S-310 • S-316 Piezo Z and Tip/Tilt Scanner
High Dynamics System with Aperture
- Clear aperture 10 mm
- Tripod piezo drive
- Linear travel ranges to 12 µm (phase shifter)
- Sub-ms response time
- Sub-µrad resolution
- Closed-loop versions for increased precision
Application fields
- Image processing / stabilization
- Laser scanning / beam steering
- Laser tuning
- Optical filters / switches
- Beam stabilization
- Interferometry
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
Specifications
Specifications
S-310.10 | S-314.10 | S-311.10 | S-315.10 | S-316.10 S-316.10H | Unit | Tolerance | |
---|---|---|---|---|---|---|---|
Active axes | Z | Z | Z, θX, θY | Z, θX, θY | Z, θX, θY | ||
Motion and positioning | |||||||
Integrated sensor | – | – | – | – | SGS | ||
Travel range in Z at 0 to 100 V, open loop | 6 | 12 | 6 | 12 | 12 | µm | +20 % / -0 % |
Tip/tilt angle at 0 to 100 V, open loop | – | – | 600 | 1200 | 1200 | µrad | +20 % / -0 % |
Travel range in Z, closed loop | – | – | – | – | 12 | µm | |
Tip/tilt angle, closed loop | – | – | – | – | 1200 | µrad | |
Resolution in Z, open loop | 0.1 | 0.2 | 0.1 | 0.2 | 0.2 | nm | typ. |
Resolution in θX, θY, open loop | – | – | 0.02 | 0.05 | 0.05 | µrad | typ. |
Resolution in Z, closed loop | – | – | – | – | 0.4 | nm | typ. |
Resolution in θX, θY, closed loop | – | – | – | – | 0.1 | µrad | typ. |
Linearity error | – | – | – | – | 0.2 | % | typ. |
Mechanical properties | |||||||
Stiffness in Z | 20 | 10 | 20 | 10 | 10 | N/µm | ±20 % |
Resonant frequency, no load, in Z | 9.5 | 5.5 | 9.5 | 5.5 | 5.5 | kHz | ±20 % |
Resonant frequency, under load (with 15 mm × 4 mm glass mirror) | 6.5 | 4.4 | 6.5 | 4.1 | 4.1 | kHz | ±20 % |
Resonant frequency, under load (with 20 mm × 4 mm glass mirror) | 6.1 | 4.2 | 6.1 | 3.4 | 3.4 | kHz | ±20 % |
Distance of pivot point to platform surface | – | – | 5 | 5 | 5 | mm | ±0.5 mm |
Platform moment of inertia | – | – | 150 | 150 | 150 | g × mm² | ±20 % |
Drive properties | |||||||
Ceramic type | PICMA® P-882 | PICMA® P-882 | PICMA® P-882 | PICMA® P-882 | PICMA® P-882 | ||
Electrical capacitance | 0.39 | 0.93 | 0.39 (0.13 per axis) | 0.93 (0.31 per axis) | 0.93 (0.31 per axis) | µF | ±20 % |
Miscellaneous | |||||||
Operating temperature range | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | °C | |
Material | Steel | Steel | Steel | Steel | Steel | ||
Mass | 0.053 | 0.055 | 0.045 | 0.055 | 0.055 | kg | ±5 % |
Cable length | 2 | 2 | 2 | 2 | 2 | m | +100 mm / -0 mm |
Voltage connection | LEMO | LEMO | LEMO | LEMO | S-316.10: LEMO S-316.10H: D-sub 37 (m) | ||
Sensor connection | – | – | – | – | S-316.10: LEMO S-316.10H: D-sub 37 (m) | ||
Recommended electronics | E-505, E-610 | E-505, E-610 | E-503, E-505, E-610 | E-503, E-505, E-610 | S-316.10: E-503, E-505, E-509, E-610, E-625 S-316.10H: E-727 |
Downloads
Product Note
Product Change Notification Piezo Actuator Driven Products
Datasheet
Documentation
User Manual S310T0001
S-310, S-311, S-314, S-315, S-316 Piezo Z / Tip / Tilt Scanner
3-D Models
S-316 3-D model
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.

Digital Motion Controllers
Digital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.

Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.