Q-622 Q-Motion® Miniature Rotation Stage

Minimum Dimensions: 22 mm Turntable Diameter

Q-622 Q-Motion® Miniature Rotation Stage
Product Description Specifications Downloads Quote / Order
  • Only 22 mm in width and 10 mm in height
  • Direct position measurement with incremental encoder with 0.55 µrad resolution
  • Up to 2.2 µrad minimum incremental motion
  • Velocity 70 °/s
  • Mountable on the Q-522 linear stage without adapter
  • Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 70 °/s

Application fields

Microassembly, Photonics, Optical alignment, Microscopy, Beamline instrumentation, Semiconductor technology, Testing

Specifications

Datasheet Q-622

Version / Date
2015-06-02
Version / Date
2015-07-10
Document language
pdf - 623 KB
pdf - 631 KB

Downloads

Datasheet

Datasheet Q-622

Version / Date
2015-06-02
Version / Date
2015-07-10
Document language
pdf - 623 KB
pdf - 631 KB

Documentation

User Manual MP128

Q-622 Q-Motion Miniature Rotation Stage with 22 mm Turntable Diameter, Piezoelectric Inertia Drive
Version / Date
1.1.0 2017-11-28
Version / Date
1.1.0 2017-11-28
Document language
pdf - 2 MB
pdf - 2 MB

Short Instructions MP139EK

Q-5xx, Q-6xx PIShift Stages
Version / Date
3.1.0 2018-06-19
pdf - 696 KB

3-D Models

Q-622 STEP

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Q-622.930
Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, incremental encoder, 0.55 µrad resolution, 5 mNm torque, 22 mm diameter, vacuum compatible to 10-6 hPa
Q-622.900
Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, without position sensor for open-loop operation, 5 mNm torque, 22 mm diameter, vacuum compatible to 10-6 hPa
Q-622.90U
Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, without position sensor for open-loop operation, 5 mNm torque, 22 mm diameter, vacuum compatible to 10-9 hPa

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