), sensor: D-sub 9 (m) | 6635921030: HD D-sub 15 (m) 6635921130-0001: Motor: HD D-sub 15 (m), sensor: D-sub 9 (m) | ||
Recommended controllers/drivers | C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller | C-663.12 (single axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller |
Downloads
Product Note
Product Change Notification Motor Driven Products
Datasheet
Documentation
User Manual UPL-120
UPL-120 High-Precision Z Stage
3-D Models
UPL-120 3-D model
Quote / Order
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