NEW

A-63x PIglide RL Low-Profile Rotation Stage with Air Bearing

Friction-Free, Motorized

200 mm or 300 mm motion platform diameter
Low profile, 60 mm
Eccentricity and flatness < 100 nm
Option for self-locking at rest by magnetic preload

Product Overview

The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design.

Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning.

The RL stages offer superior travel accuracy, flatness, and wobble performance.

3-phase torque motor

  • Brushless
  • Slotless
  • Low cogging torque

Absolute encoder (optional)

Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

Accessories and options

  • Incremental or absolute encoder
  • Vacuum feedthrough
  • Self-locking at rest by magnetic preload
  • PIglide filter and air preparation kit
  • Single or multi-axis motion controllers and servo drives
  • Multi-axis/customized designs
  • Base plates made of granite and systems for reducing vibration

Application fields

Optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Specifications

pdf
pdf

Datasheet A-63x

2018-01-17
pdf - 740 KB
pdf - 749 KB

Images /Drawings

A-637.x100 drawing
A-635.x100 drawing

Downloads

Datasheet

pdf
pdf

Datasheet A-63x

2018-01-17
pdf - 740 KB
pdf - 749 KB

3-D Models

zip

A-63x 3-D model

English
zip - 4 MB