N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper

High Resolution with Optional Position Sensor

N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper
Product Description Specifications Downloads Quote / Order
  • Travel range 30 mm
  • Force generation to 10 N
  • With NEXACT® piezo walking drive
  • Optional: Integrated linear encoder with 20 nm resolution

Fields of application

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Specifications

Datasheet N-381

Version / Date
2018-04-17
Version / Date
2018-04-17
Version / Date
2017-11-17
Document language
pdf - 574 KB
pdf - 581 KB
pdf - 355 KB

Downloads

Datasheet

Datasheet N-381

Version / Date
2018-04-17
Version / Date
2018-04-17
Version / Date
2017-11-17
Document language
pdf - 574 KB
pdf - 581 KB
pdf - 355 KB

Documentation

Technical Note N381T0002

N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper
Version / Date
2011-05-18
Document language German
pdf - 184 KB

3-D Models

N-381 STEP

Document language English

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.