A-121.050A1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 50 mm travel range; 100 N load capacity; 500 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak
A-121 PIglide AT1 Linear Stage with Air Bearings
High Performance Small Footprint Nanopositioning Stage
- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Size of the motion platform 115 mm × 115 mm
- Travel ranges to 350 mm
- Low profile from 60 mm
- Resolution to 1 nm
A-121, dimensions in mm
A-121 PIglide AT1 Linear Stage with Air Bearings
Product Description
Specifications
Downloads
Quote / Order
Product overview
The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.
A high-force linear motor can drive the stage to top speed within a few milliseconds. The preloaded air bearing construction supports mounting in any orientation.
Accessories and options
- Encoder
- PIglide filter and air preparation kits
- Multi-axis motion controller and direct drives
- XY setups and individual configurations
- Cable track variations
- Counterbalance options for vertical assembly
- Base plates made of granite and systems for reducing vibration
Application fields
PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
Specifications
Specifications
Select a travel range:
| Motion | A-121.050A1 | A-121.050B1 | A-121.100A1 | A-121.100B1 | A-121.150A1 | A-121.150B1 | A-121.200A1 | A-121.200B1 | A-121.250A1 | A-121.250B1 | A-121.350A1 | A-121.350B1 | Tolerance |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Active axes | X | X | X | X | X | X | X | X | X | X | X | X | |
| Travel range in X | 50 mm | 50 mm | 100 mm | 100 mm | 150 mm | 150 mm | 200 mm | 200 mm | 250 mm | 250 mm | 350 mm | 350 mm | |
| Acceleration in X, unloaded | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | max. |
| Maximum velocity in X, unloaded | 500 mm/s | 500 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | |
| Straightness (Linear crosstalk in Y with motion in X) | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | ± 0.75 µm | ± 0.75 µm | ± 1 µm | ± 1 µm | ± 1.25 µm | ± 1.25 µm | max. |
| Flatness (Linear crosstalk in Z with motion in X) | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | ± 0.75 µm | ± 0.75 µm | ± 1 µm | ± 1 µm | ± 1.25 µm | ± 1.25 µm | max. |
| Pitch (Rotational crosstalk in θY with motion in X) | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 12.5 µrad | ± 12.5 µrad | ± 17.5 µrad | ± 17.5 µrad | max. |
| Yaw (Rotational crosstalk in θZ with motion in X) | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 12.5 µrad | ± 12.5 µrad | ± 17.5 µrad | ± 17.5 µrad | max. |
| Positioning | A-121.050A1 | A-121.050B1 | A-121.100A1 | A-121.100B1 | A-121.150A1 | A-121.150B1 | A-121.200A1 | A-121.200B1 | A-121.250A1 | A-121.250B1 | A-121.350A1 | A-121.350B1 | Tolerance |
| Positioning accuracy in X, calibrated | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | typ. |
| Positioning accuracy in X, uncalibrated | ± 1.5 µm | ± 1.5 µm | ± 1.5 µm | ± 1.5 µm | ± 1.5 µm | ± 1.5 µm | ± 2 µm | ± 1.5 µm | ± 2 µm | ± 1.5 µm | ± 3 µm | ± 1.5 µm | typ. |
| Bidirectional repeatability in X | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | typ. |
| Integrated sensor | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | |
| Sensor signal | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | |
| Sensor signal period | 20 µm | 20 µm | 20 µm | 20 µm | 20 µm | 20 µm | |||||||
| Sensor resolution | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | |
| Drive Properties | A-121.050A1 | A-121.050B1 | A-121.100A1 | A-121.100B1 | A-121.150A1 | A-121.150B1 | A-121.200A1 | A-121.200B1 | A-121.250A1 | A-121.250B1 | A-121.350A1 | A-121.350B1 | Tolerance |
| Drive type | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | |
| Nominal voltage | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | |
| Peak voltage | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | |
| Nominal current, RMS | 1.2 A | 1.2 A | 1.2 A | 1.2 A | 1.2 A | 1.2 A | 1.2 A | 1.2 A | 1.2 A | 1.2 A | 1.2 A | 1.2 A | typ. |
| Peak current, RMS | 3.5 A | 3.5 A | 3.5 A | 3.5 A | 3.5 A | 3.5 A | 3.5 A | 3.5 A | 3.5 A | 3.5 A | 3.5 A | 3.5 A | typ. |
| Drive force in X | 11.1 N | 11.1 N | 11.1 N | 11.1 N | 11.1 N | 11.1 N | 11.1 N | 11.1 N | 11.1 N | 11.1 N | 11.1 N | 11.1 N | typ. |
| Peak force in X | 33.2 N | 33.2 N | 33.2 N | 33.2 N | 33.2 N | 33.2 N | 33.2 N | 33.2 N | 33.2 N | 33.2 N | 33.2 N | 33.2 N | |
| Force constant | 9.4 N/A | 9.4 N/A | 9.4 N/A | 9.4 N/A | 9.4 N/A | 9.4 N/A | 9.4 N/A | 9.4 N/A | 9.4 N/A | 9.4 N/A | 9.4 N/A | 9.4 N/A | |
| Resistance phase-phase | 6.3 Ω | 6.3 Ω | 6.3 Ω | 6.3 Ω | 6.3 Ω | 6.3 Ω | 6.3 Ω | 6.3 Ω | 6.3 Ω | 6.3 Ω | 6.3 Ω | 6.3 Ω | typ. |
