P-911KNMV
Non-Magnetic, UHV-Compatible Hexapod with NEXLINE® Piezo Stepping Drives, incl. Controller
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The space-saving parallel-kinematic design allows for the low overall height of less than 90 mm and a diameter of only 100 mm. NEXLINE® piezo stepping motor drives and integrated incremental sensors ensure a position resolution down to 0.1 µm in the linear axes