L-511 High-Precision Linear Stage

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PI is a worldwide leading supplier of solutions in the fields of motion and positioning. PI does not only develop and produce a broad range of positioning stages and actuators for linear, rotary and vertical motion or combinations of different axes. PI also adapts those solutions to customer-specific applications or supplies finished subsystems for motion and positioning.
- New Products
  New Products
  On this site you will find our current new products. If you want to find out more, just contact us: Our sales engineers will get back to you as quickly as possible.
- Product Finder
  Product Finder
  Select the product type specified by the axes of motion required. Selection of more criteria expands or shortens the list of results. Select more than one filter at a time, for example, to find positioning stages designed for higher load capacity, too.
- Customized Products
  Customized Products
  PI is fully at home where unconventional solutions are in demand. This is no longer limited to fields of research. Today, nanotechnology is also present in standardized industrial processes.
- Nanopositioning Piezo Flexure Stages
  Nanopositioning Piezo Flexure Stages
  PI's piezo flexure stages combine sub-nanometer resolution and guiding precision with minimum crosstalk.
  Multi-Axis Piezo Flexure Stages
  Multi-Axis Piezo Flexure Stages
  PI’s multi-axis piezo flexure stages allow positioning and scanning with sub-nanometer precision in up to 6 axis, including tip, tilt and yaw motion. Versions range from most compact cube design to large aperture and low profile.
  PIFOC® Objective & PInano® Sample Scanners for Microscopy
  PIFOC® Objective & PInano® Sample Scanners for Microscopy
  Piezo flexure stages and objective scanners of the PIFOC® and PInano® series offer high dynamics in positioning and scanning tasks. Well adapted solutions for XY specimen positioning parallel and vertical to the optical axis and Z focusing of the objective are available as standard products.
  Linear Piezo Flexure Stages
  Linear Piezo Flexure Stages
  PI’s nanopositioning stages and scanners combine nanometer-precision resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for reference applications in metrology, for microscopic processes, for interferometry or in inspection systems for semiconductor chip production.
  XY Piezo Flexure Stages
  XY Piezo Flexure Stages
  High-precision 2-axis nanopositioning systems integrate PICMA® piezo actuators for maximum reliability. Repeatable, drift-free positioning with optimal stability is possible by the use of high-quality nanometrology sensors.
  XYZ Piezo Flexure Scanners
  XYZ Piezo Flexure Scanners
  3-Axis Nanopositioning Scanners of Maximum Precision
  Piezo Flexure Tilting Mirrors
  Piezo Flexure Tilting Mirrors
  The high stiffness of piezo flexure mirror platforms allows for high dynamics and excellent position stability. The compact devices are frequently used for beam deflection in laser processing and laser steering. Their parallel-kinematic design creates identical performance in tip and tilt axis, with a common fixed pivot point and no change of polarization direction.
- Miniature Stages
  Miniature Stages
  Miniaturized stages and manipulators are essential in mobile applications for measuring and medical devices, in industrial microassembly or use for research, e.g. in UHV and non-magnetic environments.
  Miniature Linear Stages
  Miniature Linear Stages
  Miniature stages are essential in positioning tasks where available space is limited. Piezomotor solutions like Q-motion, PIline® and PiezoWalk® allow for the most compact stages due to their direct drive principle.
  Miniature Rotation Stages
  Miniature Rotation Stages
  Rotation stages with piezomotor make for particularly compact sizes. These compact rotation stages can be used in optics applications, where they position, for example, filters reliably and with excellent repeatability. Rotation stages can be mounted on linear stages without adapter and allow for flexible combinations of multi-axis positioning systems.
  Miniature Hexapods
  Miniature Hexapods
  The smallest devices for 6 degrees of freedom are built from Q-motion piezomotor stages, but also palm-size BLDC motor versions are available. Best overall homogeneity of performance is achieved with the classic hexapod design. Low-profile design is preferred when relatively large tilting angles are required.
- Linear Stages
  Linear Stages
  PI offers a wide range of motorized linear stages to supply high-precision industrial markets like semiconductor and photonics, as well as high-end research. Vacuum versions are available for a large number of different models. Multi-axis compositions can be set up with adapter brackets or specialized vertical stages and compatible rotation stages.
  Stages with Magnetic Direct-Drive Linear Motor
  Stages with Magnetic Direct-Drive Linear Motor
  Stages with Magnetic Direct-Drive Linear Motor. The friction-free magnetic direct drive principle allows for most dynamic stages. Compared with motor-spindle-based stages, they use fewer mechanical components which results in less friction and backlash and thus more precision.
  Stages with Stepper, DC & Brushless DC (BLDC) Motors
  Stages with Stepper, DC & Brushless DC (BLDC) Motors
  Industrial applications in the production process such as laser processing benefit from the precise positioning accuracy of motorized positioning stages. Their low profile makes the variable stage series suitable for universal use, ranging from testing systems to production lines in precision automation.
  Vertical Stages with Stepper, DC & Brushless DC (BLDC) Motors
  Vertical Stages with Stepper, DC & Brushless DC (BLDC) Motors
  Vertical stages can be mounted on linear stages without adapter and allow for flexible combinations of multi-axis positioning systems.
  Miniature Linear Stages
  Miniature Linear Stages
  Miniature stages are essential in positioning tasks where available space is limited. Piezomotor solutions like Q-motion, PIline® and PiezoWalk® allow for the most compact stages due to their direct drive principle.
- Linear Actuators
  Linear Actuators
  Choose from the widest range of technologies the optimum for your special demands: Set-and-forget applications benefit from the specific features of piezomotors that provide excellent long-term stability, also for vacuum or nonmagnetic environments. Stepper and DC motor solutions are well-established and reliable for both industrial and research use.
  PiezoMike for Long-Term Stability
  PiezoMike for Long-Term Stability
  The PiezoMike linear actuators offer the high resolution of piezo direct drives, high forces and absolutely stable positioning. This makes them ideal for set-and-forget applications with high precision requirements like the positioning of optical elements in a laser application.