| Inductance phase-phase | 1 mH | 1 mH | 1 mH | 1 mH | 1 mH | 1 mH | 1 mH | 1 mH | 1 mH | 1 mH | 1 mH | 1 mH | |
| Back EMF phase-phase | 7.7 V·s/m | 7.7 V·s/m | 7.7 V·s/m | 7.7 V·s/m | 7.7 V·s/m | 7.7 V·s/m | 7.7 V·s/m | 7.7 V·s/m | 7.7 V·s/m | 7.7 V·s/m | 7.7 V·s/m | 7.7 V·s/m | max. |
| Pole pitch N-N | 40 mm | 40 mm | 40 mm | 40 mm | 40 mm | 40 mm | 40 mm | 40 mm | 40 mm | 40 mm | 40 mm | 40 mm | |
| Mechanical Properties | A-121.050A1 | A-121.050B1 | A-121.100A1 | A-121.100B1 | A-121.150A1 | A-121.150B1 | A-121.200A1 | A-121.200B1 | A-121.250A1 | A-121.250B1 | A-121.350A1 | A-121.350B1 | Tolerance |
| Permissible push force in Y | 40 N | 40 N | 40 N | 40 N | 40 N | 40 N | 40 N | 40 N | 40 N | 40 N | 40 N | 40 N | max. |
| Permissible push force in Z | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | max. |
| Permissible torque in θx | 5 N·m | 5 N·m | 5 N·m | 5 N·m | 5 N·m | 5 N·m | 5 N·m | 5 N·m | 5 N·m | 5 N·m | 5 N·m | 5 N·m | max. |
| Permissible torque in θY | 8.3 N·m | 8.3 N·m | 8.3 N·m | 8.3 N·m | 8.3 N·m | 8.3 N·m | 8.3 N·m | 8.3 N·m | 8.3 N·m | 8.3 N·m | 8.3 N·m | 8.3 N·m | max. |
| Moved mass in X, unloaded | 1200 g | 1200 g | 1200 g | 1200 g | 1200 g | 1200 g | 1200 g | 1200 g | 1200 g | 1200 g | 1200 g | 1200 g | |
| Guide | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | |
| Overall mass | 3500 g | 3500 g | 4200 g | 4200 g | 4500 g | 4500 g | 5200 g | 5200 g | 5700 g | 5700 g | 6800 g | 6800 g | |
| Material | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | |
| Miscellaneous | A-121.050A1 | A-121.050B1 | A-121.100A1 | A-121.100B1 | A-121.150A1 | A-121.150B1 | A-121.200A1 | A-121.200B1 | A-121.250A1 | A-121.250B1 | A-121.350A1 | A-121.350B1 | Tolerance |
| Operating temperature range | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | |
| Connector | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | |
| Sensor connector | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | |
| Operating pressure | 450 to 520 (65 to 75 psi) kPa | 450 to 520 (65 to 75 psi) kPa | 450 to 520 (65 to 75 psi) kPa | 450 to 520 (65 to 75 psi) kPa | 450 to 520 (65 to 75 psi) kPa | 450 to 520 (65 to 75 psi) kPa | 450 to 520 (65 to 75 psi) kPa | 450 to 520 (65 to 75 psi) kPa | 450 to 520 (65 to 75 psi) kPa | 450 to 520 (65 to 75 psi) kPa | 450 to 520 (65 to 75 psi) kPa | 450 to 520 (65 to 75 psi) kPa | |
| Air consumption | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | max. |
| Air quality | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | |
| Recommended controllers / drivers | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x |
Downloads
Product Note
Product Note
Product Change Notification A-xxx.*C1
Version / Date
2018-08-02
pdf - 71 KB
English
Datasheet
Documentation
Documentation
User Manual A121D0001
A-121 PIglide AT1 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback
Version / Date
2021-05-17
pdf - 1,020 KB
English
3D Models
3D Models
A-121 3-D model
Version / Date
2018-03-15
zip - 12 MB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
A-121.050B1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 50 mm travel range; 100 N load capacity; 500 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
A-121.100A1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 100 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak
A-121.100B1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 100 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
A-121.150A1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 150 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak
A-121.150B1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 150 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
A-121.200A1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 200 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak
A-121.200B1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 200 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
A-121.250A1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 250 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak
A-121.250B1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 250 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
A-121.350A1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 350 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak
A-121.350B1
PIglide AT1 linear stage with air bearing; ironless 3-phase linear motor; 350 mm travel range; 100 N load capacity; 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
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