P-750 Piezo Nanopositioning System

High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology

1 nm lateral guiding accuracy
Frictionless, high-precision flexure guiding system
Load capacity to 10 kg
Resolution <1 nm
Direct metrology with capacitive sensors for highest precision
Direct drive for Fast response
Travel range 75 µm
Outstanding lifetime due to PICMA® piezo actuators

P-750, dimensions in mm

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Datasheet

Version / Date

2015-01-28

pdf - 731 KB

Version / Date

2015-01-28

pdf - 726 KB

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	Closed-loop / open-loop travel	Closed-loop / open-loop resolution	Load capacity	Tilt Θ _X , Θ _Y	Resonant frequency (no load)
P-750.00	– / 75 µm	– / 0.4 nm	100 N	±10 µrad	600 Hz
P-750.20 with capacitive sensor	75 µm / 75 µm	1 nm / 0.4 nm	100 N	±10 µrad	600 Hz

* Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 3.8 mA drive current.

** Resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise equivalent motion with E -503 amplifier.

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Product Note

Version / Date

2021-04-19

pdf - 377 KB

English

Download

Datasheet

Version / Date

2015-01-28

pdf - 731 KB

Version / Date

2015-01-28

pdf - 726 KB

Download

3-D Models

zip - 122 KB

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P-750.00

High-Load Nanopositioning System, 75 µm Travel Range

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P-750.20

High-Load Nanopositioning System, 75 µm Travel Range, Capacitive Sensor, Direct Metrology

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