  Linear Actuators with Stepper & DC Servo Motors
  Linear Actuators with Stepper & DC Servo Motors
  Motorized linear actuators are indispensable in automation routines from industrial production to adjustment in research laboratories.
  PIMag® VC Voice Coil Actuators with High Dynamics & Force Control Option
  PIMag® VC Voice Coil Actuators with High Dynamics & Force Control Option
  Voice coil drives show very high velocities and allow for fast step-and-settle. Wear-free flexure guidings or mechanical guidings are available. The optional force control allows for stand-alone solutions in pressure-sensitive device testing.
  PiezoMove Lever Actuators
  PiezoMove Lever Actuators
  Nanopositioning Piezo Actuators
  Nanopositioning Piezo Actuators
  PIezoMove actuators are flexure-guided and have strokes up to 1 mm. Being very compact, they can be easily integrated. Generating forces of up to 10000 N and strokes of up to 100 µm are the characteristics of nanopositioning piezo actuators based on PICMA® multilayer piezos.
  PiezoWalk® Actuators with High Force & Stability
  PiezoWalk® Actuators with High Force & Stability
  PiezoWalk® actuators are highly specialized piezobased drives intended for integration. Designed for use in the semiconductor industry, they boost on reliability, position resolution and long-term stability. Their special features include minimum size with high force generation. The drive itself is resistant to magnetic fields.
  PIRest Active Piezo Shims
  PIRest Active Piezo Shims
- Rotation Stages
  Rotation Stages
  PI offers stages with all kinds of motorization and guiding options: air-bearing, torque motor driven, motorized worm-gear coupled, tiny piezomotor stages and specialized goniometer stages with orthogonal tip-tilt mounting option.
- XY Stages
  XY Stages
  Stability, precision and dynamics are crucial in the application fields of PI’s XY stages. They are the basis of high throughput rates and reliable operation. PI makes use of own developments in the fields of PIMag® magnetic linear motors and PIglide air bearings. Industrial production and quality control benefit from PI’s high-load XY stages and planar scanners.
- Hexapods
  Hexapods
  Hexapods provide six degrees of freedom in the most compact package. In combination with absolute measuring sensors, software and motion controllers that make the most complicated motion profiles easy to command, PI hexapods answer industrial requirements.
- Engineered Subsystems for Automation
  Engineered Subsystems for Automation
  Precision components, stable control and a great deal of experience in engineering are essential for high-precision complex motion and positioning solutions. PI is a supplier of technologically sophisticated drive components and high-precision positioners and also offers all levels of integration for engineered subsystems.
- Fast Multi-Channel Photonics Alignment
  Fast Multi-Channel Photonics Alignment Systems
  Piezo scanners take care of fast, continuous scanning tasks, where durability, dynamics, and precision matter. The larger travel ranges are realized with XYZ combinations or 6-axis hexapods. Integrated routines make it possible to perform single-axis alignments up to complex, multi-axis fiber array positioning within the shortest possible time.
- Motion Control Software
  Motion Control Software
  All digital controllers made by PI are accompanied by an extensive software package.
  Concepts
  Concepts
  PI pursues a cross-platform and hardware-independent concept in the design of the motion control software.
  User Programs and Their Functions
  User Programs and Their Functions
  Every PI controller is delivered with an extensive software package that supports the user in setting up and parametrizing the overall system.
  Software Tools for Hexapods
  Software Tools for Hexapods
  Programming
  Programming
  Customers can program or adapt their own user programs so that every PI controller can be seamlessly integrated into their application.
  Third Party Support
  Third Party Support
  Software Products for Special Applications
  Software Products for Special Applications
  Controllers and drivers from PI are supplied with an extensive software package that provides convenient solutions and interfaces for ensuring full functionality.
- Controllers & Drivers
  Controllers & Drivers
  The decision for a motion controller depends on the specific application situation. Various criteria, such as limited installation space, the number of axes or the type of control, determine which controller is the right one. PI offers a broad spectrum of controls and regulation concepts.
  Nanopositioning Piezo Controllers
  Nanopositioning Piezo Controllers
  PI offers the broadest range of digital and analog piezo control concepts that are adapted for optimal result in every application. Calibration of all piezo systems is done before delivery and all systems are delivered ready for operation.
  Piezo Drivers for Open-Loop Operation of Piezo Actuators
  Piezo Drivers for Open-Loop Operation of Piezo Actuators
  PI’s piezo drivers are available as benchtop or rackmount solutions, and as OEM modules also with separate power supply for minimized size. Piezo drivers integrate high-performance amplifiers specialized for different fields of applications.
  Motion Controllers & Drivers for Linear, Torque, Stepper & DC Servo Motors
  Motion Controllers & Drivers for Linear, Torque, Stepper & DC Servo Motors
  PI develops motion control solutions in-house to best adjust the features to the requirements of both drive and application. PI’s motion controllers are generally designed as single-channel devices and are available as benchtop, rackmount or OEM versions.
  Controllers & Drivers for Piezomotors
  Controllers & Drivers for Piezomotors
  Controller Systems for Multiple Axes & Mixed Drive Types
  Controller Systems for Multiple Axes & Mixed Drive Types
  Modular motion controller systems provide best flexibility for increasing the number of axes in a system. They allow the use of different drive types with only one user interface. The number of available models is continuously extended. Contact PI now for your individual controller setup!
  Hexapod Motion Controllers
  Hexapod Motion Controllers
  As unique as the hexapod mechanics, the motion controller is designed to make parallel kinematics algorithms as easy and unnoticed by the user as possible: All target positions are commanded in Cartesian coordinates. For best integration in automation processes, the Hexapod motion controller is available with industrial EtherCAT interface.
  ACS Motion Control
  ACS Motion Control for Industrial Automation
  We recommend the controllers of our partner, ACS Motion Control especially for automation with industrial standards. Ask us about your integrated solution!
- Piezoelectric Transducers & Actuators
  Piezoelectric Transducers & Actuators
