LMS-270 Precision Linear Stage

This product has been replaced by the following new product: Stages with Magnetic Direct-Drive Linear Motor

High Dynamics due to the Magnetic Direct Drive, High Stability

Travel ranges to 1016 mm (40 '')
Velocity to 800 mm/s
Incremental encoder with 15 nm resolution
480 N peak force

quote / order

LMS-270

6239500057, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

6239500021, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

6239500058, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

6239500059, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Reference-class linear stage

High travel accuracy. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 V_pp).

Versions with DC servo motors or stepper motors are available with the same footprint.

Magnetic direct drive

Ironless magnetic direct drive for high velocity and acceleration. High position resolution.

Application fields

Industry and research. Metrology, precision scanning in in semiconductor or electronics manufacturing.

Download datasheet specifications quote / order

Datasheet

Version / Date

2023-07-18

pdf - 4 MB

Version / Date

2023-07-18

pdf - 4 MB

Version / Date

2017-08-21

pdf - 606 KB

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Select a travel range:

Motion	6239500057	6239500021	6239500058	6239500059	Tolerance
Active axes	X	X	X	X
Travel range in X	304 mm	508 mm	813 mm	1016 mm
Maximum velocity in X, unloaded	800 mm/s	800 mm/s	800 mm/s	800 mm/s
Straightness (Linear crosstalk in Y with motion in X)	± 3 µm	± 4 µm	± 7 µm	± 10 µm	typ.
Flatness (Linear crosstalk in Z with motion in X)	± 3 µm	± 4 µm	± 7 µm	± 10 µm	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 40 µrad	± 80 µrad	± 100 µrad	± 120 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 20 µrad	± 30 µrad	± 40 µrad	± 50 µrad	typ.
Positioning	6239500057	6239500021	6239500058	6239500059	Tolerance
Minimum incremental motion in X	0.05 µm	0.05 µm	0.05 µm	0.05 µm	typ.
Positioning accuracy in X, uncalibrated	± 70 µm	± 70 µm	± 70 µm	± 70 µm	typ.
Unidirectional repeatability in X	± 0.0375 µm	± 0.0375 µm	± 0.0375 µm	± 0.0375 µm	typ.
Bidirectional repeatability in X	0.3 µm	0.3 µm	0.3 µm	0.3 µm	typ.
Limit switches	Inductive	Inductive	Inductive	Inductive
Integrated sensor	Incremental linear encoder	Incremental linear encoder	Incremental linear encoder	Incremental linear encoder
Sensor signal	Sin/cos, 1 V peak-peak	Sin/cos, 1 V peak-peak	Sin/cos, 1 V peak-peak	Sin/cos, 1 V peak-peak
Sensor resolution	15 nm	15 nm	15 nm	15 nm
Drive Properties	6239500057	6239500021	6239500058	6239500059	Tolerance
Drive type	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor
Nominal voltage	48 V	48 V	48 V	48 V
Nominal current, RMS	3.7 A	3.7 A	3.7 A	3.7 A	typ.
Peak current, RMS	17.5 A	17.5 A	17.5 A	17.5 A	typ.
Drive force in X	100 N	100 N	100 N	100 N	typ.
Peak force in X	480 N	480 N	480 N	480 N
Force constant	27.5 N/A	27.5 N/A	27.5 N/A	27.5 N/A
Resistance phase-phase	1.28 Ω	1.28 Ω	1.28 Ω	1.28 Ω	typ.
Inductance phase-phase	1 mH	1 mH	1 mH	1 mH
Back EMF phase-phase	22.5 V·s/m	22.5 V·s/m	22.5 V·s/m	22.5 V·s/m	max.
Pole pitch N-N	42 mm	42 mm	42 mm	42 mm
Mechanical Properties	6239500057	6239500021	6239500058	6239500059	Tolerance
Permissible push force in Y	500 N	500 N	500 N	500 N	max.
Permissible push force in Z	500 N	500 N	500 N	500 N	max.
Moved mass in X, unloaded	2500 g	2500 g	2500 g	2500 g
Guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide
Overall mass	35000 g	42000 g	51000 g	61000 g
Material	Black anodized aluminum	Black anodized aluminum	Black anodized aluminum	Black anodized aluminum
Miscellaneous	6239500057	6239500021	6239500058	6239500059	Tolerance
Operating temperature range	10 to 50 °C	10 to 50 °C	10 to 50 °C	10 to 50 °C
Connector	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)
Sensor connector	D-sub 9-pin (m)	D-sub 9-pin (m)	D-sub 9-pin (m)	D-sub 9-pin (m)
Recommended controllers / drivers	ACS modular controller	ACS modular controller	ACS modular controller	ACS modular controller
Connector for temperature sensor	HD D-sub 15-pin (m)	HD D-sub 15-pin (m)	HD D-sub 15-pin (m)	HD D-sub 15-pin (m)