RS-40 V7 Compact Rotation Stage Suitable for Vacuum
Precision Positioning
- Suitable for vacuum up to 10-7 hPa
- Unlimited travel range
- Repeatability to 87 µrad
- 20 mm Ø aperture
- Reference switch
Standard-class rotation stage
Worm drive. Aperture with 20 mm Ø. Reference switch.
Reduced outgassing especially for use in vacuum environments
Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. Therefore, a bakeout temperature of up to 80 °C can be reached.
Higher quality for high vacuum applications
In this case, special components suitable for high vacuum are used, such as motor, measuring system, and limit switches. In addition, the surface is made of uncoated aluminum, the drive screw and guides are made of stainless steel. With this, the PI V7 vacuum class is reached, which means up to 10-7 hPa.
Drive
Stepper motor with gearhead.
Application fields
Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
Specifications
Specifications
Motion and positioning | 3216V21000 | Unit | Tolerance |
---|---|---|---|
Active axes | θZ | ||
Rotation range | >360 | ° | |
Wobble | ±35 | µrad | Typ. |
Flatness | ±5 | µm | Typ. |
Eccentricity | ±5 | µm | Typ. |
Angular velocity | 20 | °/s | Max. |
Integrated sensor | – | ||
Design resolution | 349 | µrad | |
Minimum incremental motion | 87 | µrad | Typ. |
Unidirectional repeatability | 87 | µrad | Typ. |
Bidirectional repeatability | ±700 | µrad | Typ. |
Reference switch | Hall effect, N/C contact, 3.8V to 24V, NPN |
Mechanical properties | 3216V21000 | Unit | Tolerance |
---|---|---|---|
Bearing | Ball bearings | ||
Worm gear ratio | 90:1 | ||
Load capacity / axial force | 20 | N | Max. |
Permissible lateral force | 5 | N | Max. |
Holding torque in θZ, power off | 0.2 | Nm | Typ. |
Permissible torque MX in θX | 2 | Nm | Max. |
Permissible torque MY in θY | 2 | Nm | Max. |
Permissible torque Mz in θZ | 0.2 | Nm | Max. |
Moment of inertia | 15 | kg·mm² | ±20 % |
Miscellaneous | 3216V21000 | Unit | Tolerance |
---|---|---|---|
Operating temperature range | 5 to 40 | °C | |
Material | Aluminum, stainless steel, red bronze | ||
Mass | 0.4 | kg | ±5 % |
Moved mass | 0.088 | kg | ±5 % |
Fixed cable*, on the vacuum side: Cable length | 2 | m | |
Connector | D-sub 15 (f) | ||
Recommended controllers/drivers | C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller |
Downloads
Datasheet
Documentation
User Manual RS-40
Compact Rotation Stage
3-D Models
3-D model RS-40 V7
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