A-523 PIglide High-Precision Z Tip/Tilt Stage with Air Bearings

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High Performance • Cleanroom-Compatible • Low Profile

A-523 PIglide High-Precision Z Tip/Tilt Stage with Air Bearings

Product Description Specifications Downloads Quote / Order

Product overview

A-523 is an air bearing Z tip/tilt stage with direct drive. Designed as a parallel-kinematic multi-axis system, the platform can be used for Z and tip/tilt motion. This stage offers ultra-precision in miniature format. The combination of the noncontact components results in a frictionless motion platform that offers top performance, quality, and lifetime.

When the A-523 is ordered together with a controller of the A-81x or A-82x series, PI carries out the configuration and cabling of the Z stage with applied servo tuning optimization and under applied load. You receive a complete, ready-to-use positioning system.

Accessories and options

Air filter sets
Built-in vacuum clamping mechanism

Application fields

The Z tip/tilt stage is ideally suited for high-precision applications, such as wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is ideal for cleanroom applications.

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Datasheet

Datasheet A-523

Version / Date

2021-05-18

Version / Date

2021-05-18

Document language

Download

pdf - 1 MB

Download

pdf - 1 MB

Motion	A-523.25005B3	Tolerance
Active axes	Z θX θY
Travel range in Z	5 mm
Rotation range in θX	2 °
Rotation range in θY	1.6 °
Acceleration in Z, unloaded	10 m/s²	max.
Maximum velocity in Z, unloaded	200 mm/s
Yaw (Rotational crosstalk in θX with motion in Z)	± 25 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	± 25 µrad	typ.
Positioning	A-523.25005B3	Tolerance
Bidirectional repeatability in Z	± 0.25 µm	typ.
Bidirectional repeatability in θX	± 8 µrad	typ.
Bidirectional repeatability in θY	± 8 µrad	typ.
Positioning accuracy in Z, calibrated	± 0.5 µm	typ.
Positioning accuracy in θX, uncalibrated	± 15 µrad	typ.
Positioning accuracy in θY, uncalibrated	± 15 µrad	typ.
Minimum incremental motion in Z	0.01 µm	typ.
Minimum incremental motion in θX	0.06 µrad	typ.
Minimum incremental motion in θY	0.06 µrad	typ.
Integrated sensor	Absolute linear encoder
Sensor signal	BiSS-C
Sensor resolution	1 nm
Drive Properties	A-523.25005B3	Tolerance
Drive type	Ironless 3-phase linear motor
Nominal voltage	24 V
Peak voltage	60 V
Nominal current, RMS	1.4 A	typ.
Peak current, RMS	2.8 A	typ.
Force constant	5.9 N/A
Resistance phase-phase	5.2 Ω	typ.
Inductance phase-phase	1 mH
Back EMF phase-phase	4.2 V·s/m	max.
Pole pitch N-N	19.66 mm
Mechanical Properties	A-523.25005B3	Tolerance
Guide	Air bearing guide with air preload
Permissible push force in Z	80 N	max.
Overall mass	8200 g
Material	Hardcoat aluminum, stainless steel mounting hardware
Miscellaneous	A-523.25005B3	Tolerance
Connector	HD D-sub 26 (m)
Air bearing connection	Plug connection for hose with 6 mm outer diameter
Operating pressure	515 to 585 (75 to 85 psi) kPa
Air consumption	84 L/min	max.
Air quality	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3
Recommended controllers / drivers	A-814 (four axes), A-82x (4 / 6 / 8 axes)
Operating temperature range	+15 to +25 °C

Download datasheet Go to download

Datasheet

Datasheet A-523

Version / Date

2021-05-18

Version / Date

2021-05-18

Document language

Download

pdf - 1 MB

Download

pdf - 1 MB

3-D Models

3-D model A-523

Version / Date

2021-03-09

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A-523.25005B3 NEW!

PIglide high-precision Z tip/tilt stage with air bearings; ironless 3-phase linear motor; 5 mm travel range; 2 ° × 1.6 ° rotational angle (θX × θY); 80 N load capacity; 200 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

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