L-511 High-Precision Linear Stage

Active axes

X

Drive screw type

Ball screw

Drive screw pitch

2

mm

Guide type

Recirculating ball bearing guide

Load capacity

500

N

Max.

Permissible lateral force

250

N

Max.

Permissible torque M_X in θX

60

Nm

Max.

Permissible torque M_Y in θY

30

Nm

Max.

Permissible torque M_Z in θZ

30

Nm

Max.

Reference and limit switches

Optical

Material

Aluminum, stainless steel

Operating temperature range

5 to 40

°C

Travel range

52

102

155

mm

Pitch / yaw

±40

±60

±70

µrad

typ.

Straightness / flatness

±1.5

±2.5

±3.0

µm

typ.

Moved mass, unloaded

0.6

0.6

0.65

kg

±5%

Mass

DC gear motor

2.5

2.7

2.9

kg

±5%

Active Drive DC motor with rotary encoder

2.5

2.8

3.3

kg

±5%

Active Drive DC motor with linear encoder

2.5

2.7

3.5

kg

±5%

BLDC motor / BLDC motor with linear encoder

2.4

2.7

3.0

kg

±5%

Stepper motor / stepper motor with linear encoder

2.4

2.6

3.1

kg

±5%

System resolution

17

122

50

nm

Unidirectional repeatability

0.2

0.488

0.1

µm

Typ.

Bidirectional repeatability

±2

±1.250

±0.2

µm

Typ.

Minimum incremental motion

0.1

0.488

0.1

µm

Typ.

Maximum velocity

6

90

90

mm/s

Drive force

100

100

100

N

Max.

Holding force (passive)

50

–

–

N

Typ.

Limit switch

Forked photoelectric sensor, N/C contact, 5V, NPN

Forked photoelectric sensor, N/C contact, 5V, TTL

Forked photoelectric sensor, N/C contact, 5V, TTL

Gear ratio

2401:81

–

–

Motor encoder

Incremental rotary encoder

Incremental rotary encoder

–

Motor encoder: Sensor resolution

4096

16384

–

Cts./rev.

Motor encoder: Sensor signal

A/B quadrature, TTL

A/B quadrature, TTL

A/B quadrature, TTL

Linear encoder

–

–

Incremental linear encoder

Sensor resolution linear encoder

–

–

50

nm

Sensor signal linear encoder

–

–

A/B quadrature, TTL

Motor type

DC gear motor

ActiveDrive DC motor (PWM)

ActiveDrive DC motor (PWM)

Operating voltage, nominal

12

24

24

V

Nom.

Operating voltage, max.

24

48

48

V

Max.

Resistance**

4.09

1.63

1.63

Ω

Typ.

Inductance**

0.18

0.27

0.27

mH

Typ.

Back EMF

1.68

3.95

3.95

V/kRPM

Max.

Number of pole pairs

–

–

–

Motor resolution

–

–

–

Full steps/rev.

Connector

HD D-sub 26 (m)

D-sub 15 (m)

D-sub 15 (m) (motor/sensor)

Connector: Linear encoder

–

–

–

Connector: Supply voltage

–

M8 4-pin (m)

M8 4-pin (m)

Recommended controllers/drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

System resolution

100

50

nm

Unidirectional repeatability

0.2

0.1

µm

Typ.

Bidirectional repeatability

±1.25

±0.1

µm

Typ.

Minimum incremental motion

0.2

0.1

µm

Typ.

Maximum velocity

90

90

mm/s

Drive force

100

100

N

Max.

Holding force (passive)

–

–

N

Typ.

Limit switch

Forked photoelectric sensor, N/C contact, 5V, NPN

Forked photoelectric sensor, N/C contact, 5V, NPN

Gear ratio

–

–

Motor encoder

Incremental rotary encoder

Incremental rotary encoder

Motor encoder: Sensor resolution

20000

20000

Cts./rev.

Motor encoder: Sensor signal

A/B quadrature, TTL

A/B quadrature, TTL

Linear encoder

–

Incremental linear encoder

Sensor resolution linear encoder

100

50

nm

Sensor signal linear encoder

–

Sin/cos, 1 V peak-peak, 20 µm signal period

Motor type

Brushless DC motor, 3-phase

Brushless DC motor, 3-phase

Operating voltage, nominal

36

36

V

Nom.

Operating voltage, max.

48

48

V

Max.

Resistance*

0.807

0.807

Ω

Typ.

Inductance*

0.644

0.644

mH

Typ.

Back EMF

3.3

3.3

V/kRM

Max.

Number of pole pairs

7

7

Motor resolution

–

–

Full steps/rev.

Connector

HD D-sub 26 (m)

HD D-sub 26 (m)

Connector: Linear encoder

–

D-sub 9 (m)

Connector: Supply voltage

–

–

Recommended controllers/drivers

C-891 (single axis)

C-885 with C-891.11C885 (up to 20 axes)

ACS modular controller

SMC Hydra (double axis)

C-891 (single axis)

C-885 with C-891.11C885 (up to 20 axes)

ACS modular controller

System resolution

10000

5

nm

Unidirectional repeatability

0.2

0.1

µm

Typ.

Bidirectional repeatability

±2

±0.2

µm

Typ.

Minimum incremental motion

0.2

0.02

µm

Typ.

Maximum velocity

45

45

mm/s

Drive force

100

100

N

Max.

Holding force (passive)

50

50

N

Typ.

Limit switch

Forked photoelectric sensor, N/C contactor, 5V, NPN

Forked photoelectric sensor, N/C contactor, 5V, NPN

Gear ratio

–

–

Motor encoder

–

–

Motor encoder: Sensor resolution

–

–

Cts./rev.

Motor encoder: Sensor signal

–

–

Linear encoder

–

Incremental linear encoder

Sensor resolution linear encoder

–

5

nm

Sensor signal linear encoder

–

Sin/cos, 1 V peak-peak, 20 µm signal period

Motor type

2-phase stepper motor

2-phase stepper motor

Operating voltage, nominal

24

24

V

Nom.

Operating voltage, max.

48

48

V

Max.

Resistance*

3.3

3.3

Ω

Typ.

Inductance*

2.8

2.8

mH

Typ.

Back EMF

–

–

V/kRM

Max.

Number of pole pairs

–

–

Motor resolution

200

200

Full steps/rev.

Connector

HD D-sub 26 (m)

HD D-sub 26 (m)

Connector: Linear encoder

–

D-sub 9 (m)

Connector: Supply voltage

–

–

Recommended controllers/drivers

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller