In conjunction with the linear and rotational axes, planar scanners or parallel kinematic hexapods, the controllers are part of a customer-selectable complete system designed by PI.
Advanced algorithms in the motion controller minimize jitter, reduce settle times, and prevent vibration. Patented technology allows for the design of extremely quiet, compact PWM drives with dynamic ranges of 100,000:1 – which results in sub-nanometer level standstill jitter and pushes the envelope for metrology applications.
Measurements have also shown these drives to achieve nanometer level of tracking errors while scanning a wafer. Further features are the integrated 3-DOF compensation of positioning errors and yaw compensation for gantry solutions.