Vacuum compatible precision Z stage; 2-phase stepper motor; 26 mm travel range; 55 N load capacity; 7.5 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak; vacuum compatible to 10-6 hPa
- Suitable for vacuum up to 10-6 hPa
- Travel range 26 mm (1")
- High-resolution encoder
- Stepper motor
- Zero-play ball screw
- Load capacity to 5.5 kg
Precision-class Z stage
High guiding accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for high stability. 2-phase stepper motor for high torque even at low velocities and high resolution Noncontact limit and reference switches (Hall effect). Reference switch with direction sensing in the middle of the travel range. Integrated linear encoder, installed centrically.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Reduced outgassing especially for use in vacuum environments
Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6 hPa.
Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
User Manual L310T0005
Short Instructions MP146EK
Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx