A-523 PIglide High-Precision Z Tip/Tilt Stage with Air Bearings
High Performance • Cleanroom-Compatible • Low Profile
- Travel range in Z to ±2.5 mm
- Rotation range in θX, θY to ±1°
- Load capacity to 8 kg
- Platform diameter 250 mm
- Overall height 60 mm
Product overview
A-523 is an air bearing Z tip/tilt stage with direct drive. Designed as a parallel-kinematic multi-axis system, the platform can be used for Z and tip/tilt motion. This stage offers ultra-precision in miniature format. The combination of the noncontact components results in a frictionless motion platform that offers top performance, quality, and lifetime.
When the A-523 is ordered together with a controller of the A-81x or A-82x series, PI carries out the configuration and cabling of the Z stage with applied servo tuning optimization and under applied load. You receive a complete, ready-to-use positioning system.
Accessories and options
- Air filter sets
- Built-in vacuum clamping mechanism
Application fields
The Z tip/tilt stage is ideally suited for high-precision applications, such as wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is ideal for cleanroom applications.
Specifications
Specifications
Motion | A-523.25005B3 | Tolerance |
---|---|---|
Active axes | Z θX θY | |
Travel range in Z | 5 mm | |
Rotation range in θX | 2 ° | |
Rotation range in θY | 1.6 ° | |
Acceleration in Z, unloaded | 10 m/s² | max. |
Maximum velocity in Z, unloaded | 200 mm/s | |
Yaw (Rotational crosstalk in θX with motion in Z) | ± 25 µrad | typ. |
Pitch (Rotational crosstalk in θY with motion in Z) | ± 25 µrad | typ. |
Positioning | A-523.25005B3 | Tolerance |
Bidirectional repeatability in Z | ± 0.25 µm | typ. |
Bidirectional repeatability in θX | ± 8 µrad | typ. |
Bidirectional repeatability in θY | ± 8 µrad | typ. |
Positioning accuracy in Z, calibrated | ± 0.5 µm | typ. |
Positioning accuracy in θX, uncalibrated | ± 15 µrad | typ. |
Positioning accuracy in θY, uncalibrated | ± 15 µrad | typ. |
Minimum incremental motion in Z | 0.01 µm | typ. |
Minimum incremental motion in θX | 0.06 µrad | typ. |
Minimum incremental motion in θY | 0.06 µrad | typ. |
Integrated sensor | Absolute linear encoder | |
Sensor signal | BiSS-C | |
Sensor resolution | 1 nm | |
Drive Properties | A-523.25005B3 | Tolerance |
Drive type | Ironless 3-phase linear motor | |
Nominal voltage | 24 V | |
Peak voltage | 60 V | |
Nominal current, RMS | 1.4 A | typ. |
Peak current, RMS | 2.8 A | typ. |
Force constant | 5.9 N/A | |
Resistance phase-phase | 5.2 Ω | typ. |
Inductance phase-phase | 1 mH | |
Back EMF phase-phase | 4.2 V·s/m | max. |
Pole pitch N-N | 19.66 mm | |
Mechanical Properties | A-523.25005B3 | Tolerance |
Guide | Air bearing guide with air preload | |
Permissible push force in Z | 80 N | max. |
Overall mass | 8200 g | |
Material | Hardcoat aluminum, stainless steel mounting hardware | |
Miscellaneous | A-523.25005B3 | Tolerance |
Connector | HD D-sub 26 (m) | |
Air bearing connection | Plug connection for hose with 6 mm outer diameter | |
Operating pressure | 515 to 585 (75 to 85 psi) kPa | |
Air consumption | 84 L/min | max. |
Air quality | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | |
Recommended controllers / drivers | A-814 (four axes), A-82x (4 / 6 / 8 axes) | |
Operating temperature range | +15 to +25 °C |
Downloads
Datasheet
Documentation
User Manual A523D0001
A-523 PIglide Z-Tip-Tilt Air Bearing Stage
3-D Models
3-D model A-523
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