S-303 Piezo Phase Shifters

High Dynamics, Nanometer-Precision Piezo Phase Shifters

  • Resonant frequency 25 kHz for the highest dynamics
  • Travel range of up to 3 µm
  • Compact dimensions: Ø 30 mm × 10 mm
  • Open-loop versions with aperture
  • Invar option for the highest thermal stability
S-303 Piezo Phase Shifters
Product Description Specifications Downloads Quote / Order

Application fields

  • (Fizeau) interferometry
  • Optical nanomanipulation and inspection
  • Scanning microscopy

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Specifications

Datasheet

Datasheet S-303

Version / Date
2021-03-19
pdf - 848 KB
Version / Date
2021-03-19
pdf - 846 KB

Downloads

Product Note

Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date
2021-04-19
pdf - 377 KB
English

Datasheet

Datasheet

Datasheet S-303

Version / Date
2021-03-19
pdf - 848 KB
Version / Date
2021-03-19
pdf - 846 KB

Documentation

Documentation

User Manual PZ301

S-303 Piezo Phase Shifter

Version / Date
2020-02-03
pdf - 1 MB
Version / Date
2020-02-03
pdf - 1 MB
Documentation

Short Instructions PZ277

Piezo Tip/Tilt Platforms: S-3xx

Version / Date
1.2.0 03/2020
pdf - 1 MB
Version / Date
1.2.0 03/2020
pdf - 1 MB

3-D Models

3-D Models

3-D-model S-303.xxI

zip - 63 KB
3-D Models

3-D-model S-303.CD

zip - 44 KB
3-D Models

3-D-model S-303.xL

zip - 356 KB

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