|
Payload
|
10 kg to 15 kg
|
|
|
Travel range in X
|
200 mm, 400 mm, 600 mm, 800 mm
|
X: Gantry axis
|
|
Travel range in Y
|
200 mm, 400 mm, 600 mm
|
Y: Bridge axis
|
|
Minimum incremental motion in X, Y
|
0.1 µm
|
|
|
Bidirectional repeatability
|
±0.5 µm
|
Per axis, ≥ 2 σ
|
|
Positioning accuracy, calibrated
|
±1 µm
|
Per axis, achieved with 1D mapping of X and Y axis
|
|
Orthogonality X to Y
| < 35 µrad
|
|
|
Straightness in X
|
20 µm
|
Straightness error E_YX
|
|
Straightness in Y
|
10 µm
|
Straightness error E_XY
|
|
Flatness in X
|
10 µm
|
Straightness error E_ZX
|
|
Flatness in Y
|
20 µm
|
Straightness error E_ZY
|
|
Sensor
|
Absolute encoder
|
No risk of collision at startup
|
|
Sensor resolution
|
1 nm
|
|
|
Drive properties
|
X-365
|
Note
|
|
Max. velocity in X, unloaded ǀ loaded*
|
unloaded : 2 m/s
loaded*: 1.4 m/s
|
With G-901.RA5486B
|
|
Velocity in continuous operation in X
|
unloaded : 1.25 m/s
loaded*: 0.65 m/s
|
|
|
Max. velocity in Y
|
unloaded : 2.5 m/s
loaded*: 1.2 m/s
|
With G-901.RA5486B
|
|
Velocity in continuous operation in Y
|
unloaded : 2.5 m/s
loaded*: 0.75 m/s
|
|
|
Max. acceleration in X
|
unloaded : 15 m/s2
loaded*: 10 m/s2
|
|
|
Acceleration in continuous operation in X
|
unloaded : 12.5 m/s2
loaded*: 6.5 m/s2
|
|
|
Max. acceleration in Y
|
unloaded : 25 m/s2
loaded*: 12 m/s2
|
|
|
Acceleration in continuous operation in Y
|
unloaded : 25 m/s2
loaded*: 7.5 m/s2
|
|
|
Max. drive force in X
|
unloaded : 430 N
loaded*: 430 N
|
|
|
Drive force in continuous operation in X
|
unloaded : 135 N
loaded*: 135 N
|
|
|
Max. drive force in Y
|
unloaded : 70 N
loaded*: 260 N
|
|
|
Drive force in continuous operation in Y
|
unloaded : 35 N
loaded*: 85 N
|
|
|
Environment
|
X-365
|
Note
|
|
Environment
|
Default
|
Ambient pressure at 22 ±0.5 °C
|
|
Lifetime
|
2 years
|
In 24/7 operation, at full duty cycle
|
|
Controller
|
X-365
|
Note
|
|
High-end
|
G-901.RA5486B
|
To achieve all specification values
|
|
Default
|
G-901.RA5197
|
To achieve most specification values
|
|
Cost-optimized
|
ECMma
|
ACS integrated motion controller
|