  Piezoelectric ultrasonic transducers are available in a wide range of shapes like disks, plates or tubes, and different performance levels. They can be adapted to application requirements by using different piezoceramic materials, electrodes, and assembling technology.
  Discs, Rods and Cylinders
  Piezoceramic Discs, Rods & Cylinders
  Plates and Blocks
  Piezoceramic Plates & Blocks
  Rings
  Piezoceramic Rings
  Tubes
  Piezoceramic Tubes
  Spheres and Hemispheres
  Piezoceramic Spheres & Hemispheres
  Bending Elements
  Piezoceramic Bending Elements
  Tube Actuators
  Piezo Tube Actuators
  Radially and axially contracting piezo tubes are often used for creating dynamic scanning motions and as fiber stretchers.
  PICMA® Piezo Linear Actuators
  PICMA® Piezo Linear Actuators
  PICMA® multilayer actuators for an up to 10 times higher lifetime and operating time than conventional multilayer piezo actuators.
  PICMA® Piezo Bender Actuators
  PICMA® Piezo Bender Actuators
  Multilayer bending actuators: large displacement and high dynamics. Their bimorph structure ensures bidirectional displacement.
  PICA Piezoelectric Stack Actuators
  PICA Piezoelectric Stack Actuators
  Stacked piezo linear actuators with operating voltages to 1000 V: High reliability, large specific displacement and high forces.
  PICA Shear Actuators
  PICA Shear Actuators
  Multi-axis and shear actuators in stacked design offer excellent dynamics combined with minimum electrical power requirements.
  DuraAct Patch Transducers
  DuraAct Patch Transducers
  DuraAct patch transducers convert electrical voltage into mechanical energy and vice versa; as actuator, sensor or as energy generator.
  Picoactuator® Piezoelectric Crystal
  Picoactuator® Piezoelectric Crystal
  The motion of the Picoactuator® piezo crystals is highly linear and almost hysteresis-free and consequently suited for high-dynamics applications.
- Air Bearings & Stages
  Air Bearings & Stages
  Air bearing stages are used where vibration-free motion is required, velocity needs to be highly constant, and optimum angular repeatability is requested.
- Sensors, Components & Accessories
  Sensors, Components & Accessories
- Vacuum
  Product Series with Vacuum-Ready Items
  PI offers specific catalogue items for selected product series that are already suitable for high vacuum (HV) or ultra-high vacuum (UHV).
OEM
OEM
Customer- and application-specific product developments form the basis for success at PI. To this purpose, requirements have to be understood and a technological solution has to be found.
Applications
Applications & Markets
PI positioning systems are employed where technology is pushed forward in industry and research. This is done, for example, in semiconductor manufacturing, in medical engineering, in biotechnology, in plant engineering, in surface metrology, or in astronomy.
- Hexapods Support Industrial Robots
  Hexapods Support Industrial Robots
  Because the need for multi-axis and also precision robots in production and quality processes is on the increase, industry is looking out for new types of robotics. PI offers parallel-kinematic hexapods for these tasks.
- Scientific Instrumentation
  Scientific Instrumentation
  The term "scientific instrumentation" covers a variety of different applications, starting with microscopy via beamline processes through to the wide field of laboratory automation.
  Hexapod Systems for ALMA
  Hexapod Systems for ALMA
  Under the extreme conditions of the Atacama Desert, PI hexapods align the subreflectors to the large main reflectors of the ALMA radio telescopes.
  Double-Crystal Monochromator
  Double-Crystal Monochromator for an X-Ray Spectrometer
  The PI Beamline Instrumentation division’s aim is to develop application oriented solutions, e.g., this monochromator for an X-ray spectrometer.
  Materials Research in High Vacuum
  Materials Research in High Vacuum
  PI provides standard and custom high vacuum compatible positioning systems for materials research with high-energy X-rays.
  Active Vibration Isolation with Piezo Actuators
  Active Vibration Isolation with Piezo Actuators
  Active vibration isolation reduces settling times, increases precision in measurement and production sequences and achieves high throughput rates.
  Drive Technology for the ELT
  Drive Technology for the ELT
  The European - Extremely Large Telescope, in short E-ELT, is the largest terrestrial telescope for scientific evaluation of electromagnetic radiation.
- Semiconductor Technology
  Semiconductor Technology
  Lithographic processes are the reason why chips are getting smaller and smaller and why extremely fine structures can be realized on silicon wafers. Piezo drives have made these technical advances possible with their performance and reliability.
- Microscopy
  Microscopy
  Imaging processes increase efficiency across a number of fields, ranging from medical engineering to pharmaceutical research and manufacturing of semiconductors.
  Confocal Microscopy
  Adjustment of the Focal Planes in Confocal Microscopy
  Confocal microscopy is used to detect the structure of the sample surface through the shifting of the focal plane, for example in dermatology.
  Positioning Solutions for Total Internal Reflection Fluorescence Microscopy (TIRFM)
  Positioning Solutions for Total Internal Reflection Fluorescence Microscopy (TIRFM)
  Linear stages adjust the laser beam in the TIRF microscope. Precision positioning of the sample is possible by combining two XY stages.
  High-Speed Microscopy
  High-Speed Microscopy for Quality Control
  Specimen positioning on AFM scanners for atomic force microscopy is performed with piezo-based scanning stages which thus play a key role.
  Atomic Force Microscopy
  AFM Scanner for Atomic Force Microscopy
  Specimen positioning on AFM scanners for atomic force microscopy is performed with piezo-based scanning stages which thus play a key role.
  White Light Interferometry
  3-D Surface Inspection With Piezo-Based Positioning Systems from PI
  High-resolution camera systems are combined with white light interferometry for 3-D surface inspection with picometer resolution.
  Lens Positioning for 3-D Surface Inspection
  Flamingo Lightsheet Fluorescence Microscopy
  Flamingo Lightsheet Fluorescence Microscopy
  Light Sheet Fluorescence Microscopy (LSFM), also called Single Plane Illumination Microscopy (SPIM ) is a very powerful microscopy technology for gentle in vivo imaging offering low phototoxicity and fast image acquisition.
  IsoView Light Sheet Microscope
  IsoView Light Sheet Microscope
  Light Sheet Microscopy is a fascinating technology with a huge application potential in life sciences and biotechnology. IsoView is a brilliant interpretation of this technology, especially intended for imaging fast cellular dynamics across large specimens over several hours. Specimen positioning and objective translation plays a major role in the design of IsoView.
  Electron Microscopy
  Electron Microscopy
