Flatness
See >> Crosstalk.
Flexure Guides
The motion of a solid body is based in elastic deformation of a solid body whereby static, rolling or sliding friction is avoided. Solid body elements such as flexures or guiding systems are distinguished by high stiffness and high load capacity and are virtually insensitive to impact or vibration. They are wear- and maintenance-free, vacuum-compatible, function over a large temperature range and do not require lubrication.