The material may not outgas and must be resistant to heat in order to overcome the bakeout temperatures necessary for higher vacuum classes. However, the required precision and high position resolution as well as flatness must be maintained.
For example, common electrical and electronic equipment contains components that either do not suit vacuum applications or only to limited extent. These comprise cables, motors, scaling systems, connectors or limit switches. PI implements specific product features for all these components to strongly reduce outgassing from these components and creating a clean vacuum environment.
Therefore, the materials used for vacuum positioning systems are aluminum alloys, stainless steels, titanium, or bronze. Surface treatment is adapted to the vacuum class, for example, the surfaces of the higher vacuum classes are not coated but blanc aluminum or electro polish. For use in HV and UHV, special vacuum lubricants are used. On request, the lubricant may be defined when placing the order. Vacuum cable insulation is made of PTFE or FEP (Teflon), and also of polyimide (Kapton) or PEEK. The use of adhesives is reduced as far as possible.