  Nano precise positioning of samples is essential in all TEM and SEM microscopes in order to unleash the full power of these great instruments. PI offers a wide variety of drives fulfilling the requirements like vacuum compatibility, nonmagnetic and of course high, bidirectional repeatability of positoning.
- Silicon Photonics
  Silicon Photonics
  Silicon photonics allows data rates into the Tbit/s range and is therefore suitable for computer-aided services that require the highest possible transmission speeds.
  Photonics Packaging
  Automated Photonics Packaging
  An automated assembly and alignment system can reduce the manufacturing process for silicon photonics to only a few minutes. However, handling the delicate waveguides is indeed a major challenge as the integration of the light sources at a wafer level and connection of the optical inputs and outputs are difficult to perform.
  Optical Fiber Alignment
  Simultaneous Testing of Optical Components in Silicon Photonics
  Silicon photonics presents new challenges for the production of components as well as testing and slicing the wafers.
- Medical Technology
  Medical Technology
  Progress in pharmaceutical research, diagnostics, and therapy requires high-performance and precise position systems. In addition to high positioning precision, requirements for the drives often include compact dimensions, low energy consumption, speed, and high reliability.
  Endoscopy
  Variable Focusing and Sharp Focus for Endoscopic Applications
  Tiniest piezomotors, magnetic miniature drives and miniaturized piezo tubes are used in various are used in various endoscopy procedures to generate high-resolution image information in the smallest possible installation space.
  Surgical Robots for Ophthalmology
  Surgical Robots for Ophthalmology
  The control and focusing of laser beams in ophthalmic surgery requires accurate positioning systems, such as piezo-driven tip/tilt mirror systems.
  Magnetic Resonance Imaging
  Nonsensitive Drives for Magnetic Resonance Tomography
  Piezo drives are well suited for magnetic resonance therapy, because they are not influenced by strong magnetic fields.
  Optical Coherence Tomography
  Piezo Technology and Optical Coherence Tomography (OCT)
  Piezo actuators and drives, e.g., PILine® OEM motors, ensure the high precision and position stability required for optical coherence tomography (OCT).
  Pipetting
  Piezomotors for Pipetting and Nanodispensing
  Piezomotors are suited for pipetting with small devices and sample separations and are able to move the pipettes in the vertical direction.
  Precision Dosing
  Dynamic Drives for Precision Dosing with Nanodispensers
  Piezo actuators are ideal for precision dosing with nanodispensers: They can switch valves directly, and can also work against a closing spring.
  Micropumps
  Piezoelectric Micropumps – Compact Design and High Performance
  Piezoelectric micro-diaphragm pumps offer high performance on small space – the drives allow a continuous flow and a variable flow rate.
  Image Stabilization
  Image Stabilization and Microscanning with Piezo Scanners
  Fast, piezo-based scanners operate with the necessary velocities in the video frequency range for image stabilization and microscanning.
  Adaptive Diaphragm Positioning
  Adaptive Diaphragm Positioning
  In radiation therapy, the individual leaves are adjusted so that the healthy tissue offers the optimum protection from the radiation.
  Positioning Solutions for Whole Genome Sequencing
  Positioning Solutions for Whole Genome Sequencing
  Speed and precision have leaped since the beginnings of genome analysis – while, at the same time, costs have continuously decreased. „Sequencing-by-synthesis“, the currently leading method, is based on signal detection by fluorescence microscopes. Positioning solutions for microscope objectives and sample stages play a decisive role in it.
- Materials Research
  Materials Research
  Efficiency has become an important buzzword these days. Materials research has paid a major contribution as the results have, for example, optimized processing methods. Methods such as X-rays and lasers or white light interferometry demand precise positioning of the specimens to be examined and of optics or beam control.
  Parallel Kinematics for Materials Research
  High-Load Parallel Kinematics for Materials Research
  The high-energy X-rays at beamlines provide numerous possibilities for materials research, such as checking welding seams of workpieces.
  Laser Beam Control
  Piezo Drives for Laser Beam Control
  Lasers are tools that can be used in many areas of application. At the same time, the laser beam control requires precision, dynamics, and reliability.
- Mechanical Engineering
  Mechanical Engineering
  Mechanical engineering and manufacturing technology require fast, reliable and energy-saving drive components. The spectrum ranges from piezo actuators to six-axis parallel kinematics which can communicate directly with CNC controls.
  Electrical Discharge Machining
  Piezo Actuators Accelerate Electrical Discharge Machining
  Precision components are manufactured using electrical discharge machining, often in large numbers. Vibrating piezo actuators make a crucial contribution here.
  Hexapods in Mechanical Engineering
  Hexapods in Mechanical Engineering
  PI hexapod 6-axis positioning systems can handle loads from 2 kg to several tons. Ideal for precision mechanical engineering applications.
- Automation
  Automation
  Piezo drives, magnetic direct drives, and hexapods are part and parcel of automation today. They operate precisely and reliably and have proven themselves under rugged conditions.
  Smarter Motion Positioning
  Smarter Motion Positioning
  Positioning and motion tasks in industrial automation such as those in assembly, semiconductor manufacturing, mechanical engineering, laser material processing, inspection systems or in additive manufacturing demand solutions that need to be robust and reliable.
  Hexapods in Microproduction
  Hexapods in Microproduction
  What do optical components and glass fibers in photonics, mobile devices, and high-quality wristwatches all have in common?
  Hexapods for Quality Assurance
  Hexapods for Quality Assurance
  Microproduction technology makes high-precision positioning systems absolutely necessary for both assembly and quality assurance.
  Magnetic Direct Drives
  Magnetic Direct Drives
  Magnetic direct drives, which include voice-coil actuators and linear drives, are often predestined here as the best solutions for many reasons.
  Motion Simulation with Hexapods
  Motion Simulation with Hexapods
  Motion simulation with hexapods with CIPA certificate from PI (Physik Instrumente) – vibrating tables are used for testing resistance to vibration.
  Flexibility in Dimensional Measuring
  Hexapod Systems in Automation
  Hexapods allow for an outstanding flexibility for a variety of samples of in-line automation systems by minimizing the space for motion robotics.
