PIglide AT3 linear stage, air bearings, 50 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-123 PIglide AT3 Linear Stage with Air Bearings
High Performance Nanopositioning Stage
- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Size of the motion platform 210 mm × 210 mm
- Travel ranges 50 mm to 750 mm
- Resolution to 1 nm
Product overview
The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.
A high-force linear motor can drive the stage to top speed within a few milliseconds, and the high-capacity bearings can support payloads up to 60 kg. The laterally opposed, actively preloaded air bearing design in this model allows mounting in any orientation.
Accessories and options
- Encoder
- PIglide Filter and Air Preparation Kits
- Single and multi-axis motion controller
- Pneumatic lock/unlock option
- XY setups and individual configurations
- Cable track variations
- Options with counterweight for vertical (Z) orientation
- Customizations available
- Base plates made of granite and systems for reducing vibration
Application fields
PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
Specifications
Specifications
Motion | A-123.050A1 | A-123.050B1 | A-123.100A1 | A-123.100B1 | A-123.200A1 | A-123.200B1 | A-123.350A1 | A-123.350B1 | A-123.500A1 | A-123.500B1 | A-123.750A1 | A-123.750B1 | Tolerance |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Active axes | X | X | X | X | X | X | X | X | X | X | X | X | |
Travel range in X | 50 mm | 50 mm | 100 mm | 100 mm | 200 mm | 200 mm | 350 mm | 350 mm | 500 mm | 500 mm | 750 mm | 750 mm | |
Acceleration in X, unloaded | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | max. |
Maximum velocity in X, unloaded | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | |
Straightness (Linear crosstalk in Y with motion in X) | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | ± 0.75 µm | ± 0.75 µm | ± 1.5 µm | ± 1.5 µm | max. |
Flatness (Linear crosstalk in Z with motion in X) | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | ± 0.75 µm | ± 0.75 µm | ± 1.5 µm | ± 1.5 µm | max. |
Pitch (Rotational crosstalk in θY with motion in X) | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 10 µrad | ± 10 µrad | ± 12.5 µrad | ± 12.5 µrad | max. |
Yaw (Rotational crosstalk in θZ with motion in X) | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 10 µrad | ± 10 µrad | ± 12.5 µrad | ± 12.5 µrad | max. |
Positioning | A-123.050A1 | A-123.050B1 | A-123.100A1 | A-123.100B1 | A-123.200A1 | A-123.200B1 | A-123.350A1 | A-123.350B1 | A-123.500A1 | A-123.500B1 | A-123.750A1 | A-123.750B1 | Tolerance |
Bidirectional repeatability in X | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | typ. |
Positioning accuracy in X, calibrated | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | typ. |
Positioning accuracy in X, uncalibrated | ± 1.5 µm | ± 1.5 µm | ± 1.5 µm | ± 1.5 µm | ± 2 µm | ± 1.5 µm | ± 3 µm | ± 1.5 µm | ± 3.5 µm | ± 1.5 µm | ± 5 µm | ± 1.5 µm | typ. |
Integrated sensor | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | |
Sensor signal | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | |
Sensor resolution | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | |
Sensor signal period | 20 µm | 20 µm | 20 µm | 20 µm | 20 µm | 20 µm | |||||||
Reference switch | Encoder index | Encoder index | Encoder index | Encoder index | Encoder index | Encoder index | |||||||
Limit switches | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | |||||||
Drive Properties | A-123.050A1 | A-123.050B1 | A-123.100A1 | A-123.100B1 | A-123.200A1 | A-123.200B1 | A-123.350A1 | A-123.350B1 | A-123.500A1 | A-123.500B1 | A-123.750A1 | A-123.750B1 | Tolerance |
Drive type | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | |
Nominal voltage | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | |
Peak voltage | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | |
Nominal current, RMS | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | typ. |
Peak current, RMS | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | typ. |
Drive force in negative direction of motion in X | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | typ. |
Drive force in positive direction of motion in X | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | typ. |
Peak force in negative direction of motion in X | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | |
Peak force in positive direction of motion in X | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | |
Force constant | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | |
Resistance phase-phase | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | typ. |
Inductance phase-phase | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | |
Back EMF phase-phase | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | max. |
Pole pitch N-N | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | |
Mechanical Properties | A-123.050A1 | A-123.050B1 | A-123.100A1 | A-123.100B1 | A-123.200A1 | A-123.200B1 | A-123.350A1 | A-123.350B1 | A-123.500A1 | A-123.500B1 | A-123.750A1 | A-123.750B1 | Tolerance |
Guide | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | |
Moved mass in X, unloaded | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 500 g | 5000 g | 5000 g | 5000 g | 5000 g | |
Permissible push force in Y | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | max. |
Permissible push force in Z | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | max. |
Permissible torque in θx | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | max. |
Permissible torque in θY | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | max. |
Overall mass | 14000 g | 14000 g | 15500 g | 15500 g | 18000 g | 18000 g | 21500 g | 21500 g | 25000 g | 25000 g | 32000 g | 32000 g | |
Material | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | |
Miscellaneous | A-123.050A1 | A-123.050B1 | A-123.100A1 | A-123.100B1 | A-123.200A1 | A-123.200B1 | A-123.350A1 | A-123.350B1 | A-123.500A1 | A-123.500B1 | A-123.750A1 | A-123.750B1 | Tolerance |
Connector | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | |
Sensor connector | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | |
Operating pressure | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | |
Air consumption | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | max. |
Air quality | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | |
Recommended controllers / drivers | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | |
Operating temperature range | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C |
Downloads
Datasheet
Documentation
User Manual A123D0001
A-123 PIglide AT3 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback
3-D Models
A-123 3-D model
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PIglide AT3 linear stage, air bearings, 50 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
PIglide AT3 linear stage, air bearings, 100 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
PIglide AT3 linear stage, air bearings, 100 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
PIglide AT3 linear stage, air bearings, 200 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
PIglide AT3 linear stage, air bearings, 200 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
PIglide AT3 linear stage, air bearings, 350 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
PIglide AT3 linear stage, air bearings, 350 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
PIglide AT3 linear stage, air bearings, 500 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
PIglide AT3 linear stage, air bearings, 500 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
PIglide AT3 linear stage, air bearings, 750 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
PIglide AT3 linear stage, air bearings, 750 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V