S-310 • S-316 Piezo Z and Tip/Tilt Scanner

Active axes

Z

Z

Z, θ_X, θ_Y

Z, θ_X, θ_Y

Z, θ_X, θ_Y

Motion and positioning

Integrated sensor

–

–

–

–

SGS

Travel range in Z at 0 to 100 V, open loop

6

12

6

12

12

µm

+20 % / -0 %

Tip/tilt angle at 0 to 100 V, open loop

–

–

600

1200

1200

µrad

+20 % / -0 %

Travel range in Z, closed loop

–

–

–

–

12

µm

Tip/tilt angle, closed loop

–

–

–

–

1200

µrad

Resolution in Z, open loop

0.1

0.2

0.1

0.2

0.2

nm

typ.

Resolution in θ_X, θ_Y, open loop

–

–

0.02

0.05

0.05

µrad

typ.

Resolution in Z, closed loop

–

–

–

–

0.4

nm

typ.

Resolution in θ_X, θ_Y, closed loop

–

–

–

–

0.1

µrad

typ.

Linearity error

–

–

–

–

0.2

%

typ.

Mechanical properties

Stiffness in Z

20

10

20

10

10

N/µm

±20 %

Resonant frequency, no load, in Z

9.5

5.5

9.5

5.5

5.5

kHz

±20 %

Resonant frequency, under load (with 15 mm × 4 mm glass mirror)

6.5

4.4

6.5

4.1

4.1

kHz

±20 %

Resonant frequency, under load (with 20 mm × 4 mm glass mirror)

6.1

4.2

6.1

3.4

3.4

kHz

±20 %

Distance of pivot point to platform surface

–

–

5

5

5

mm

±0.5 mm

Platform moment of inertia

–

–

150

150

150

g × mm²

±20 %

Drive properties

Ceramic type

PICMA® P-882

PICMA® P-882

PICMA® P-882

PICMA® P-882

PICMA® P-882

Electrical capacitance

0.39

0.93

0.39 (0.13 per axis)

0.93 (0.31 per axis)

0.93 (0.31 per axis)

µF

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Steel

Steel

Steel

Steel

Steel

Mass

0.053

0.055

0.045

0.055

0.055

kg

±5 %

Cable length

2

2

2

2

2

m

+100 mm / -0 mm

Voltage connection

LEMO

LEMO

LEMO

LEMO

S-316.10:

LEMO

S-316.10H:

Sub-D 37 (m)

Sensor connection

–

–

–

–

S-316.10:

LEMO

S-316.10H:

Sub-D 37 (m)

Recommended electronics

E-505, E-610

E-505, E-610

E-503, E-505, E-610

E-503, E-505, E-610

S-316.10:

E-503, E-505, E-509, E-610, E-625

S-316.10H:

E-727