  Motion Compensation with Hexapods
  Motion Compensation with Hexapods
  Dynamic hexapods with piezo drives: Best conditions for motion compensation.
  Fast Piezo Ultrasonic Drives Advance Technology
  Fast Piezo Ultrasonic Drives Advance Technology
  When increased demands are placed on an application, ultrasonic piezo motors can prove to be a good alternative, as they can be used in many ways.
  Laser Material Processing
  Laser Material Processing
  PI offers automation platforms for high-precision and high-throughput laser material processing, such as laser marking, laser cutting and micromachining.
  Hexapods for Optical Metrology
  Hexapods Support Precise Measurement of Aspheres
  Testing aspherical shape accuracy requires the measurement of the smallest deviations in the nanometer range and short measuring and set-up times. The solution is a new interferometer from metrology company Mahr. As part of the overall system, the hexapod positions lenses and the calibration sphere.
- Beamline Instrumentation
  Beamline Instrumentation
  Scientific experiments pose their own challenges, and beamline X-ray experiments are even more special in themselves. However, the need for precision equipment is universal.
  Tomography Equipment
  Tomography Equipment
  Synchrotron Spectroscopy in Vacuum
  Synchrotron Spectroscopy in Vacuum
  Beam Preparation
  Beam Preparation
  Sample Positioning for Tomography
  Sample Positioning for Tomography
  Microscopy
  Microscopy
  Accelerator Technology
  Accelerator Technology
  Dynamic compensation of Lorentz forces at the XFEL accelerator structures: The particle accelerator XFEL at the DESY (German Electron Synchrotron) uses acceleration technology based on super-conducting acceleration structures, so-called resonators or cavities.
- Additive Manufacturing
  Additive Manufacturing
  Due to their high dynamics and pushing forces piezo actuators are highly suitable for the use in machines for additive manufacturing.
- Active Alignment
  Active Alignment
  The assembly of complex optical systems like objective lenses for smartphone cameras or laser cavities requires more and more accuracy. Active alignment addresses the resulting needs and helps to reduce cycle times by two orders of magnitude and more.
Technology
Know-How & Technology
PI combines its long-term experience in micro and nanopositioning technology with in-depth knowledge in the fields of mechanics, electronics, sensor engineering, and software. Thus, PI is able to offer its customers the most advanced drive technologies and system solutions.
- Piezo Technology
  Piezo Technology
  PI Ceramic offers a wealth of experience in the manufacturing of piezoceramic materials, components, and actuators. The piezoceramic materials can be adapted individually to perfectly fit the later use of the piezo components.
  Fundamentals of Piezo Technology
  Fundamentals of Piezo Technology
  Physical basics and explanations of piezo electricity and electromechanics.
  Properties of Piezo Actuators
  Properties of Piezo Actuators
  Characteristics of piezoceramic actuators: Displacement modes, forces and stiffnesses, dynamics. Ambient conditions.
  Piezoceramic Materials
  Piezoceramic Materials
  PI Ceramic offers a variety of different piezoelectric materials including lead-free materials.
  Manufacturing Technology
  Manufacturing Technology
  PI Ceramic offers a wide range of manufacturing technologies: Pressing or tape technology, assembling technology and testing procedures.
  PICMA® Technology
  PICMA® Technology
  Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.
  Integrated Piezo Actuators
  Integrated Piezo Actuators
  To avoid pull forces, these piezo elements are provided with a mechanical preload in mechanical cases or by means of flexure joints.
  DuraAct Patch Transducer Technology
  DuraAct Patch Transducer Technology
  Manufacture, functional principle and typical working parameters of DuraAct patch transducers explain the possible force generation and deflection.
  PIRest Actuators
  PIRest Actuators
  Active shims with long-term stability and nanometer resolution.
- Piezoelectric Drives
  Piezoelectric Drives
  Depending on the configuration and control, piezoceramic actuators can be used to create translational motions or as motors with a virtually unlimited travel range. The choice of drive depends on the requirements of the application.
  Piezo Actuators
  Piezo Actuators with and without Guiding
  Piezoelectric actuators offer subnanometer resolution and very short response times, making them ideally suitable for nanometer-precision positioning at high dynamics.
  PiezoWalk® Walking Drives
  PiezoWalk® Walking Drives
  PiezoWalk® drives were developed more than 10 years ago for the semiconductor industry, a demanding industry when it comes to reliability, position resolution and long-term stability.
  PILine® Ultrasonic Piezomotors
  PILine® Ultrasonic Piezomotors
  Ultrasonic piezomotors dispense with the mechanical complexity of classical rotary motor/gear/leadscrew combinations in favor of costs and reliability.
  Piezo Inertia Drives
  Piezo Inertia Drives
  Inertia Drives are space-saving and low-cost piezo-based drives with relatively high holding forces and a travel range that is only limited by the length of the runner.
  PiezoMike Linear Actuators
  PiezoMike Linear Actuators
  Compact, low-cost inertia drive principle (stick-slip). When at rest, the drive is self-locking, requires no current and generates no heat. It holds the position with maximum force.
  Comparison: Piezo Motors & Drive Technologies
  Comparison: Piezo Motors & Drive Technologies
  PIs drive technologies in comparison: Piezo motors, stepping drives, ultrasonic drives, and piezo inertia drives.
- Electromagnetic Drives
  Electromagnetic Drives
  Rotating electric motors such as DC or stepper motors are used in connection with screw or worm drives. Stepper motor systems with high-resolution encoders can perform minimum incremental motions of 10 nm with high reliability and repeatability.
  Rotating Electric Motors
  Rotating Electric Motors from PI
  Rotating electric motors such as DC or stepper motors are used in connection with screw or worm drives.
  Magnetic Direct Drives
  Magnetic Direct Drives
  In particular in terms of wear and dynamics, magnetic direct drives offer advantages compared to common spindle-based technologies.
  PIMag® 6-D Magnetic Levitation
  PIMag® 6-D Magnetic Levitation at Six Levels of Freedom
  PIMag® 6-D is an electromagnetic positioning system in which the passive platform levitates on a magnetic field and is actively guided by it.
  Hybrid Concept
  Piezo & Motor Hybrid Concept
  In the hybrid concept, the DC servo motor (large travel ranges) and the piezo drive (nanometer accuracy) are combined with one another.
- Parallel Kinematics
  Parallel Kinematics
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High Travel Accuracy

