- Travel range in Z to ±2.5 mm
- Rotation range in θX, θY to ±1°
- Load capacity to 8 kg
- Platform diameter 250 mm
- Overall height 60 mm
A-523 is an air bearing Z tip/tilt stage with direct drive. Designed as a parallel-kinematic multi-axis system, the platform can be used for Z and tip/tilt motion. This stage offers ultra-precision in miniature format. The combination of the noncontact components results in a frictionless motion platform that offers top performance, quality, and lifetime.
When the A-523 is ordered together with a controller of the A-81x or A-82x series, PI carries out the configuration and cabling of the Z stage with applied servo tuning optimization and under applied load. You receive a complete, ready-to-use positioning system.
Accessories and options
- Air filter sets
- Built-in vacuum clamping mechanism
The Z tip/tilt stage is ideally suited for high-precision applications, such as wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is ideal for cleanroom applications.
User Manual A523D0001
A-523 PIglide Z-Tip-Tilt Air Bearing Stage
3-D model A-523
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