A-123 PIglide AT3 Linear Stage with Air Bearings

High Performance Nanopositioning Stage

A-123 PIglide AT3 Linear Stage with Air Bearings

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The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.

A high-force linear motor can drive the stage to top speed within a few milliseconds, and the high-capacity bearings can support payloads up to 60 kg. The laterally opposed, actively preloaded air bearing design in this model allows mounting in any orientation.

Encoder
PIglide Filter and Air Preparation Kits
Single and multi-axis motion controller
Pneumatic lock/unlock option
XY setups and individual configurations
Cable track variations
Options with counterweight for vertical (Z) orientation
Customizations available
Base plates made of granite and systems for reducing vibration

PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

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Datasheet

Datasheet A-123

Version / Date

2020-03-31

Version / Date

2020-03-31

Version / Date

2021-01-15

Version / Date

2019-07-18

Document language

pdf - 654 KB

pdf - 660 KB

pdf - 495 KB

pdf - 844 KB

Motion	A‑123.050	A‑123.100	A‑123.150	A‑123.200	A‑123.350	A‑123.500	A‑123.750	Unit	Tolerance
Active axes	X	X	X	X	X	X	X
Travel range	50	100	150	200	350	500	750	mm
Pitch / yaw ⁽¹⁾	10	10	15	15	15	20	35	µrad	Max.
Straightness / flatness ⁽¹⁾	0.5	0.5	0.5	0.5	1	1.5	3	µm	Max.
Straightness / flatness per 25 mm travel range ⁽¹⁾	0.1	0.1	0.1	0.1	0.1	0.1	0.1	µm	Max.
Velocity, unloaded ⁽²⁾	1	1	1	1	1	1	1	m/s	Max.
Acceleration, unloaded ⁽²⁾	30	30	30	30	30	30	30	m/s²	Max.

Mechanical properties	A‑123.050	A‑123.100	A‑123.150	A‑123.200	A‑123.350	A‑123.500	A‑123.750	Unit	Tolerance
Load capacity in z ⁽⁶⁾	410	410	410	410	410	410	410	N	Max.
Load capacity in y ⁽⁶⁾	205	205	205	205	205	205	205	N	Max.
Permissible torque in θx ⁽⁶⁾	25	25	25	25	25	25	25	Nm	Max.
Permissible torque in θy ⁽⁶⁾	10	10	10	10	10	10	10	Nm	Max.
Moved mass	5	5	5	5	5	5	5	kg
Overall mass	14	15.5	16.5	18	21.5	25	32	kg
Guide type	Air bearing	Air bearing	Air bearing	Air bearing	Air bearing	Air bearing	Air bearing

Drive properties	A‑123	Unit	Tolerance
Drive type	Ironless 3-phase linear motor
Intermediate circuit voltage, RMS	48, nominal 80, max.	V DC
Peak current, RMS	15	A	Max.
Nominal current, RMS	4.4	A	Max.
Peak force	298	N	Max.
Nominal force	87.5	N	Max.
Force constant, RMS	19.9	N/A	Typ.
Resistance phase-phase	3.6	Ω	Typ.
Inductance phase-phase	1.2	mH	Typ.
Back EMF phase-phase	16	V·s/m	Typ.
Cabling	External, moving cable

Positioning	A‑123.xxxA	A‑123.xxxB
Integrated sensor	Incremental linear encoder	Absolute encoder
Sensor signal	Sin/cos, 1 V peak-peak, 20 µm signal period	BiSS-C
Sensor resolution	4.88 nm ⁽³⁾	1 nm
Bidirectional repeatability	± 0.1 µm	± 0.1 µm
Positioning accuracy, uncalibrated ⁽⁴⁾	A-123.050: ± 1.5 µm A-123.100: ± 1.5 µm A-123.150: ± 1.5 µm A-123.200: ± 2 µm A-123.350: ± 3 µm A-123.500: ± 3.5 µm A-123.750: ± 5 µm	A-123.050: ± 1.5 µm A-123.100: ± 1.5 µm A-123.150: ± 1.5 µm A-123.200: ± 1.5 µm A-123.350: ± 1.5 µm A-123.500: ± 1.5 µm A-123.750: ± 1.5 µm
Positioning accuracy, calibrated ⁽⁴⁾	A-123.050: ± 0.3 µm A-123.100: ± 0.3 µm A-123.150: ± 0.3 µm A-123.200: ± 0.3 µm A-123.350: ± 0.3 µm A-123.500: ± 0.5 µm A-123.750: ± 0.5 µm	A-123.050: ± 0.3 µm A-123.100: ± 0.3 µm A-123.150: ± 0.3 µm A-123.200: ± 0.3 µm A-123.350: ± 0.3 µm A-123.500: ± 0.5 µm A-123.750: ± 0.5 µm

Miscellaneous	A‑123
Operating pressure ⁽⁵⁾	75 to 85 psi (515 to 585 kPa)
Air consumption	< 1.0 SCFM (28 SLPM)
Air quality	Clean (filtered to 1.0 μm or better) - ISO 8573‑1 Class 1 Oil free - ISO 8573‑1 Class 1 Dry (-15 °C dew point) - ISO 8573‑1 Class 3
Materials	Hardcoat aluminum, stainless steel mounting hardware

⁽¹⁾ Dependent on the flatness of the surface, on which the stage is mounted.

⁽²⁾ Can be limited by the payload, controller or drive.

⁽³⁾ Assumes 4096x interpolation. Contact PI for the use of other factors.

⁽⁴⁾ Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.

⁽⁵⁾ To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

⁽⁶⁾ Assumes an air bearing operating pressure of 80 psi (550 kPa).

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Product Note

Product Change Notification A-xxx.*C1

Version / Date

2018-08-02

Document language English

Download

pdf - 71 KB

Datasheet

Datasheet A-123

Version / Date

2020-03-31

Version / Date

2020-03-31

Version / Date

2021-01-15

Version / Date

2019-07-18

Document language

pdf - 654 KB

pdf - 660 KB

pdf - 495 KB

pdf - 844 KB

Documentation

User Manual A123D0001

A-123 PIglide AT3 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback

Version / Date

2020-03-26

Document language English

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3-D Models

A-123 3-D model

Version / Date

2020-04-13

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Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

A-123.050A1

PIglide AT3 Linear stage, air bearing, 50 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-123.050B1

PIglide AT3 Linear stage, air bearing, 50 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-123.100A1

PIglide AT3 Linear stage, air bearing, 100 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-123.100B1

PIglide AT3 Linear stage, air bearing, 100 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-123.150A1

PIglide AT3 Linear stage, air bearing, 150 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-123.150B1

PIglide AT3 Linear stage, air bearing, 150 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-123.200A1

PIglide AT3 Linear stage, air bearing, 200 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-123.200B1

PIglide AT3 Linear stage, air bearing, 200 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-123.350A1

PIglide AT3 Linear stage, air bearing, 350 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-123.350B1

PIglide AT3 Linear stage, air bearing, 350 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-123.500A1

PIglide AT3 Linear stage, air bearing, 500 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-123.500B1

PIglide AT3 Linear stage, air bearing, 500 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-123.750A1

PIglide AT3 Linear stage, air bearing, 750 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-123.750B1

PIglide AT3 Linear stage, air bearing, 750 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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