L-511 High-Precision Linear Stage

Product Description Specifications Downloads Quote / Order

PI L-511

L-511 versions with BLDC motor and rotary encoder, dimensions in mm

The L-511 reliably performs repeatable 20-nm steps with the linear encoder and SMC Hydra motion controller

Detail drawing of the L-511 motion platform, dimensions in mm

L-511 versions with stepper motor, dimensions in mm

L-511 versions with ActiveDrive DC motor, dimensions in mm

L-511 versions with DC gear motor, dimensions in mm

L-511 versions with BLDC motor and linear encoder, dimensions in mm

Direction of the axes and torques for linear stages

Multi-axis setup with L-511 (horizontal) and L-509 (vertical) precision stages

L-511 and L-509 precision stages can be combined without adapter plate for multi-axis positioning

Travel ranges from 52 to 155 mm (2" to 6")
Repeatability to 0.1 µm
Active Drive DC, BLDC, and DC gear motor
Stepper motor
Optional: Linear encoder for direct position measuring
Direction-sensing reference switch

High travel accuracy and load capacity thanks to recirculating ball bearing guides. Precision ball screw with 2 mm pitch. Stress-relieved aluminum base for highest stability. Noncontact optical limit switches. Noncontact optical reference switch with direction sensing in the middle of the travel range.

ActiveDrive DC motor for high velocity: Control via pulse-width-modulated (PWM) signals, the operating voltage is achieved via an amplifier integrated in the motor housing
DC servo motor with gearhead for high torques and resolution at low motor power
Brushless DC motor: For applications with a high duty cycle. Use a controller with sine commutation for an exceptionally smooth synchronous motion and low vibrations even at a very low velocity.
2-phase stepper motor for low velocity and high resolution

Without encoder (open loop)
Rotary encoder integrated on the motor shaft
Incremental linear encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Autofocus. Laser cutting. Research. Biotechnology. Automation. Optical alignment.

