P-750 Piezo Nanopositioning System

High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology

P-750 Piezo Nanopositioning System

Product Description Specifications Downloads Quote / Order

1 nm lateral guiding accuracy
Frictionless, high-precision flexure guiding system
Load capacity to 10 kg
Resolution <1 nm
Direct metrology with capacitive sensors for highest precision
Direct drive for Fast response
Travel range 75 µm
Outstanding lifetime due to PICMA® piezo actuators

Download datasheet Go to specifications

Datasheet

Datasheet P-750

Version / Date

2015-01-28

Version / Date

2015-01-28

Document language

Download

pdf - 731 KB

Download

pdf - 726 KB

	Closed-loop / open-loop travel	Closed-loop / open-loop resolution	Load capacity	Tilt Θ _X , Θ _Y	Resonant frequency (no load)
P-750.00	– / 75 µm	– / 0.4 nm	100 N	±10 µrad	600 Hz
P-750.20 with capacitive sensor	75 µm / 75 µm	1 nm / 0.4 nm	100 N	±10 µrad	600 Hz

* Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 3.8 mA drive current.

** Resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise equivalent motion with E -503 amplifier.

Download datasheet Go to download

Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date

2021-04-19

Document language English

Download

pdf - 377 KB

Datasheet

Datasheet P-750

Version / Date

2015-01-28

Version / Date

2015-01-28

Document language

Download

pdf - 731 KB

Download

pdf - 726 KB

3-D Models

3-D-model P-750.20

Request download link

Go to quote / order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

P-750.00

High-Load Nanopositioning System, 75 µm Travel Range

Add to quote list Remove from quote list

P-750.20

High-Load Nanopositioning System, 75 µm Travel Range, Capacitive Sensor, Direct Metrology

Add to quote list Remove from quote list

Ask about custom designs!

Ask for custom design Go to quote list