NEXACT® OEM-Linearantrieb, 10 mm, 10 N
- Travel range 10 to 125 mm, variable runner lengths
- Compact in size, inexpensive design
- Resolution to 0.03 nm
- Push force up to 10 N
- Industrial precision positioning
- Semiconductor technology
- Semiconductor tests
- Wafer inspection
Nanometer precision and high feed force with PiezoWalk® walking drives
In the PiezoWalk® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
User Manual N310T0012
N-310 NEXACT® OEM Miniature Linear Drive
N-310 3-D model
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