Download datasheet Go to specifications

Datasheet

3-D model L-511.24AD00

Version / Date

2020-04-29

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General specifications	L-511	Unit	Tolerance
Active axes	X
Drive screw type	Ball screw
Drive screw pitch	2	mm
Guide type	Recirculating ball bearing guide
Load capacity	500	N	Max.
Permissible lateral force	250	N	Max.
Permissible torque M_X in θX	60	Nm	Max.
Permissible torque M_Y in θY	30	Nm	Max.
Permissible torque M_Z in θZ	30	Nm	Max.
Reference and limit switches	Optical
Material	Aluminum, stainless steel
Operating temperature range	5 to 40	°C

Travel range-dependent specifications	L-511.2 / L-511.03	L-511.4 / L-511.05	L-511.6 / L-511.07	Unit	Tolerance
Travel range	52	102	155	mm
Pitch / yaw	±40	±60	±70	µrad	typ.
Straightness / flatness	±1.5	±2.5	±3.0	µm	typ.
Moved mass, unloaded	0.6	0.6	0.65	kg	±5%
Mass
DC gear motor	2.5	2.7	2.9	kg	±5%
Active Drive DC motor with rotary encoder	2.5	2.8	3.3	kg	±5%
Active Drive DC motor with linear encoder	2.5	2.7	3.5	kg	±5%
BLDC motor / BLDC motor with linear encoder	2.4	2.7	3.0	kg	±5%
Stepper motor / stepper motor with linear encoder	2.4	2.6	3.1	kg	±5%

DC motor and encoder options	DC gear motor with rotary encoder L-511.x0DG10	ActiveDrive DC motor with rotary encoder L-511.x0AD10	ActiveDrive DC motor with linear encoder L-511.x4AD00	Unit	Tolerance
System resolution	17	122	50	nm
Unidirectional repeatability	0.2	0.488	0.1	µm	Typ.
Bidirectional repeatability	±2	±1.250	±0.2	µm	Typ.
Minimum incremental motion	0.1	0.488	0.1	µm	Typ.
Maximum velocity	6	90	90	mm/s
Drive force	100	100	100	N	Max.
Holding force (passive)	50	–	–	N	Typ.
Limit switch	Forked photoelectric sensor, N/C contact, 5V, NPN	Forked photoelectric sensor, N/C contact, 5V, TTL	Forked photoelectric sensor, N/C contact, 5V, TTL
Gear ratio	2401:81	–	–
Motor encoder	Incremental rotary encoder	Incremental rotary encoder	–
Motor encoder: Sensor resolution	4096	16384	–	Cts./rev.
Motor encoder: Sensor signal	A/B quadrature, TTL	A/B quadrature, TTL	A/B quadrature, TTL
Linear encoder	–	–	Incremental linear encoder
Sensor resolution linear encoder	–	–	50	nm
Sensor signal linear encoder	–	–	A/B quadrature, TTL
Motor type	DC gear motor	ActiveDrive DC motor (PWM)	ActiveDrive DC motor (PWM)
Operating voltage, nominal	12	24	24	V	Nom.
Operating voltage, max.	24	48	48	V	Max.
Resistance**	4.09	1.63	1.63	Ω	Typ.
Inductance**	0.18	0.27	0.27	mH	Typ.
Back EMF	1.68	3.95	3.95	V/kRPM	Max.
Number of pole pairs	–	–	–
Motor resolution	–	–	–	Full steps/rev.
Connector	HD D-sub 26 (m)	D-sub 15 (m)	D-sub 15 (m) (motor/sensor)
Connector: Linear encoder	–	–	–
Connector: Supply voltage	–	M8 4-pin (m)	M8 4-pin (m)
Recommended controllers/drivers	C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller	C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes)	C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes)

BLDC motor and encoder option	BLDC motor with rotary encoder L-511.xx5132	BLDC motor with rotary encoder and linear encoder L-511.xx5111	Unit	Tolerance
System resolution	100	50	nm
Unidirectional repeatability	0.2	0.1	µm	Typ.
Bidirectional repeatability	±1.25	±0.1	µm	Typ.
Minimum incremental motion	0.2	0.1	µm	Typ.
Maximum velocity	90	90	mm/s
Drive force	100	100	N	Max.
Holding force (passive)	–	–	N	Typ.
Limit switch	Forked photoelectric sensor, N/C contact, 5V, NPN	Forked photoelectric sensor, N/C contact, 5V, NPN
Gear ratio	–	–
Motor encoder	Incremental rotary encoder	Incremental rotary encoder
Motor encoder: Sensor resolution	20000	20000	Cts./rev.
Motor encoder: Sensor signal	A/B quadrature, TTL	A/B quadrature, TTL
Linear encoder	–	Incremental linear encoder
Sensor resolution linear encoder	100	50	nm
Sensor signal linear encoder	–	Sin/cos, 1 V peak-peak, 20 µm signal period
Motor type	Brushless DC motor, 3-phase	Brushless DC motor, 3-phase
Operating voltage, nominal	36	36	V	Nom.
Operating voltage, max.	48	48	V	Max.
Resistance*	0.807	0.807	Ω	Typ.
Inductance*	0.644	0.644	mH	Typ.
Back EMF	3.3	3.3	V/kRM	Max.
Number of pole pairs	7	7
Motor resolution	–	–	Full steps/rev.
Connector	HD D-sub 26 (m)	HD D-sub 26 (m)
Connector: Linear encoder	–	D-sub 9 (m)
Connector: Supply voltage	–	–
Recommended controllers/drivers	C-891 (single axis) C-885 with C-891.11C885 (up to 20 axes) ACS modular controller SMC Hydra (double axis)	C-891 (single axis) C-885 with C-891.11C885 (up to 20 axes) ACS modular controller

Stepper motor and encoder options	2-phase stepper motor L-511.x0SD00	2-phase stepper motor with linear encoder L-511.xASD00	Unit	Tolerance
System resolution	10000	5	nm
Unidirectional repeatability	0.2	0.1	µm	Typ.
Bidirectional repeatability	±2	±0.2	µm	Typ.
Minimum incremental motion	0.2	0.02	µm	Typ.
Maximum velocity	45	45	mm/s
Drive force	100	100	N	Max.
Holding force (passive)	50	50	N	Typ.
Limit switch	Forked photoelectric sensor, N/C contactor, 5V, NPN	Forked photoelectric sensor, N/C contactor, 5V, NPN
Gear ratio	–	–
Motor encoder	–	–
Motor encoder: Sensor resolution	–	–	Cts./rev.
Motor encoder: Sensor signal	–	–
Linear encoder	–	Incremental linear encoder
Sensor resolution linear encoder	–	5	nm
Sensor signal linear encoder	–	Sin/cos, 1 V peak-peak, 20 µm signal period
Motor type	2-phase stepper motor	2-phase stepper motor
Operating voltage, nominal	24	24	V	Nom.
Operating voltage, max.	48	48	V	Max.
Resistance*	3.3	3.3	Ω	Typ.
Inductance*	2.8	2.8	mH	Typ.
Back EMF	–	–	V/kRM	Max.
Number of pole pairs	–	–
Motor resolution	200	200	Full steps/rev.
Connector	HD D-sub 26 (m)	HD D-sub 26 (m)
Connector: Linear encoder	–	D-sub 9 (m)
Connector: Supply voltage	–	–
Recommended controllers/drivers	C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller

* Resistance/inductance per phase

** Terminal resistance/inductance

Connecting cables are not in the scope of delivery and must be ordered separately.

Download datasheet Go to download

Datasheet

3-D model L-511.24AD00

Version / Date

2020-04-29

Request download link

Datasheet

Datasheet L-511

Version / Date

2020-06-26

Version / Date

2020-06-26

Version / Date

2018-11-27

Document language

pdf - 3 MB

pdf - 3 MB

pdf - 2 MB

Documentation

User Manual MP140

L-511 High-Precision Linear Stage

Version / Date

1.6 2020-06-29

Version / Date

1.6 2020-06-29

Document language

Request download link

Documentation

Short Instructions MP146EK

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date

1.5.0 October 2017

pdf - 395 KB

3-D Models

L-511 3-D model

Document language English

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Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

L-511.035132

Precision linear stage, 110 mm width, 52 mm travel range, brushless DC motor

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L-511.055132

Precision linear stage, 110 mm width, 102 mm travel range, brushless DC motor

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L-511.075132

Precision linear stage, 110 mm width, 155 mm travel range, brushless DC motor

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L-511.035111

Precision linear stage, 110 mm width, 52 mm travel range, brushless DC motor, linear encoder with sin/cos signal transmission

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L-511.055111

Precision linear stage, 110 mm width, 102 mm travel range, brushless DC motor, linear encoder with sin/cos signal transmission

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L-511.075111

Precision linear stage, 110 mm width, 155 mm travel range, brushless DC motor, linear encoder with sin/cos signal transmission

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L-511.20DG10

Precision linear stage, 110 mm width, 52 mm travel range, DC gear motor

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L-511.40DG10

Precision linear stage, 110 mm width, 102 mm travel range, DC gear motor

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L-511.60DG10

Precision linear stage, 110 mm width, 155 mm travel range, DC gear motor

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L-511.20AD10

Precision linear stage, 110 mm width, 52 mm travel range, ActiveDrive DC motor

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L-511.40AD10

Precision linear stage, 110 mm width, 102 mm travel range, ActiveDrive DC motor

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L-511.60AD10

Precision linear stage, 110 mm width, 155 mm travel range, ActiveDrive DC motor, rotary encoder

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L-511.24AD00

Precision linear stage, 110 mm width, 52 mm travel range, ActiveDrive DC motor, linear encoder with A/B quadrature signal transmission

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L-511.44AD00

Precision linear stage, 110 mm width, 102 mm travel range, ActiveDrive DC motor, linear encoder with A/B quadrature signal transmission

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L-511.64AD00

Precision linear stage, 110 mm width, 155 mm travel range, ActiveDrive DC motor, linear encoder with A/B quadrature signal transmission

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L-511.20SD00

Precision linear stage, 110 mm width, 52 mm travel range, stepper motor

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L-511.40SD00

Precision linear stage, 110 mm width, 102 mm travel range, stepper motor

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L-511.60SD00

Precision linear stage, 110 mm width, 155 mm travel range, stepper motor

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L-511.2ASD00

Precision linear stage, 110 mm width, 52 mm travel range, stepper motor, linear encoder with sin/cos signal transmission

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L-511.4ASD00

Precision linear stage, 110 mm width, 102 mm travel range, stepper motor, linear encoder with sin/cos signal transmission

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L-511.6ASD00

Precision linear stage, 110 mm width, 155 mm travel range, stepper motor, linear encoder with sin/cos signal transmission

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Separate connection cable required for motor and sensor connection respectively.